JP2005183906A - 窒化物半導体装置及びその製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 278
- 150000004767 nitrides Chemical class 0.000 title claims abstract description 236
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 43
- 239000000758 substrate Substances 0.000 claims abstract description 42
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 32
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 32
- 238000000034 method Methods 0.000 claims description 54
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 32
- 229910052757 nitrogen Inorganic materials 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 14
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 8
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 8
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 8
- 229910052785 arsenic Inorganic materials 0.000 claims description 8
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 8
- 229910052796 boron Inorganic materials 0.000 claims description 8
- 229910052733 gallium Inorganic materials 0.000 claims description 8
- 229910021478 group 5 element Inorganic materials 0.000 claims description 8
- 229910052738 indium Inorganic materials 0.000 claims description 8
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 8
- 229910052698 phosphorus Inorganic materials 0.000 claims description 8
- 239000011574 phosphorus Substances 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims description 2
- 238000005121 nitriding Methods 0.000 claims description 2
- 230000015556 catabolic process Effects 0.000 abstract description 9
- 239000006185 dispersion Substances 0.000 abstract description 6
- 230000001629 suppression Effects 0.000 abstract description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 29
- 229910002601 GaN Inorganic materials 0.000 description 22
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 21
- 239000010936 titanium Substances 0.000 description 16
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 13
- 239000010931 gold Substances 0.000 description 13
- 150000002500 ions Chemical class 0.000 description 12
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 10
- 239000012535 impurity Substances 0.000 description 9
- 230000005533 two-dimensional electron gas Effects 0.000 description 9
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 8
- 238000005468 ion implantation Methods 0.000 description 8
- 229910052719 titanium Inorganic materials 0.000 description 8
- 229910052759 nickel Inorganic materials 0.000 description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 5
- 238000009413 insulation Methods 0.000 description 5
- 239000011777 magnesium Substances 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000003213 activating effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- -1 InN Chemical compound 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
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Abstract
【解決手段】 基板上に積層した窒化物半導体層からなる第1の窒化物半導体層と、第1の窒化物半導体層の上に積層した窒化物半導体層からなり、アルミニウムを含まない第2の窒化物半導体層と、第2の窒化物半導体層にショットキ接触する制御電極とを備えた窒化物半導体装置であり、第2の窒化物半導体層は、その成長温度を低く設定することにより、絶縁特性の優れた微結晶構造とする。
【選択図】 図1
Description
Claims (12)
- ガリウム、アルミニウム、ホウ素及びインジウムからなる群のうち少なくとも1つからなるIII族元素と、窒素、リン及び砒素からなる群のうちの少なくとも窒素を含むV族元素で構成されたIII−V族窒化物半導体層からなる窒化物半導体装置において、基板上に積層した前記III−V族窒化物半導体層からなる第1の窒化物半導体層と、該第1の窒化物半導体層の上に積層した前記III−V族窒化物半導体層からなり、アルミニウムを含まない第2の窒化物半導体層と、該第2の窒化物半導体層にショットキ接触する制御電極とを備え、前記第2の窒化物半導体層は、前記第1の窒化物半導体層より成膜温度の低い膜からなることを特徴とする窒化物半導体装置。
- ガリウム、アルミニウム、ホウ素及びインジウムからなる群のうち少なくとも1つからなるIII族元素と、窒素、リン及び砒素からなる群のうちの少なくとも窒素を含むV族元素で構成されたIII−V族窒化物半導体層からなる窒化物半導体装置において、基板上に積層した前記III−V族窒化物半導体層からなる第1の窒化物半導体層と、該第1の窒化物半導体層の上に積層した前記III−V族窒化物半導体層からなり、アルミニウムを含まない第2の窒化物半導体層と、該第2の窒化物半導体層にショットキ接触する制御電極とを備え、前記第2の窒化物半導体層は、微結晶構造からなることを特徴とする窒化物半導体装置。
- 前記第1の窒化物半導体層が、アルミニウムを含む前記III−V族窒化物半導体層からなることを特徴とする請求項1または2いずれか記載の窒化物半導体装置。
- 前記基板と前記第1の窒化物半導体層との間に、前記第1の窒化物半導体層のエネルギーギャップより小さいエネルギーギャップを持つ、前記III−V族窒化物半導体層からなる第3の窒化物半導体層を備えたことを特徴とする請求項1乃至3いずれか記載の窒化物半導体装置。
- 前記第2の窒化物半導体層にショットキ接触する前記制御電極と、前記第1の窒化物半導体層にオーミック接触するソース電極及びドレイン電極とを備え、前記第1の窒化物半導体層からなるチャネル、あるいは前記第3の窒化物半導体層と前記第1の窒化物半導体層との間に形成されるチャネルを流れる電流を前記制御電極に印加する電圧により制御することを特徴とする請求項1乃至4いずれか記載の窒化物半導体装置。
- 前記第1の窒化物半導体層がノンドープ若しくはn型の窒化物半導体層からなり、前記制御電極と前記ドレイン電極との間の前記第2の窒化物半導体層に、p型の窒化物半導体領域を備えたことを特徴とする請求項5記載の窒化物半導体装置。
- ガリウム、アルミニウム、ホウ素及びインジウムからなる群のうち少なくとも1つからなるIII族元素と、窒素、リン及び砒素からなる群のうちの少なくとも窒素を含むV族元素で構成されたIII−V族窒化物半導体層からなる窒化物半導体装置の製造方法において、
基板上に、前記III−V族窒化物半導体層からなる第1の窒化物半導体層を形成する工程と、
該第1の窒化物半導体層の上に、該第1の窒化物半導体層を形成する際の成膜温度より低い温度で、前記III−V族窒化物半導体層からなり、かつアルミニウムを含まない微結晶構造からなる第2の窒化物半導体層を形成する工程と、
該第2の窒化物半導体層の上に制御電極を形成する工程とを含むことを特徴とする窒化物半導体装置の製造方法。 - ガリウム、アルミニウム、ホウ素及びインジウムからなる群のうち少なくとも1つからなるIII族元素と、窒素、リン及び砒素からなる群のうちの少なくとも窒素を含むV族元素で構成されたIII−V族窒化物半導体層からなる窒化物半導体装置の製造方法において、
基板上に、前記III−V族窒化物半導体層からなり、かつアルミニウムを含む第1の窒化物半導体層を形成する工程と、
該第1の窒化物半導体層の上に、該第1の窒化物半導体層を形成する際の成膜温度より低い温度で、前記III−V族窒化物半導体層からなり、かつアルミニウムを含まない微結晶構造からなる第2の窒化物半導体層を形成する工程と、
該第2の窒化物半導体層の上に制御電極を形成する工程とを含むことを特徴とする窒化物半導体装置の製造方法。 - 前記基板上に前記第1の窒化物半導体層のエネルギーギャップより小さいエネルギーギャップを持つ、前記III−V族窒化物半導体層からなる第3の窒化物半導体層を形成する工程を含み、該第3の窒化物半導体層上に、前記第1の窒化物半導体層を形成することを特徴とする請求項7または8いずれか記載の窒化物半導体装置の製造方法。
- 前記第2の窒化物半導体層を除去し、露出した前記第1の窒化物半導体層上に、あるいは前記第2の窒化物半導体層の一部にn型の窒化物半導体領域を形成して、該n型の窒化物半導体領域上に、前記第1の窒化物半導体層にオーミック接触するソース電極及びドレイン電極を形成する工程と、
前記第2の窒化物半導体層にショットキ接触する前記制御電極を形成する工程とを含む
ことを特徴とする請求項7乃至9いずれか記載の窒化物半導体装置の製造方法。 - ノンドープ若しくはn型の窒化物半導体層からなる前記第1の窒化物半導体層上に積層された前記第2の窒化物半導体層の上に前記制御電極を形成する工程と、
前記制御電極と前記ドレイン電極との間の前記第2の窒化物半導体層に、p型の窒化物半導体領域を形成する工程とを含むことを特徴とする請求項7乃至10いずれか記載の窒化物半導体装置の製造方法。 - 前記n型の窒化物半導体領域を形成する工程、あるいは前記p型の窒化物半導体領域を形成する工程において行われる加熱処理は、前記第2の窒化物半導体層のシート抵抗を低下させない温度範囲で行うことを特徴とする請求項10または11いずれか記載の窒化物半導体装置の製造方法。
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JP2004125323A JP4869564B2 (ja) | 2003-11-28 | 2004-04-21 | 窒化物半導体装置及びその製造方法 |
DE102004055038.7A DE102004055038B4 (de) | 2003-11-28 | 2004-11-15 | Nitridhalbleitervorrichtung und deren Herstellungsverfahren |
US10/996,440 US7304330B2 (en) | 2003-11-28 | 2004-11-26 | Nitride semiconductor device |
US11/862,565 US7601573B2 (en) | 2003-11-28 | 2007-09-27 | Method for producing nitride semiconductor device |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006100455A (ja) * | 2004-09-29 | 2006-04-13 | New Japan Radio Co Ltd | 窒化物半導体装置及びその製造方法 |
JP2007066963A (ja) * | 2005-08-29 | 2007-03-15 | New Japan Radio Co Ltd | 窒化物半導体装置 |
JP2007317794A (ja) * | 2006-05-24 | 2007-12-06 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
JP2007335736A (ja) * | 2006-06-16 | 2007-12-27 | New Japan Radio Co Ltd | 窒化物半導体装置 |
JP2008010526A (ja) * | 2006-06-28 | 2008-01-17 | New Japan Radio Co Ltd | 窒化物半導体装置及びその製造方法 |
JP2008118082A (ja) * | 2006-10-11 | 2008-05-22 | New Japan Radio Co Ltd | 窒化物半導体装置及びその製造方法 |
JP2008198691A (ja) * | 2007-02-09 | 2008-08-28 | New Japan Radio Co Ltd | 窒化物半導体装置 |
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JP6035007B2 (ja) * | 2010-12-10 | 2016-11-30 | 富士通株式会社 | Mis型の窒化物半導体hemt及びその製造方法 |
JP5953706B2 (ja) * | 2011-11-02 | 2016-07-20 | 富士通株式会社 | 化合物半導体装置及びその製造方法 |
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- 2004-11-15 DE DE102004055038.7A patent/DE102004055038B4/de not_active Expired - Fee Related
- 2004-11-26 US US10/996,440 patent/US7304330B2/en active Active
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JPH11261160A (ja) * | 1998-03-10 | 1999-09-24 | Sharp Corp | 窒化物系化合物半導体レーザ素子及びその製造方法 |
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Cited By (7)
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JP2006100455A (ja) * | 2004-09-29 | 2006-04-13 | New Japan Radio Co Ltd | 窒化物半導体装置及びその製造方法 |
JP2007066963A (ja) * | 2005-08-29 | 2007-03-15 | New Japan Radio Co Ltd | 窒化物半導体装置 |
JP2007317794A (ja) * | 2006-05-24 | 2007-12-06 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
JP2007335736A (ja) * | 2006-06-16 | 2007-12-27 | New Japan Radio Co Ltd | 窒化物半導体装置 |
JP2008010526A (ja) * | 2006-06-28 | 2008-01-17 | New Japan Radio Co Ltd | 窒化物半導体装置及びその製造方法 |
JP2008118082A (ja) * | 2006-10-11 | 2008-05-22 | New Japan Radio Co Ltd | 窒化物半導体装置及びその製造方法 |
JP2008198691A (ja) * | 2007-02-09 | 2008-08-28 | New Japan Radio Co Ltd | 窒化物半導体装置 |
Also Published As
Publication number | Publication date |
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US7304330B2 (en) | 2007-12-04 |
US7601573B2 (en) | 2009-10-13 |
DE102004055038A1 (de) | 2005-07-21 |
US20080026514A1 (en) | 2008-01-31 |
JP4869564B2 (ja) | 2012-02-08 |
US20050116248A1 (en) | 2005-06-02 |
DE102004055038B4 (de) | 2015-09-10 |
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