JP2005183495A - 電力変換装置 - Google Patents
電力変換装置 Download PDFInfo
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- JP2005183495A JP2005183495A JP2003418862A JP2003418862A JP2005183495A JP 2005183495 A JP2005183495 A JP 2005183495A JP 2003418862 A JP2003418862 A JP 2003418862A JP 2003418862 A JP2003418862 A JP 2003418862A JP 2005183495 A JP2005183495 A JP 2005183495A
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Abstract
省電力化,大容量化を両立し、かつ高信頼性,低コストな電力変換装置を提供する。
【解決手段】
パワー半導体素子の主電極と電力変換装置の主回路との接続に金属からなる帯状導体を用いて電気的に接続することにあり、帯状導体の主電極に対応する、第一の主面にAl,
Ni,Au,Cuの少なくともひとつを主体とする金属からなる複数の金属バンプ13を形成した帯状導体11を用い、パワー半導体素子の主電極と金属バンプとを超音波により溶接するものである。
【選択図】図1
Description
Alワイヤが用いられており、一般的に、ワイヤは超音波ボンディングにより接続されている。
23に厚さ約3μmの無電解ニッケル−リンめっきと厚さ約1μmの無電解金めっきを施した(図示せず)。
μmの銅と厚さ約25μmのポリイミドを積層した片面銅張りポリイミドフィルム(宇部興産社製:ユピセルN)を用意した。次に、エッチングで回路導体34を形成し、パッド部35a,35bが開口した厚さ約15μmのソルダーレジスト36(太陽インキ社製:PSR−9000)をフォトリソグラフ法により形成した。続いて、接合部32に径約
50μm,高さ約75μmの金属バンプ33を電解銅めっきにより形成した。さらに、金属バンプ33に厚さ約3μmの無電解ニッケル−リンめっきと厚さ約1μmの無電解金めっきを施した(図示せず)。
56とパワーモジュール53とをフレキシブルプリント配線板52を介して電気的に接続し、冷却フィン,平滑コンデンサ(図示せず)を接続し、電力変換装置を作製した。なお、本実施例では、帯状導体50と内部接続導体47との接続にはんだ44bを用いたが、主電極の接続と同様に、帯状導体50に金属バンプを形成し、金属バンプと内部接続導体47とを溶接してもよい。
Claims (3)
- 少なくともひとつ以上のパワー半導体素子をベアチップ実装する電力変換装置において、前記パワー半導体素子の主電極と、前記電力変換装置の主回路とを、金属からなる帯状導体で電気的に接続し、かつ前記帯状導体の前記主電極に対応する第一の主面に複数の金属バンプが形成され、前記金属バンプはAl,Ni,Au,Cuから選ばれた少なくともひとつを主体とする金属からなり、前記金属バンプと前記主電極とが超音波により溶接することを特徴とする電力変換装置。
- 前記帯状導体の第二の主面の少なくとも前記主電極に対応する部分が、鉄ニッケル合金を芯とする3層の複合材であることを特徴とする請求項1に記載の電力変換装置。
- 少なくともひとつ以上のパワー半導体素子をベアチップ実装する電力変換装置において、前記パワー半導体素子の制御電極と、前記電力変換装置の制御回路とを、フレキシブルプリント配線板で電気的に接続し、かつ前記フレキシブルプリント配線板の前記制御電極に対応するパッド部に金属バンプが形成され、前記金属バンプはAl,Ni,Au,Cuから選ばれた少なくともひとつを主体とする金属からなり、前記金属バンプと前記制御電極とが超音波により溶接することを特徴とする電力変換装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2003418862A JP4265394B2 (ja) | 2003-12-17 | 2003-12-17 | 電力変換装置 |
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JP2003418862A JP4265394B2 (ja) | 2003-12-17 | 2003-12-17 | 電力変換装置 |
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JP2005183495A true JP2005183495A (ja) | 2005-07-07 |
JP4265394B2 JP4265394B2 (ja) | 2009-05-20 |
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JP2003418862A Expired - Fee Related JP4265394B2 (ja) | 2003-12-17 | 2003-12-17 | 電力変換装置 |
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JP (1) | JP4265394B2 (ja) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007123884A (ja) * | 2005-10-26 | 2007-05-17 | General Electric Co <Ge> | 電力回路パッケージ及びその製作方法 |
JP2007194270A (ja) * | 2006-01-17 | 2007-08-02 | Ultrasonic Engineering Co Ltd | ボンディングリボンおよびこれを用いたボンディング方法 |
JP2007288013A (ja) * | 2006-04-19 | 2007-11-01 | Nec Electronics Corp | 半導体装置の製造方法 |
JP2009038139A (ja) * | 2007-07-31 | 2009-02-19 | Panasonic Corp | 半導体装置およびその製造方法 |
JP2009278116A (ja) * | 2008-05-16 | 2009-11-26 | Tektronix Inc | ボール・バンプ結合リボン・ワイヤ配線及び電気部品を基板に接続する方法 |
JP2010287887A (ja) * | 2009-06-09 | 2010-12-24 | Semikron Elektronik Gmbh & Co Kg | パワー半導体モジュールの製造方法、及び接続装置を備えるパワー半導体モジュール |
JP2013062405A (ja) * | 2011-09-14 | 2013-04-04 | Mitsubishi Electric Corp | 半導体装置 |
JP2013229489A (ja) * | 2012-04-26 | 2013-11-07 | Mitsubishi Electric Corp | 半導体装置とその製造方法 |
JP2014154679A (ja) * | 2013-02-07 | 2014-08-25 | Daiwa Kogyo:Kk | 半導体モジュール |
US8952551B2 (en) | 2007-03-26 | 2015-02-10 | International Business Machines Corporation | Semiconductor package and method for fabricating the same |
US9673118B2 (en) | 2013-11-26 | 2017-06-06 | Mitsubishi Electric Corporation | Power module and method of manufacturing power module |
-
2003
- 2003-12-17 JP JP2003418862A patent/JP4265394B2/ja not_active Expired - Fee Related
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007123884A (ja) * | 2005-10-26 | 2007-05-17 | General Electric Co <Ge> | 電力回路パッケージ及びその製作方法 |
JP4612550B2 (ja) * | 2006-01-17 | 2011-01-12 | 超音波工業株式会社 | パワーデバイス用ボンディングリボンおよびこれを用いたボンディング方法 |
JP2007194270A (ja) * | 2006-01-17 | 2007-08-02 | Ultrasonic Engineering Co Ltd | ボンディングリボンおよびこれを用いたボンディング方法 |
JP2007288013A (ja) * | 2006-04-19 | 2007-11-01 | Nec Electronics Corp | 半導体装置の製造方法 |
JP4722757B2 (ja) * | 2006-04-19 | 2011-07-13 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
US8952551B2 (en) | 2007-03-26 | 2015-02-10 | International Business Machines Corporation | Semiconductor package and method for fabricating the same |
JP2009038139A (ja) * | 2007-07-31 | 2009-02-19 | Panasonic Corp | 半導体装置およびその製造方法 |
JP2009278116A (ja) * | 2008-05-16 | 2009-11-26 | Tektronix Inc | ボール・バンプ結合リボン・ワイヤ配線及び電気部品を基板に接続する方法 |
JP2010287887A (ja) * | 2009-06-09 | 2010-12-24 | Semikron Elektronik Gmbh & Co Kg | パワー半導体モジュールの製造方法、及び接続装置を備えるパワー半導体モジュール |
JP2013062405A (ja) * | 2011-09-14 | 2013-04-04 | Mitsubishi Electric Corp | 半導体装置 |
JP2013229489A (ja) * | 2012-04-26 | 2013-11-07 | Mitsubishi Electric Corp | 半導体装置とその製造方法 |
US9125308B2 (en) | 2012-04-26 | 2015-09-01 | Mitsubishi Electric Corporation | Semiconductor device and method of manufacturing thereof |
JP2014154679A (ja) * | 2013-02-07 | 2014-08-25 | Daiwa Kogyo:Kk | 半導体モジュール |
US9673118B2 (en) | 2013-11-26 | 2017-06-06 | Mitsubishi Electric Corporation | Power module and method of manufacturing power module |
DE112014005415B4 (de) | 2013-11-26 | 2020-01-23 | Mitsubishi Electric Corporation | Leistungsmodul und Verfahren zum Herstellen eines Leistungsmoduls |
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Publication number | Publication date |
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JP4265394B2 (ja) | 2009-05-20 |
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