JP2005165276A - 光偏向器 - Google Patents

光偏向器 Download PDF

Info

Publication number
JP2005165276A
JP2005165276A JP2004299203A JP2004299203A JP2005165276A JP 2005165276 A JP2005165276 A JP 2005165276A JP 2004299203 A JP2004299203 A JP 2004299203A JP 2004299203 A JP2004299203 A JP 2004299203A JP 2005165276 A JP2005165276 A JP 2005165276A
Authority
JP
Japan
Prior art keywords
movable plate
torsion bar
drive coil
wiring
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004299203A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005165276A5 (enExample
Inventor
Nobuyoshi Iwasaki
暢喜 岩崎
Nobutaka Kamiya
宜孝 神谷
Kenji Murakami
賢治 村上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2004299203A priority Critical patent/JP2005165276A/ja
Priority to US10/982,648 priority patent/US7012737B2/en
Publication of JP2005165276A publication Critical patent/JP2005165276A/ja
Priority to US11/314,684 priority patent/US7095549B2/en
Publication of JP2005165276A5 publication Critical patent/JP2005165276A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Laser Beam Printer (AREA)
JP2004299203A 2003-11-10 2004-10-13 光偏向器 Pending JP2005165276A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004299203A JP2005165276A (ja) 2003-11-10 2004-10-13 光偏向器
US10/982,648 US7012737B2 (en) 2003-11-10 2004-11-05 Two-dimensional optical deflector with minimized crosstalk
US11/314,684 US7095549B2 (en) 2003-11-10 2005-12-21 Two-dimensional optical deflector with minimized crosstalk

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003379960 2003-11-10
JP2004299203A JP2005165276A (ja) 2003-11-10 2004-10-13 光偏向器

Publications (2)

Publication Number Publication Date
JP2005165276A true JP2005165276A (ja) 2005-06-23
JP2005165276A5 JP2005165276A5 (enExample) 2007-10-25

Family

ID=34554830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004299203A Pending JP2005165276A (ja) 2003-11-10 2004-10-13 光偏向器

Country Status (2)

Country Link
US (2) US7012737B2 (enExample)
JP (1) JP2005165276A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013168485A1 (ja) * 2012-05-10 2013-11-14 パイオニア株式会社 駆動装置
JPWO2013168485A1 (ja) * 2012-05-10 2016-01-07 パイオニア株式会社 駆動装置
JP2017151461A (ja) * 2013-05-30 2017-08-31 パイオニア株式会社 駆動装置
JP2025076486A (ja) * 2021-10-08 2025-05-15 Ｙｉｔｏａマイクロテクノロジー株式会社 反射体スキャナ

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070106264A (ko) * 2006-04-28 2007-11-01 엘지전자 주식회사 요크 및 그 제조방법
KR100738114B1 (ko) * 2006-05-18 2007-07-12 삼성전자주식회사 액츄에이터 및 이차원 스캐너
KR100837399B1 (ko) * 2006-06-22 2008-06-12 삼성전자주식회사 2축 구동형 맴스 디바이스
JP2008040353A (ja) * 2006-08-09 2008-02-21 Seiko Epson Corp 光学デバイス、光スキャナおよび画像形成装置
KR100908120B1 (ko) * 2006-11-01 2009-07-16 삼성전기주식회사 전자기 마이크로 액츄에이터
KR100911144B1 (ko) * 2007-03-27 2009-08-06 삼성전자주식회사 2축구동 전자기 액추에이터
KR20090041766A (ko) * 2007-10-24 2009-04-29 삼성전기주식회사 미러로부터 분리된 액츄에이터를 구비한 멤스 스캐너
DE102008001893A1 (de) * 2008-05-21 2009-11-26 Robert Bosch Gmbh Umlenkeinrichtung für elektromagnetische Strahlen
US20100141366A1 (en) * 2008-12-04 2010-06-10 Microvision, Inc. Magnetically Actuated System
TW201024901A (en) * 2008-12-16 2010-07-01 Ind Tech Res Inst Optical scanner
US9401240B2 (en) * 2010-03-01 2016-07-26 California Institute Of Technology Integrated passive iron shims in silicon
EP2372452A1 (en) 2010-03-24 2011-10-05 Iee International Electronics & Engineering S.A. Stereoscopic imager
LU91714B1 (en) 2010-07-29 2012-01-30 Iee Sarl Active illumination scanning imager
US9128190B1 (en) 2013-03-06 2015-09-08 Google Inc. Light steering device with an array of oscillating reflective slats
US10401865B1 (en) 2013-03-06 2019-09-03 Waymo Llc Light steering device with an array of oscillating reflective slats
US11726488B1 (en) 2013-03-06 2023-08-15 Waymo Llc Light steering device with a plurality of beam-steering optics
US9997984B2 (en) * 2013-12-19 2018-06-12 Pinoeer Corporation Driving apparatus
DE102016111531B4 (de) * 2016-06-23 2022-02-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optischer Scanner
EP3598622B1 (en) * 2017-03-13 2023-08-09 Pioneer Corporation Drive device and distance measuring device
USD903614S1 (en) 2018-05-01 2020-12-01 Hamamatsu Photonics K.K. Laser beam reflector
JP1625495S (enExample) 2018-05-01 2019-03-18
JP1680755S (enExample) 2018-05-01 2021-03-08
JP1680385S (enExample) * 2018-05-01 2021-03-01
JP1625135S (enExample) * 2018-05-01 2019-03-18
JP1639597S (enExample) * 2018-05-01 2019-08-19
JP1680388S (enExample) * 2018-05-01 2021-03-01
USD907085S1 (en) * 2018-05-01 2021-01-05 Hamamatsu Photonics K.K. Laser beam reflector
JP1680507S (enExample) * 2018-05-01 2021-03-08
JP1680386S (enExample) * 2018-05-01 2021-03-01
JP1680387S (enExample) * 2018-05-01 2021-03-01
CN110764253B (zh) * 2018-07-26 2022-04-08 中科融合感知智能研究院(苏州工业园区)有限公司 一种二维矢量扫描微镜
CH715505A1 (fr) * 2018-10-31 2020-05-15 Sercalo Microtechnology Ltd Dispositif micromécanique à actionnement électromagnétique local.
US11543491B2 (en) * 2020-05-04 2023-01-03 GM Global Technology Operations LLC Optimized current path to enable flat MEMS mirror

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2722314B2 (ja) * 1993-12-20 1998-03-04 日本信号株式会社 プレーナー型ガルバノミラー及びその製造方法
JP2987750B2 (ja) * 1995-05-26 1999-12-06 日本信号株式会社 プレーナ型電磁アクチュエータ
WO1996039643A1 (en) * 1995-06-05 1996-12-12 Nihon Shingo Kabushiki Kaisha Electromagnetic actuator
US6108118A (en) * 1998-07-09 2000-08-22 Olympus Optical Co., Ltd. Optical deflector
US6388789B1 (en) * 2000-09-19 2002-05-14 The Charles Stark Draper Laboratory, Inc. Multi-axis magnetically actuated device
JP2002307396A (ja) * 2001-04-13 2002-10-23 Olympus Optical Co Ltd アクチュエータ
US6912608B2 (en) * 2001-04-27 2005-06-28 Pts Corporation Methods and apparatus for pipelined bus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013168485A1 (ja) * 2012-05-10 2013-11-14 パイオニア株式会社 駆動装置
JPWO2013168485A1 (ja) * 2012-05-10 2016-01-07 パイオニア株式会社 駆動装置
US9997975B2 (en) 2012-05-10 2018-06-12 Pioneer Corporation Driving apparatus
JP2017151461A (ja) * 2013-05-30 2017-08-31 パイオニア株式会社 駆動装置
JP2019091048A (ja) * 2013-05-30 2019-06-13 パイオニア株式会社 駆動装置
JP2025076486A (ja) * 2021-10-08 2025-05-15 Ｙｉｔｏａマイクロテクノロジー株式会社 反射体スキャナ

Also Published As

Publication number Publication date
US20060098313A1 (en) 2006-05-11
US7012737B2 (en) 2006-03-14
US20050099709A1 (en) 2005-05-12
US7095549B2 (en) 2006-08-22

Similar Documents

Publication Publication Date Title
JP2005165276A (ja) 光偏向器
US7256926B2 (en) Optical deflector
JP5659672B2 (ja) 光スキャナー、ミラーチップ、光スキャナーの製造方法、および画像形成装置
US6765706B2 (en) Optical deflector
WO2013168266A1 (ja) 駆動装置
WO2013168485A1 (ja) 駆動装置
JP2005189825A (ja) 光偏向器
JP2017151461A (ja) 駆動装置
JP2002373435A (ja) 光ピックアップ用アクチュエータ
JP4262583B2 (ja) 二次元光偏向器
KR100837399B1 (ko) 2축 구동형 맴스 디바이스
JP4968760B1 (ja) アクチュエータ
JP2003195204A (ja) 光偏向器及び光偏向器アレイ
JP4376513B2 (ja) プレーナー型電磁アクチュエータ
WO2013168273A1 (ja) 駆動装置
JP3872237B2 (ja) レンズ駆動装置
JP5923933B2 (ja) ミラーデバイス、光スキャナーおよび画像形成装置
JP7638560B2 (ja) 反射体スキャナ
JP2004237400A (ja) プレーナー型アクチュエータ
JP5806089B2 (ja) プレーナ型電磁アクチュエータ
JP5803586B2 (ja) ミラーデバイス、光スキャナーおよび画像形成装置
JP3276012B2 (ja) 受動形磁気軸受装置
WO2013168271A1 (ja) 駆動装置
WO2013076844A1 (ja) アクチュエータ
KR20200062257A (ko) 액튜에이터

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070910

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070910

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100316

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20100316

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20100706