JP2005101524A5 - - Google Patents
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- Publication number
- JP2005101524A5 JP2005101524A5 JP2004180094A JP2004180094A JP2005101524A5 JP 2005101524 A5 JP2005101524 A5 JP 2005101524A5 JP 2004180094 A JP2004180094 A JP 2004180094A JP 2004180094 A JP2004180094 A JP 2004180094A JP 2005101524 A5 JP2005101524 A5 JP 2005101524A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004180094A JP4290075B2 (ja) | 2003-08-19 | 2004-06-17 | 基板保持用チャックの洗浄・乾燥装置及び基板保持用チャックの洗浄・乾燥方法 |
| TW093122615A TWI248156B (en) | 2003-08-19 | 2004-07-28 | Cleaning and drying apparatus for substrate holder chuck and method thereof |
| KR1020040065530A KR100979976B1 (ko) | 2003-08-19 | 2004-08-19 | 기판 유지용 척의 세정·건조 장치 및 기판 유지용 척의세정·건조 방법 |
| US10/923,309 US7578304B2 (en) | 2003-08-19 | 2004-08-19 | Cleaning and drying apparatus for substrate holder chuck and method thereof |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003294792 | 2003-08-19 | ||
| JP2004180094A JP4290075B2 (ja) | 2003-08-19 | 2004-06-17 | 基板保持用チャックの洗浄・乾燥装置及び基板保持用チャックの洗浄・乾燥方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005101524A JP2005101524A (ja) | 2005-04-14 |
| JP2005101524A5 true JP2005101524A5 (https=) | 2006-09-21 |
| JP4290075B2 JP4290075B2 (ja) | 2009-07-01 |
Family
ID=34197156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004180094A Expired - Lifetime JP4290075B2 (ja) | 2003-08-19 | 2004-06-17 | 基板保持用チャックの洗浄・乾燥装置及び基板保持用チャックの洗浄・乾燥方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7578304B2 (https=) |
| JP (1) | JP4290075B2 (https=) |
| KR (1) | KR100979976B1 (https=) |
| TW (1) | TWI248156B (https=) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4347156B2 (ja) * | 2004-07-28 | 2009-10-21 | 大日本スクリーン製造株式会社 | 基板処理装置 |
| JP2006186263A (ja) * | 2004-12-28 | 2006-07-13 | Disco Abrasive Syst Ltd | 被加工物保持装置 |
| JP4979412B2 (ja) * | 2007-02-26 | 2012-07-18 | 大日本スクリーン製造株式会社 | 基板処理装置のスケジュール作成方法及びそのプログラム |
| US7865553B1 (en) | 2007-03-22 | 2011-01-04 | Google Inc. | Chat system without topic-specific rooms |
| US7899869B1 (en) | 2007-03-22 | 2011-03-01 | Google Inc. | Broadcasting in chat system without topic-specific rooms |
| KR100958793B1 (ko) * | 2007-09-28 | 2010-05-18 | 주식회사 실트론 | 웨이퍼 쉽핑박스의 세정을 위한 박스 크리너 |
| KR100921520B1 (ko) * | 2007-10-05 | 2009-10-12 | 세메스 주식회사 | 척 세정 장치 및 방법 그리고 이를 구비하는 기판 처리장치 및 그의 척 세정 방법 |
| JP4950247B2 (ja) | 2009-05-12 | 2012-06-13 | 東京エレクトロン株式会社 | 洗浄装置、基板処理システム、洗浄方法、プログラムおよび記憶媒体 |
| JP2012004204A (ja) * | 2010-06-15 | 2012-01-05 | Disco Abrasive Syst Ltd | パッド洗浄装置およびパッド洗浄方法 |
| ITMI20110646A1 (it) | 2011-04-15 | 2012-10-16 | St Microelectronics Srl | Apparecchiatura per la lavorazione di wafer semiconduttori, in particolare per realizzare una fase di processo di rimozione di polimeri. |
| CN106232247B (zh) | 2014-04-22 | 2020-07-31 | 株式会社富士 | 吸嘴清洗装置及吸嘴干燥方法 |
| CN106252258B (zh) * | 2015-06-15 | 2018-12-07 | 株式会社思可林集团 | 基板处理装置 |
| TWI729584B (zh) * | 2019-11-22 | 2021-06-01 | 佳宸科技有限公司 | 濕製程用清潔機構 |
| JP7841860B2 (ja) * | 2021-09-03 | 2026-04-07 | 株式会社ディスコ | 加工装置 |
| US20250341017A1 (en) * | 2024-05-06 | 2025-11-06 | Applied Materials, Inc. | Gas atomized fluid clean of electroplating chuck in maintenance chamber |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4619845A (en) * | 1985-02-22 | 1986-10-28 | The United States Of America As Represented By The Secretary Of The Navy | Method for generating fine sprays of molten metal for spray coating and powder making |
| US4957783A (en) * | 1988-10-05 | 1990-09-18 | Nordson Corporation | Method and apparatus for dispensing droplets of molten thermoplastic adhesive |
| US5226437A (en) * | 1990-11-28 | 1993-07-13 | Tokyo Electron Limited | Washing apparatus |
| US5253663A (en) * | 1991-08-26 | 1993-10-19 | Tokyo Electron Limited | Transfer apparatus |
| US5379784A (en) * | 1993-01-23 | 1995-01-10 | Tokyo Electron Limited | Apparatus for cleaning conveyor chuck |
| JPH0969509A (ja) * | 1995-09-01 | 1997-03-11 | Matsushita Electron Corp | 半導体ウェーハの洗浄・エッチング・乾燥装置及びその使用方法 |
| US6491764B2 (en) * | 1997-09-24 | 2002-12-10 | Interuniversitair Microelektronics Centrum (Imec) | Method and apparatus for removing a liquid from a surface of a rotating substrate |
| JP3661075B2 (ja) | 1998-06-23 | 2005-06-15 | 東京エレクトロン株式会社 | 基板保持用チャックの洗浄・乾燥装置及び基板保持用チャックの洗浄・乾燥方法 |
| JP3613782B2 (ja) | 1998-06-23 | 2005-01-26 | 東京エレクトロン株式会社 | 基板保持用チャックの洗浄・乾燥装置及び基板保持用チャックの洗浄・乾燥方法 |
| JP2003224103A (ja) | 2002-01-31 | 2003-08-08 | Kakizaki Mamufacuturing Co Ltd | ウエハキャリアの洗浄方法 |
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2004
- 2004-06-17 JP JP2004180094A patent/JP4290075B2/ja not_active Expired - Lifetime
- 2004-07-28 TW TW093122615A patent/TWI248156B/zh not_active IP Right Cessation
- 2004-08-19 US US10/923,309 patent/US7578304B2/en not_active Expired - Lifetime
- 2004-08-19 KR KR1020040065530A patent/KR100979976B1/ko not_active Expired - Fee Related