JP2005091359A - Device for electrically connecting bga package with signal source, and method for making such connection - Google Patents

Device for electrically connecting bga package with signal source, and method for making such connection Download PDF

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JP2005091359A
JP2005091359A JP2004266191A JP2004266191A JP2005091359A JP 2005091359 A JP2005091359 A JP 2005091359A JP 2004266191 A JP2004266191 A JP 2004266191A JP 2004266191 A JP2004266191 A JP 2004266191A JP 2005091359 A JP2005091359 A JP 2005091359A
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contact
socket
flexible pcb
pcb
flexible
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Andre Hanke
アンドレ,ハンケ
Stephan Dobritz
シュテファン,ドブリッツ
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Infineon Technologies AG
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02Contact members
    • H01R13/22Contacts for co-operating by abutting
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433Sockets for IC's or transistors
    • G01R1/0483Sockets for un-leaded IC's having matrix type contact fields, e.g. BGA or PGA devices; Sockets for unpackaged, naked chips
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/325Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by abutting or pinching, i.e. without alloying process; mechanical auxiliary parts therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • H05K1/118Printed elements for providing electric connections to or between printed circuits specially for flexible printed circuits, e.g. using folded portions
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10734Ball grid array [BGA]; Bump grid array
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/20Details of printed circuits not provided for in H05K2201/01 - H05K2201/10
    • H05K2201/2009Reinforced areas, e.g. for a specific part of a flexible printed circuit
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/16Inspection; Monitoring; Aligning
    • H05K2203/167Using mechanical means for positioning, alignment or registration, e.g. using rod-in-hole alignment
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4007Surface contacts, e.g. bumps
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4007Surface contacts, e.g. bumps
    • H05K3/4015Surface contacts, e.g. bumps using auxiliary conductive elements, e.g. pieces of metal foil, metallic spheres

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device which can produce easily and has property excellent in a cost performance. <P>SOLUTION: A contact mechanism is a part of a flexible PCB 3 having a Cu conductor resistance path 9 distributed between flexible plastic layers 7, 8. A columnar or cylindrical contact member 5 penetrates and extends through the flexible PCB 3. The contact is connected electrically with the Cu conductor resistance path 9, and also the contact projects on either face from one side of the plastic layers 7, 8. The contact mechanism can be realized by the above constitution. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、BGAパッケージ用の案内部材を有する接触ソケット(contact receptacle)と、前記接触ソケットに配されると共に、通電試験(burn-in test)および機能試験(functional test)用のBGAパッケージの端子を電気的に接触接続(contact-connection)させる接触機構とを用いて、BGAパッケージと信号源とを電気的に接続させる装置に関するものである。   The present invention relates to a contact receptacle having a guide member for a BGA package, and terminals of the BGA package disposed in the contact socket and used for a burn-in test and a functional test. The present invention relates to an apparatus for electrically connecting a BGA package and a signal source using a contact mechanism for electrically contact-connecting a signal source.

FPBGAパッケージの機能試験のために通常用いられる、FPBGAパッケージの機能試験用の接触ソケットは、導電接続(electrical conduct-connection)を行うための、バネピン(ポーゴーピン(pogo pins))またはマイクロバネ接触部(micro-spring contacts)を備えている。また、上記バネピンまたはマイクロバネ接触部は、上記接触端子との接続に用いられるものであって、FPBGAパッケージの半田球接触配列(solder ball contact arrays)の形をとっている。この場合、上記接触部は、マイクロ球接触配列の半田球のように、グリッドピッチ(grid pitch)に正確に配置されている。   The contact socket for the functional test of the FPBGA package, which is usually used for the functional test of the FPBGA package, is a spring pin (pogo pins) or a micro spring contact part (electric contact-electric connection). micro-spring contacts). The spring pins or microspring contact portions are used for connection to the contact terminals and take the form of solder ball contact arrays of the FPBGA package. In this case, the contact portion is accurately arranged at a grid pitch like a solder ball in a microsphere contact arrangement.

しかしながら、これらの接触部は、試験ソケットとして将来的に要求される条件に合致していない。とりわけ、既存の裂け目(discontinuity)による損失を伴うエネルギー伝送や、試験システムにおける全てのスライド部(sliding parts)上の非常に細かい表面剥離(abrasion)による試験システムの汚染といった、未解決の問題を考慮する必要がある。   However, these contacts do not meet future requirements for test sockets. Consider unresolved issues such as energy transfer with loss due to existing discontinuities and contamination of the test system due to very fine abrasion on all sliding parts in the test system There is a need to.

例えば通常使用される約5mmの長さを有するバネピンの場合では、上限周波数(limiting frequency)は1GHzである。これは、接触システムの動的内部抵抗(dynamic internal resistances)が原因である。   For example, in the case of a commonly used spring pin having a length of about 5 mm, the limiting frequency is 1 GHz. This is due to the dynamic internal resistances of the contact system.

さらに、集積回路のとどまることのない小型化と、それに伴う放熱の低下とが原因となり、試験ソケットは高い熱負荷を受ける。その結果、上記接触部と半田球との双方が、深刻な熱負荷を受けることになり、急速に劣化してしまう。   In addition, the test sockets are subject to high thermal loads due to the ever-increasing miniaturization of integrated circuits and the associated reduction in heat dissipation. As a result, both the contact portion and the solder ball are subjected to a serious heat load, and rapidly deteriorate.

さらに、接続ピッチのとどまることない減少により、例えばバネピンなどの公知の技術的解決法では避けることのできない、信号混信(signal crosstalk)時における非線形上昇(non-linear rise)が生じる。   Furthermore, the continual reduction of the connection pitch results in a non-linear rise during signal crosstalk, which is unavoidable with known technical solutions such as spring pins.

上記の理由により、機械的に極めて安定していると共に、熱の影響を受けにくく、かつ、接続ピッチが短い場合の混信問題を解決する、費用効率のよい試験ソケットを開発する必要がある。この場合、上記接触部は、優れた自浄能力(self-cleaning capacities)を備えると共に、上記接触球上に配置される基板の中を確実に通る(penetrate)ことができなければならない。   For the above reasons, there is a need to develop a cost-effective test socket that is extremely mechanically stable, less susceptible to heat, and solves the interference problem when the connection pitch is short. In this case, the contact portion must have excellent self-cleaning capacities and be able to securely penetrate the substrate disposed on the contact sphere.

さらなる開発の目的は、製造条件下で、1つの接触ソケットにつき250,000個を上回る接触接続を実現することである。さらに、高周波数の試験信号が必要なため、特定の電圧(particular tension)を、エネルギー源からDUT(試験中の装置(device under test)への、すなわち試験されるBGAパッケージへの損失のないエネルギー伝送に、利用しなければならない。従って、プリント回路基板を含む全ての信号経路を、最適化する必要がある。さらに、試験ソケットを問題なく修理、および、交換できることが要求される。   A further development objective is to achieve more than 250,000 contact connections per contact socket under manufacturing conditions. In addition, because a high frequency test signal is required, a specific voltage is applied from the energy source to the DUT (device under test), ie lossless energy to the BGA package being tested. Therefore, all signal paths including the printed circuit board need to be optimized, and it is required that the test socket can be repaired and replaced without problems.

それゆえ、本発明は、BGAパッケージ用の案内部材を有する接触ソケットと、前記接触ソケットに配されると共に、通電試験および機能試験用のBGAパッケージ(DUT)の端子を電気的に接触接続する接触機構とを用いて、BGAパッケージと信号源とを電気的に接続させる装置であって、簡単に製造できると共に費用効率がよい装置を作り出すこと、および、接触機構を製造するための方法を作り出すことを目的としている。   Therefore, the present invention provides a contact socket having a guide member for a BGA package, and a contact that is disposed in the contact socket and that electrically contacts and connects terminals of a BGA package (DUT) for an electrical test and a function test. A device for electrically connecting a BGA package and a signal source using a mechanism, which can be easily manufactured and cost effective, and a method for manufacturing a contact mechanism It is an object.

本発明の目的は、冒頭部分で言及した種類の装置では、上記接触機構が、フレキシブルプラスティック層(flexible plastic layers)の間に配置されているCu導体抵抗路(tracks)を有する、フレキシブルPCB(プリント回路板(printed circuit board))の一部であって、円柱状または筒状の(column- or sleeve-shaped)接触部が前記PCBを貫いて延びており、前記接触部が、電気的に前記Cu導体抵抗路と接続されていると共に、前記プラスティック層の一方から、何れかの面上(upwards on one side)に突出しているという事実によって達成される。   The object of the present invention is that in a device of the kind mentioned in the opening part, the contact mechanism has a flexible PCB (printing) with Cu conductor resistance tracks arranged between flexible plastic layers. Part of a printed circuit board), a column- or sleeve-shaped contact extending through the PCB, the contact being electrically This is achieved by the fact that it is connected to a Cu conductor resistance path and protrudes upwards on one side from one of the plastic layers.

この接触システムの新規な点は、上記チップ、すなわち、そのボンディングパッド(bonding pads)と、上記接触部との間の接触が、チップに対して、規定された圧力を加えることより実現されている点である。   The novel point of this contact system is realized by applying a defined pressure to the chip, ie the contact between its bonding pads and the contact part. Is a point.

本発明の第1の改良点(refinement)として、フレキシブルPCB(プリント回路板)が、弾性構造体(elastic structure)上の接触ソケットに配置されている。それゆえ、従来のバネピンの場合に上記接触力を通常維持するために必要なバネの変位(spring excursion)を、このように、フレキシブル基板の弾力性によって、そして、適当な場合には、さらに弾性付加部材によって実現している。   As a first refinement of the present invention, a flexible PCB (printed circuit board) is placed in the contact socket on the elastic structure. Therefore, the spring excursion normally required to maintain the contact force in the case of conventional spring pins is thus more elastic, depending on the elasticity of the flexible substrate and, if appropriate, more elastic. This is realized by an additional member.

また、エラストマー挿入物(elastomer inserts)、ポッティング発泡剤(potting foam)、熱可塑性エラストマー、または、ゴムまたはゴム状の部材が、接触力維持部材(contact-force-maintaining elements)として備えられていてもよい。   Elastomer inserts, potting foams, thermoplastic elastomers, or rubber or rubber-like members may also be provided as contact-force-maintaining elements Good.

本発明の開発においては、裏側から配置され、裏側から差し込まれ、接着され、ホットシーリング(hot sealing)され、または、ゴムにより被覆されること等により、上記接触力維持部材が、PCBの下方に配置されることとなる。この場合、上記接触力維持部は、PCBとの合成粘着力(composite adhesion)を有していてもよい。   In the development of the present invention, the contact force maintaining member is disposed below the PCB by being arranged from the back side, inserted from the back side, bonded, hot sealed, or covered with rubber. Will be placed. In this case, the contact force maintaining unit may have a composite adhesion with the PCB.

本発明のさらなる改良点は、PCBが、取り外し可能に上記接触ソケットと接続されていることに特徴付けられている。   A further improvement of the invention is characterized in that the PCB is removably connected to the contact socket.

最後に、上記接触ソケットは、電力損失による放熱を目的とした部材である。それゆえ、チップがいたずらに加熱されることを防止できる。   Finally, the contact socket is a member intended to dissipate heat due to power loss. Therefore, the chip can be prevented from being heated unnecessarily.

さらに、本発明の目的は、上記接触ソケットが、均一な熱分布を目的とした部材であるという事実により達成される。   Furthermore, the object of the present invention is achieved by the fact that the contact socket is a member intended for uniform heat distribution.

さらに、上記接触ソケットには、バックアップコンデンサ(backup capacitors)などの他の構成部材が配されていてもよく、上記接触ソケットの供給線は、フレキシブル基板として形成される。   Furthermore, the contact socket may be provided with other components such as backup capacitors, and the supply line of the contact socket is formed as a flexible substrate.

本発明のほかの改良点は、上記接触機構が、取り外し可能に上記接触ソケットと接続されている点である。   Another improvement of the present invention is that the contact mechanism is detachably connected to the contact socket.

また、電気的接触を改善するため、上記接触部には、強制的および確実な固定方法(force-locking and positively locking manner)によって上記接触部へ押し込まれた(pressed into)王冠部(crowns)が備えられている。   Also, to improve electrical contact, the contacts have crowns that are pressed into the contacts by a force-locking and positively locking manner. Is provided.

さらに、本発明の目的は、上記BGAのピッチにおけるマイクロヴィア(microvias)を、フレキシブルプラスティック層の間に配されているCu導体抵抗路を有する、フレキシブルPCBへ導入し、その後、上記マイクロヴィアに導電性材料を充填し、マイクロヴィアの少なくとも壁を被覆して接触部材を製造することを特徴とする方法、および、上記フレキシブルPCBのフレキシブルプラスティック層の一つを、エッチングにより薄くして、導電性充填材料を上記表面から部分的に突出させることを特徴とする方法によって達成される。   A further object of the present invention is to introduce microvias at the pitch of the BGA into a flexible PCB having a Cu conductor resistance path disposed between the flexible plastic layers, after which the microvias are electrically conductive. A contact member is manufactured by filling a conductive material and covering at least the wall of the microvia, and one of the flexible plastic layers of the flexible PCB is thinned by etching, and the conductive filling is performed. This is achieved by a method characterized by partially projecting material from the surface.

また、上記フレキシブルプラスティック層の薄層化を、プラズマエッチングまたは他の適切な選択的エッチング方法によって行なってもよい。   The flexible plastic layer may be thinned by plasma etching or other appropriate selective etching method.

さらに、本発明の改良点は、プラズマエッチングと共に、フォトリソグラフィーを用いて、マイクロヴィアを上記フレキシブルPCBに導入する点である。   Furthermore, the improvement of the present invention is that microvias are introduced into the flexible PCB using photolithography together with plasma etching.

また、マイクロヴィアを、上記フレキシブルPCBへ機械的に導入することもできる。   Microvias can also be mechanically introduced into the flexible PCB.

以下に、実施例を用いて、本発明を、より詳しく説明する。   Hereinafter, the present invention will be described in more detail with reference to examples.

図1は、BGAパッケージを接触接続するために、接触ソケットにおいて、フレキシブルPCBと接触部とを、電気的に接続させる装置を示す図である。図2は、付加された接触王冠部を有する、図1に従った装置の変化形を示す図である。   FIG. 1 is a view showing an apparatus for electrically connecting a flexible PCB and a contact portion in a contact socket in order to contact-connect a BGA package. FIG. 2 shows a variant of the device according to FIG. 1 with an added contact crown.

本発明は、特に通電試験および機能試験の分野で用いる、フレキシブルPCB3によって、FPBGAパッケージ2の端子1と信号源(図示せず)とを、電気的な損失が少なく、取り外し可能に接続するための新たな接触システムの構成について説明するものである。   The present invention is to connect the terminal 1 of the FPBGA package 2 and a signal source (not shown) detachably with a flexible PCB 3 used particularly in the field of energization test and function test with little electrical loss. A configuration of a new contact system will be described.

上記接触システムは、接触ソケット4を備えている。この接触ソケット4は、確実な固定方法により、接触接続されるパッケージ2を受け入れる。また、チップ端子1と、上記フレキシブルPCB3における対応する接触部材5との間の接触接続は、パッケージ2に対して規定の圧力を加えることにより行なう。また、接触接続されるパッケージ2の挿入を簡単にするために、上記接触ソケットに案内面(guide level)6が備えられている。   The contact system includes a contact socket 4. The contact socket 4 receives the package 2 to be contact-connected by a reliable fixing method. The contact connection between the chip terminal 1 and the corresponding contact member 5 in the flexible PCB 3 is performed by applying a prescribed pressure to the package 2. Further, in order to simplify the insertion of the package 2 to be contact-connected, the contact socket is provided with a guide level 6.

フレキシブルPCB3は2つのポリイミドフィルム7,8を備え、これらの間に、Cuの導電抵抗路9が1つまたは複数の面(層)として配置されている。   The flexible PCB 3 includes two polyimide films 7 and 8, and a Cu conductive resistance path 9 is disposed between them as one or a plurality of surfaces (layers).

フレキシブルPCB3上の上記対応する接触部材5は、円柱状または筒(sleeve)状、またはそれに似た形状であって、接触部材5は、プラズマエッチングにより、その一部がフレキシブルPCB3(ポリマー基板)によって被覆されていない。その結果、窪み(depression)10が、接触部材5の領域に形成される。   The corresponding contact member 5 on the flexible PCB 3 has a columnar shape, a sleeve shape, or a similar shape. The contact member 5 is partly formed by plasma etching, and a part thereof is the flexible PCB 3 (polymer substrate). Not covered. As a result, a depression 10 is formed in the region of the contact member 5.

このような円柱状または筒状のような接触部材5を形成するため、例えばスタンピング(stamping)またはプラズマエッチングによって、接触点に正確に、チップ2またはFPBGAパッケージと接続させるべく、上記ポリマー基板にホール(マイクロヴィア)を導入すると共に、上記ホールを導電材料により充填する。次に、プラズマエッチング時に必要な、ホール用のエッチングマスクを除去した後、さらにより選択的なプラズマエッチング操作によって、フレキシブル基板材料を部分的に除去できる。その結果、窪み10が、ポリマー基板に生成され、円柱状の接触機構5だけが、円柱のようなピン形状で残る。また、上記薄層化を、他の適切な選択的エッチング方法によって行ってもよい。   In order to form such a columnar or cylindrical contact member 5, holes are formed in the polymer substrate so as to be connected to the chip 2 or the FPBGA package accurately at the contact point by, for example, stamping or plasma etching. (Microvia) is introduced and the hole is filled with a conductive material. Next, after removing the hole etching mask necessary for plasma etching, the flexible substrate material can be partially removed by an even more selective plasma etching operation. As a result, the depression 10 is generated in the polymer substrate, and only the cylindrical contact mechanism 5 remains in a pin shape like a cylinder. The thinning may be performed by other appropriate selective etching methods.

この点に関連して、本発明は、接触機構5(ピン)の端部に王冠部11を形成するための全ての技術も包含している。   In this regard, the present invention also encompasses all techniques for forming the crown 11 at the end of the contact mechanism 5 (pin).

さらに、フレキシブル基板において対応する接触機構を実現するための他の解決策として、押し付け技術(pressing techniques)が考えられる。この場合、円柱のような接触王冠部11を、強制的かつ確実な固定方法によって、フレキシブル基板を有するソケットへ導入する(図2)。   Furthermore, pressing techniques can be considered as another solution for realizing a corresponding contact mechanism in a flexible substrate. In this case, the contact crown portion 11 such as a cylinder is introduced into the socket having the flexible substrate by a forcible and reliable fixing method (FIG. 2).

さらに、上記接触システムの構成の特徴は、通常、接触力を維持するため従来のバネピンのバネの変位が、この場合には、フレキシブル基板(フレキシブルPCB3)の弾力性によって、さらに適当な場合には、フレキシブルPCB3の下方に配されている他の弾性付加部材12によって実現されている点である。   In addition, the contact system configuration is characterized by the fact that the spring displacement of the conventional spring pin is usually used to maintain the contact force, in this case due to the elasticity of the flexible substrate (flexible PCB 3). This is realized by the other elastic addition member 12 disposed below the flexible PCB 3.

このような組み合わせは、上記フレキシブル基板を、(例えば、エラストマー挿入物、ポッティング合成物(potting compositions)またはポッティング発泡剤、熱可塑性エラストマー、および、ゴムである)他の弾性付加部材12、つまり接触力維持部材と、該部材を、例えば、裏側から配置し、裏側から差し込み、接着し、ホットシーリングし、または、ゴムにより被覆する等により、完全にまたは部分的に合成粘着させている点が特徴である。   Such a combination allows the flexible substrate to be connected to other elastic addition members 12, ie contact forces (eg, elastomer inserts, potting compositions or potting foaming agents, thermoplastic elastomers, and rubbers). The maintenance member and the member are characterized in that they are completely or partially synthetically adhered by, for example, arranging from the back side, inserting from the back side, bonding, hot sealing, or covering with rubber. is there.

さらに、上記接触システムの構成では、上記接触システムの構成またはその一部が、接触部の生成に加えて、さらに、電力損失または均一な熱分布などの他の付加的な機能を果たす点が特徴である。また、他の構成部品(例えば、バックアップコンデンサ)の集積についても説明する。   Furthermore, the configuration of the contact system is characterized in that the configuration of the contact system or a part of the contact system further performs other additional functions such as power loss or uniform heat distribution in addition to the generation of the contact portion. It is. Also, the integration of other components (for example, a backup capacitor) will be described.

内部抵抗または接触抵抗をできるだけ小さくするために、上記接触システムの供給線を、同様に、フレキシブル基板(フレキシブルPCB3)を用いて実現してもよい。また、接触接続システムを備える接触ソケット4は、交換可能なように運搬装置(carrying device)に配置される。   In order to make the internal resistance or the contact resistance as small as possible, the supply line of the contact system may be similarly realized using a flexible substrate (flexible PCB 3). Also, the contact socket 4 with the contact connection system is arranged in a carrying device so that it can be exchanged.

また、本発明では、接触力維持部材を、ゴムなどの弾性部材から構成してもよい。   In the present invention, the contact force maintaining member may be composed of an elastic member such as rubber.

また、本発明では、上記接触維持部材が、PCB3の裏側から配置され、または、PCB3の裏側から差し込まれることにより、この接触力維持部材がPCB3の下方に配置される。   Moreover, in this invention, the said contact maintenance member is arrange | positioned from the back side of PCB3, or this contact force maintenance member is arrange | positioned under PCB3 by being inserted from the back side of PCB3.

BGAパッケージを接触接続するために、接触ソケットにおいて、フレキシブルPCBと接触部とを、電気的に接続させる装置を示す図である。It is a figure which shows the apparatus which electrically connects a flexible PCB and a contact part in a contact socket, in order to contact-connect a BGA package. 付加された接触王冠部を有する、図1に従った装置の変化形を示す図である。FIG. 2 shows a variant of the device according to FIG. 1 with an added contact crown.

符号の説明Explanation of symbols

1 チップ端子
2 FPBGAパッケージ
3 フレキシブルPCB
4 接触ソケット
5 接触部材
6 案内面
7 ポリイミドフィルム
8 ポリイミドフィルム
9 Cu導体抵抗路
10 窪み
11 王冠部
12 弾性付加部材
1 Chip terminal 2 FPBGA package 3 Flexible PCB
DESCRIPTION OF SYMBOLS 4 Contact socket 5 Contact member 6 Guide surface 7 Polyimide film 8 Polyimide film 9 Cu conductor resistance path 10 Depression 11 Crown part 12 Elasticity addition member

Claims (21)

BGAパッケージ用の案内部材を有する接触ソケットと、前記接触ソケットに配されると共に、通電試験および機能試験用のBGAパッケージ(DUT)の端子を電気的に接触接続させる接触機構とを用いて、BGAパッケージと信号源とを電気的に接続させる装置において、
前記接触機構が、フレキシブルプラスティック層(7,8)の間に配されたCu導体抵抗路(9)を有する、フレキシブルPCB(3)の一部であり、
さらに、円柱状または筒状の接触部材(5)が備えられており、
この接触部材が、
前記フレキシブルPCB(3)を貫いて延びており、電気的に前記Cu導体抵抗路(9)と接続されていると共に、
前記プラスティック層(7,8)の一方から、何れかの面上に突出していることを特徴とする装置。
A BGA using a contact socket having a guide member for a BGA package and a contact mechanism arranged in the contact socket and electrically contacting and connecting terminals of a BGA package (DUT) for current test and function test In an apparatus for electrically connecting a package and a signal source,
The contact mechanism is part of a flexible PCB (3) having a Cu conductor resistance path (9) disposed between the flexible plastic layers (7, 8);
Furthermore, a cylindrical or cylindrical contact member (5) is provided,
This contact member is
Extending through the flexible PCB (3), electrically connected to the Cu conductor resistance path (9), and
A device characterized in that it protrudes on either side from one of the plastic layers (7, 8).
前記フレキシブルPCB(3)が、弾性付加部材(12)上の前記接触ソケット(4)に配されていることを特徴とする請求項1に記載の装置。   The device according to claim 1, characterized in that the flexible PCB (3) is arranged in the contact socket (4) on the elastically added member (12). 前記フレキシブルPCB(3)の下方に、さらに、接触力維持部材が備えられていることを特徴とする請求項1または2に記載の装置。   The apparatus according to claim 1 or 2, further comprising a contact force maintaining member below the flexible PCB (3). 前記接触力維持部材として、エラストマー挿入物が備えられていることを特徴とする請求項3に記載の装置。   The apparatus according to claim 3, wherein an elastomer insert is provided as the contact force maintaining member. 前記接触力維持部材として、ポッティング構成物またはポッティング発泡剤が備えられていることを特徴とする請求項3に記載の装置。   4. The apparatus according to claim 3, wherein a potting component or a potting foaming agent is provided as the contact force maintaining member. 前記接触力維持部材として、熱可塑性のエラストマーが備えられていることを特徴とする請求項3に記載の装置。   The apparatus according to claim 3, wherein a thermoplastic elastomer is provided as the contact force maintaining member. 前記接触力維持部材として、ゴムまたはゴム状の部材が備えられていることを特徴とする請求項3に記載の装置。   The apparatus according to claim 3, wherein a rubber or a rubber-like member is provided as the contact force maintaining member. 前記接触力維持部材が、裏側から配置され、裏側から差し込まれ、接着され、ホットシーリングされ、または、ゴムにより被覆されること等により、前記PCBの下方に配されていることを特徴とする請求項3から7の何れか1項に記載の装置。   The contact force maintaining member is disposed below the PCB by being arranged from the back side, inserted from the back side, adhered, hot sealed, or covered with rubber, or the like. Item 8. The device according to any one of Items 3 to 7. 前記接触力維持部材が、前記フレキシブルPCB(3)に対する、合成粘着力を有していることを特徴とする請求項3から8の何れか1項に記載の装置。   The apparatus according to any one of claims 3 to 8, wherein the contact force maintaining member has a synthetic adhesive force with respect to the flexible PCB (3). 前記PCB(3)が、取り外し可能に前記接触ソケット(4)と接続されていることを特徴とする請求項1から9の何れか1項に記載の装置。   10. Device according to any one of the preceding claims, characterized in that the PCB (3) is detachably connected to the contact socket (4). 前記接触ソケット(4)が、電力損失による放熱を目的とした部材であることを特徴とする請求項1から10の何れか1項に記載の装置。   The device according to claim 1, wherein the contact socket is a member intended to dissipate heat due to power loss. 前記接触ソケット(4)が、均一な熱分布を目的とした部材であることを特徴とする請求項1から11の何れか1項に記載の装置。   12. The device according to claim 1, wherein the contact socket (4) is a member intended for uniform heat distribution. バックアップコンデンサのような他の部材が、前記接触ソケット(4)に備えられていることを特徴とする請求項1から12の何れか1項に記載の装置。   Device according to any one of the preceding claims, characterized in that another member, such as a backup capacitor, is provided in the contact socket (4). 前記接触ソケット(4)の供給線が、フレキシブル基板として形成されていることを特徴とする請求項1から13の何れか1項に記載の装置。   14. A device according to any one of the preceding claims, characterized in that the supply line of the contact socket (4) is formed as a flexible substrate. 前記接触機構が、取り外し可能に前記接触ソケット(4)と接続されていることを特徴とする請求項1から14の何れか1項に記載の装置。   15. Device according to any one of the preceding claims, characterized in that the contact mechanism is detachably connected to the contact socket (4). 前記接触部材(4)が、王冠部(11)を備えていることを特徴とする請求項1から15の何れか1項に記載の装置。   Device according to any one of the preceding claims, characterized in that the contact member (4) comprises a crown (11). 前記王冠部(11)が、強制的かつ確実な固定方法によって、前記接触部材(4)へ押し込まれることを特徴とする請求項16に記載の装置。   17. Device according to claim 16, characterized in that the crown (11) is pushed into the contact member (4) by a forced and secure fastening method. 請求項1から17に記載の接触機構の製造方法において、
前記BGAのピッチにおけるマイクロヴィアを、フレキシブルプラスティック層(7,8)の間に配されているCu導体抵抗路(9)を有する、フレキシブルPCB(3)へ導入し、
続いて、前記マイクロヴィアに導電材料を充填し、マイクロヴィアの少なくとも壁を被覆して接触部材(5)を製造し、
前記フレキシブルPCB(3)のフレキシブルプラスティック層の一つを、エッチングにより薄くして、接触部材(5)が形成されるように、導電性充填材料を表面から部分的に突出させることを特徴とする方法。
In the manufacturing method of the contact mechanism according to claim 1 to 17,
Introducing microvias at the pitch of the BGA into a flexible PCB (3) having a Cu conductor resistance path (9) disposed between the flexible plastic layers (7, 8);
Subsequently, the micro via is filled with a conductive material, and at least the wall of the micro via is coated to produce a contact member (5),
One of the flexible plastic layers of the flexible PCB (3) is thinned by etching, and the conductive filling material partially protrudes from the surface so that the contact member (5) is formed. Method.
前記薄層化を、プラズマエッチングまたは選択的エッチングによって行なうことを特徴とする請求項18に記載の方法。   The method according to claim 18, wherein the thinning is performed by plasma etching or selective etching. 前記マイクロヴィアを、フォトリソグラフィーによって前記PCBへ導入することを特徴とする請求項18または19に記載の方法。   20. The method according to claim 18 or 19, wherein the microvia is introduced into the PCB by photolithography. 前記マイクロヴィアを、機械的に導入することを特徴とする請求項18または19に記載の方法。   20. A method according to claim 18 or 19, wherein the microvia is mechanically introduced.
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