JP2005085811A - エッチング液及びエッチング方法 - Google Patents
エッチング液及びエッチング方法 Download PDFInfo
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- 238000005530 etching Methods 0.000 title claims abstract description 246
- 238000000034 method Methods 0.000 title claims abstract description 62
- 239000000243 solution Substances 0.000 claims abstract description 85
- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 47
- 229910001257 Nb alloy Inorganic materials 0.000 claims abstract description 41
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims abstract description 32
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910017604 nitric acid Inorganic materials 0.000 claims abstract description 18
- 239000002253 acid Substances 0.000 claims abstract description 17
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims abstract description 16
- 239000010955 niobium Substances 0.000 claims abstract description 13
- DTSBBUTWIOVIBV-UHFFFAOYSA-N molybdenum niobium Chemical compound [Nb].[Mo] DTSBBUTWIOVIBV-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 12
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims abstract description 12
- 150000007524 organic acids Chemical class 0.000 claims abstract description 8
- 239000007864 aqueous solution Substances 0.000 claims abstract description 5
- 239000000758 substrate Substances 0.000 claims description 51
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 41
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 35
- 239000011733 molybdenum Substances 0.000 claims description 35
- 229910001182 Mo alloy Inorganic materials 0.000 claims description 34
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 14
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 claims description 8
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 229940098779 methanesulfonic acid Drugs 0.000 claims description 4
- 229910052779 Neodymium Inorganic materials 0.000 claims description 3
- CCIVGXIOQKPBKL-UHFFFAOYSA-M ethanesulfonate Chemical compound CCS([O-])(=O)=O CCIVGXIOQKPBKL-UHFFFAOYSA-M 0.000 claims description 3
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 claims description 3
- 229910000583 Nd alloy Inorganic materials 0.000 claims description 2
- WPPDFTBPZNZZRP-UHFFFAOYSA-N aluminum copper Chemical compound [Al].[Cu] WPPDFTBPZNZZRP-UHFFFAOYSA-N 0.000 claims description 2
- 230000008569 process Effects 0.000 abstract description 10
- 239000010410 layer Substances 0.000 description 123
- 239000010408 film Substances 0.000 description 48
- 229910052751 metal Inorganic materials 0.000 description 24
- 239000002184 metal Substances 0.000 description 24
- 229920002120 photoresistant polymer Polymers 0.000 description 20
- 239000011347 resin Substances 0.000 description 16
- 229920005989 resin Polymers 0.000 description 16
- 239000007921 spray Substances 0.000 description 16
- 239000000203 mixture Substances 0.000 description 14
- 229960000583 acetic acid Drugs 0.000 description 12
- 229910052782 aluminium Inorganic materials 0.000 description 10
- 238000001039 wet etching Methods 0.000 description 10
- 230000008859 change Effects 0.000 description 7
- 238000001704 evaporation Methods 0.000 description 7
- 230000008020 evaporation Effects 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- -1 molybdenum Chemical class 0.000 description 5
- 229910052750 molybdenum Inorganic materials 0.000 description 5
- 239000010419 fine particle Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000009835 boiling Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229910016570 AlCu Inorganic materials 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000008961 swelling Effects 0.000 description 2
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- UBSJOWMHLJZVDJ-UHFFFAOYSA-N aluminum neodymium Chemical compound [Al].[Nd] UBSJOWMHLJZVDJ-UHFFFAOYSA-N 0.000 description 1
- 150000003863 ammonium salts Chemical class 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QDHFHIQKOVNCNC-UHFFFAOYSA-N butane-1-sulfonic acid Chemical compound CCCCS(O)(=O)=O QDHFHIQKOVNCNC-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012362 glacial acetic acid Substances 0.000 description 1
- 229940093915 gynecological organic acid Drugs 0.000 description 1
- 229920001903 high density polyethylene Polymers 0.000 description 1
- 239000004700 high-density polyethylene Substances 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- XAEFZNCEHLXOMS-UHFFFAOYSA-M potassium benzoate Chemical compound [K+].[O-]C(=O)C1=CC=CC=C1 XAEFZNCEHLXOMS-UHFFFAOYSA-M 0.000 description 1
- KCXFHTAICRTXLI-UHFFFAOYSA-N propane-1-sulfonic acid Chemical compound CCCS(O)(=O)=O KCXFHTAICRTXLI-UHFFFAOYSA-N 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/44—Compositions for etching metallic material from a metallic material substrate of different composition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/20—Acidic compositions for etching aluminium or alloys thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/26—Acidic compositions for etching refractory metals
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32134—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by liquid etching only
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Abstract
【解決手段】基板上に形成されたアルミニウム合金層と、その上のニオブ含有量2〜19重量%のモリブデン・ニオブ合金層とを有する積層膜をエッチングするためのエッチング液であって、リン酸、硝酸及び有機酸の混酸水溶液よりなることを特徴とするエッチング液及びこのエッチング液を用いるエッチング方法。リン酸濃度Npが50〜75重量%であり、硝酸濃度Nnが2〜15重量%であり、Np+(98/63)Nnで定義される酸成分濃度が55〜85重量%であることが好ましい。
【選択図】図1
Description
図1の通り、ガラス基板上に膜厚50nmのモリブデン・ニオブ合金層(Nb含有量5重量%)3をスパッタリングにより成膜し、その上にアルミニウム合金層2としてAlCu(アルミニウム・銅合金:銅含有量5重量%)をアルゴンガスを用いたスパッタリング法によって膜厚300nmに成膜させた後、膜厚50nmの上記と同組成のモリブデン・ニオブ合金層1を連続成膜し、MoNb/AlCu/MoNb積層膜を形成した。
[1] レジストの状態
レーザ顕微鏡(キーエンス社製VK−8500)を用いてフォトレジスト樹脂層の状態(膨潤、亀裂等の有無)を観察し、下記基準で評価した。
○=変化なし
×=膨潤、亀裂等の欠陥発生
[2] 配線形状
走査型電子顕微鏡(SEM)又は収束イオンビーム(FIB)(日立製作所社製FB−2000A及びC−4100)を用いて、図1(c)の庇の状態(突出長さL)と電極周囲部の残渣の状態を観察し、下記基準で評価した。
庇の状態(長さ):
×:L=60nm以上
○:L=60nm未満
2 アルミニウム合金層
Claims (9)
- 基板上に形成されたアルミニウム合金層と、その上のニオブ含有量2〜19重量%のモリブデン・ニオブ合金層とを有する積層膜をエッチングするためのエッチング液であって、
リン酸、硝酸及び有機酸の混酸水溶液よりなることを特徴とするエッチング液。 - 請求項1において、
リン酸濃度Npが50〜75重量%であり、
硝酸濃度Nnが2〜15重量%であり、
Np+(98/63)Nnで定義される酸成分濃度が55〜85重量%である
ことを特徴とするエッチング液。 - 請求項1又は2において、有機酸が酢酸又はアルキルスルホン酸であることを特徴とするエッチング液。
- 請求項1又は2において、有機酸が酢酸であり、且つその濃度が1〜30重量%であることを特徴とするエッチング液。
- 請求項1又は2において、有機酸がメタンスルホン酸及び/又はエタンスルホン酸であり、且つその濃度が0.5〜20重量%であることを特徴とするエッチング液。
- 基板上に形成されたアルミニウム合金層と、その上のニオブ含有量2〜19重量%のモリブデン・ニオブ合金層とを有する積層膜をエッチング液によりエッチングする方法であって、
該エッチング液が請求項1ないし5のいずれか1項に記載のエッチング液であり、
モリブデン・ニオブ合金層のエッチング速度とアルミニウム合金層のエッチング速度との比(モリブデン・ニオブ合金層のエッチング速度/アルミニウム合金層のエッチング速度)が0.7〜1.3の範囲にあることを特徴とするエッチング方法。 - 請求項6において、該積層膜は、さらに、該アルミニウム合金層と基板との間に介在する、ニオブ含有量2〜19重量%のモリブデン・ニオブ合金よりなる下層を有することを特徴とするエッチング方法。
- 請求項6又は7において、該アルミニウム合金は、銅含有率が0.05〜3重量%のアルミニウム銅合金であるか、又はネオジム含有率が1.5〜15重量%のアルミニウム・ネオジム合金であることを特徴とするエッチング方法。
- 請求項6ないし8のいずれか1項において、上側のモリブデン・ニオブ合金層の厚さtMとその下側のアルミニウム合金層の厚さtAとの比tM/tAが0.1〜1であることを特徴とするエッチング方法。
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JP2003312852A JP4093147B2 (ja) | 2003-09-04 | 2003-09-04 | エッチング液及びエッチング方法 |
US11/289,382 US20060189123A1 (en) | 2003-09-04 | 2005-11-30 | Etchant and method of etching |
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Cited By (9)
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JP2007048878A (ja) * | 2005-08-09 | 2007-02-22 | Mitsubishi Electric Corp | 半導体装置 |
WO2009011363A1 (ja) * | 2007-07-19 | 2009-01-22 | Hayashi Pure Chemical Ind, Ltd. | エッチング液組成物 |
WO2010082439A1 (ja) * | 2009-01-16 | 2010-07-22 | 三洋半導体製造株式会社 | エッチング液組成物 |
JP2012028393A (ja) * | 2010-07-20 | 2012-02-09 | Tosoh Corp | エッチング用組成物 |
CN102618872A (zh) * | 2011-01-25 | 2012-08-01 | 关东化学株式会社 | 以铜为主成分的金属薄膜的蚀刻液组合物 |
US8361816B2 (en) * | 2005-12-09 | 2013-01-29 | Samsung Electronics Co., Ltd. | Method of manufacturing vertical gallium nitride based light emitting diode |
CN102995021A (zh) * | 2011-09-08 | 2013-03-27 | 关东化学株式会社 | 铜及铜合金的蚀刻液组合物及蚀刻方法 |
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JP2020047952A (ja) * | 2013-03-28 | 2020-03-26 | 株式会社半導体エネルギー研究所 | 半導体装置 |
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KR101171175B1 (ko) * | 2004-11-03 | 2012-08-06 | 삼성전자주식회사 | 도전체용 식각액 및 이를 이용한 박막 트랜지스터표시판의 제조 방법 |
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JP5559956B2 (ja) * | 2007-03-15 | 2014-07-23 | 東進セミケム株式会社 | 薄膜トランジスタ液晶表示装置のエッチング液組成物 |
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JP2010163661A (ja) * | 2009-01-16 | 2010-07-29 | Sanyo Handotai Seizo Kk | エッチング液組成物 |
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JP2013105429A (ja) * | 2011-11-16 | 2013-05-30 | Japan Aviation Electronics Industry Ltd | タッチパネル |
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