JP2005085586A5 - - Google Patents

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Publication number
JP2005085586A5
JP2005085586A5 JP2003315932A JP2003315932A JP2005085586A5 JP 2005085586 A5 JP2005085586 A5 JP 2005085586A5 JP 2003315932 A JP2003315932 A JP 2003315932A JP 2003315932 A JP2003315932 A JP 2003315932A JP 2005085586 A5 JP2005085586 A5 JP 2005085586A5
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JP
Japan
Prior art keywords
discharge
voltage
plasma
electrodes
processing
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JP2003315932A
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English (en)
Japanese (ja)
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JP3773510B2 (ja
JP2005085586A (ja
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Priority to JP2003315932A priority Critical patent/JP3773510B2/ja
Priority claimed from JP2003315932A external-priority patent/JP3773510B2/ja
Publication of JP2005085586A publication Critical patent/JP2005085586A/ja
Publication of JP2005085586A5 publication Critical patent/JP2005085586A5/ja
Application granted granted Critical
Publication of JP3773510B2 publication Critical patent/JP3773510B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003315932A 2003-09-08 2003-09-08 放電プラズマ処理方法および放電プラズマ処理装置 Expired - Fee Related JP3773510B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003315932A JP3773510B2 (ja) 2003-09-08 2003-09-08 放電プラズマ処理方法および放電プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003315932A JP3773510B2 (ja) 2003-09-08 2003-09-08 放電プラズマ処理方法および放電プラズマ処理装置

Publications (3)

Publication Number Publication Date
JP2005085586A JP2005085586A (ja) 2005-03-31
JP2005085586A5 true JP2005085586A5 (enExample) 2005-07-14
JP3773510B2 JP3773510B2 (ja) 2006-05-10

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ID=34416030

Family Applications (1)

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JP2003315932A Expired - Fee Related JP3773510B2 (ja) 2003-09-08 2003-09-08 放電プラズマ処理方法および放電プラズマ処理装置

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JP (1) JP3773510B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5336691B2 (ja) * 2005-09-16 2013-11-06 国立大学法人東北大学 プラズマ発生装置、表面処理装置、光源、プラズマ発生方法、表面処理方法および光照射方法
US7914692B2 (en) * 2006-08-29 2011-03-29 Ngk Insulators, Ltd. Methods of generating plasma, of etching an organic material film, of generating minus ions, of oxidation and nitriding
JP6376685B2 (ja) * 2014-05-16 2018-08-22 東レエンジニアリング株式会社 薄膜形成装置および薄膜形成方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5864030A (ja) * 1981-10-13 1983-04-16 Nec Kyushu Ltd プラズマエツチング装置
JPS63102318A (ja) * 1986-10-20 1988-05-07 Tokyo Electron Ltd プラズマエツチング方法
JPH04199816A (ja) * 1990-11-29 1992-07-21 Mitsubishi Electric Corp プラズマｃｖｄ装置
JP4378592B2 (ja) * 2000-11-13 2009-12-09 株式会社安川電機 放電発生装置の制御方法
JP2002217168A (ja) * 2001-01-15 2002-08-02 Nec Corp プラズマ処理方法

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