JP2005082883A - 無電解ニッケルめっき液 - Google Patents
無電解ニッケルめっき液 Download PDFInfo
- Publication number
- JP2005082883A JP2005082883A JP2003319947A JP2003319947A JP2005082883A JP 2005082883 A JP2005082883 A JP 2005082883A JP 2003319947 A JP2003319947 A JP 2003319947A JP 2003319947 A JP2003319947 A JP 2003319947A JP 2005082883 A JP2005082883 A JP 2005082883A
- Authority
- JP
- Japan
- Prior art keywords
- electroless nickel
- acid
- iii
- nickel plating
- plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007747 plating Methods 0.000 title claims abstract description 105
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 title claims abstract description 103
- 229910052759 nickel Inorganic materials 0.000 title claims abstract description 51
- 239000007788 liquid Substances 0.000 title abstract description 4
- 150000001875 compounds Chemical class 0.000 claims abstract description 31
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 24
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910052802 copper Inorganic materials 0.000 claims abstract description 16
- 239000010949 copper Substances 0.000 claims abstract description 16
- 229910052742 iron Inorganic materials 0.000 claims abstract description 12
- 239000008139 complexing agent Substances 0.000 claims abstract description 11
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910017052 cobalt Inorganic materials 0.000 claims abstract description 10
- 239000010941 cobalt Substances 0.000 claims abstract description 10
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000011135 tin Substances 0.000 claims abstract description 10
- 229910052718 tin Inorganic materials 0.000 claims abstract description 10
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 9
- 239000011651 chromium Substances 0.000 claims abstract description 9
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims abstract description 9
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 8
- 150000002815 nickel Chemical class 0.000 claims abstract description 8
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 11
- 239000003446 ligand Substances 0.000 claims description 8
- 238000001556 precipitation Methods 0.000 abstract description 16
- 239000000243 solution Substances 0.000 description 35
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 33
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 description 28
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 25
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 16
- 239000004471 Glycine Substances 0.000 description 14
- 238000000151 deposition Methods 0.000 description 14
- UVZICZIVKIMRNE-UHFFFAOYSA-N thiodiacetic acid Chemical compound OC(=O)CSCC(O)=O UVZICZIVKIMRNE-UHFFFAOYSA-N 0.000 description 13
- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 12
- 230000008021 deposition Effects 0.000 description 12
- 229940116298 l- malic acid Drugs 0.000 description 12
- RRIWRJBSCGCBID-UHFFFAOYSA-L nickel sulfate hexahydrate Chemical compound O.O.O.O.O.O.[Ni+2].[O-]S([O-])(=O)=O RRIWRJBSCGCBID-UHFFFAOYSA-L 0.000 description 12
- 229940116202 nickel sulfate hexahydrate Drugs 0.000 description 12
- 229910001379 sodium hypophosphite Inorganic materials 0.000 description 12
- 239000001384 succinic acid Substances 0.000 description 12
- 238000006243 chemical reaction Methods 0.000 description 11
- 239000002253 acid Substances 0.000 description 9
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 7
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 7
- 229910052700 potassium Inorganic materials 0.000 description 7
- 239000011591 potassium Substances 0.000 description 7
- 150000003839 salts Chemical class 0.000 description 7
- 229910052708 sodium Inorganic materials 0.000 description 7
- 239000011734 sodium Substances 0.000 description 7
- -1 Ammonium hexafluorochromate Chemical compound 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 6
- 239000000654 additive Substances 0.000 description 5
- VZVHUBYZGAUXLX-UHFFFAOYSA-N azane;azanide;cobalt(3+) Chemical compound N.N.N.[NH2-].[NH2-].[NH2-].[Co+3] VZVHUBYZGAUXLX-UHFFFAOYSA-N 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
- RLJMLMKIBZAXJO-UHFFFAOYSA-N lead nitrate Chemical compound [O-][N+](=O)O[Pb]O[N+]([O-])=O RLJMLMKIBZAXJO-UHFFFAOYSA-N 0.000 description 5
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 4
- 150000007513 acids Chemical class 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 230000003197 catalytic effect Effects 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 239000012495 reaction gas Substances 0.000 description 4
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 3
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 3
- 230000000996 additive effect Effects 0.000 description 3
- 150000001805 chlorine compounds Chemical class 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 3
- 229910021554 Chromium(II) chloride Inorganic materials 0.000 description 2
- 229910021556 Chromium(III) chloride Inorganic materials 0.000 description 2
- RGHNJXZEOKUKBD-SQOUGZDYSA-N D-gluconic acid Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)=O RGHNJXZEOKUKBD-SQOUGZDYSA-N 0.000 description 2
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 2
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 2
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- GXOAPLKJECMSQX-UHFFFAOYSA-N [Mn+3].[Na+] Chemical compound [Mn+3].[Na+] GXOAPLKJECMSQX-UHFFFAOYSA-N 0.000 description 2
- RKQBZYMAZDQQCI-UHFFFAOYSA-H [Mn](=O)(=O)([O-])Cl.[Mn](=O)(=O)([O-])Cl.[Mn](=O)(=O)([O-])Cl.[Mn](=O)(=O)([O-])Cl.[Mn](=O)(=O)([O-])Cl.[Mn](=O)(=O)([O-])Cl.[K+].[K+].[K+].[K+].[K+].[K+] Chemical compound [Mn](=O)(=O)([O-])Cl.[Mn](=O)(=O)([O-])Cl.[Mn](=O)(=O)([O-])Cl.[Mn](=O)(=O)([O-])Cl.[Mn](=O)(=O)([O-])Cl.[Mn](=O)(=O)([O-])Cl.[K+].[K+].[K+].[K+].[K+].[K+] RKQBZYMAZDQQCI-UHFFFAOYSA-H 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 235000001014 amino acid Nutrition 0.000 description 2
- 150000001413 amino acids Chemical class 0.000 description 2
- 150000003863 ammonium salts Chemical class 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- QSWDMMVNRMROPK-UHFFFAOYSA-K chromium(3+) trichloride Chemical compound [Cl-].[Cl-].[Cl-].[Cr+3] QSWDMMVNRMROPK-UHFFFAOYSA-K 0.000 description 2
- 239000011636 chromium(III) chloride Substances 0.000 description 2
- 235000007831 chromium(III) chloride Nutrition 0.000 description 2
- XBWRJSSJWDOUSJ-UHFFFAOYSA-L chromium(ii) chloride Chemical compound Cl[Cr]Cl XBWRJSSJWDOUSJ-UHFFFAOYSA-L 0.000 description 2
- XLJKHNWPARRRJB-UHFFFAOYSA-N cobalt(2+) Chemical compound [Co+2] XLJKHNWPARRRJB-UHFFFAOYSA-N 0.000 description 2
- AWOPBNHMACSMTO-UHFFFAOYSA-N copper;sodium Chemical compound [Na+].[Cu+2] AWOPBNHMACSMTO-UHFFFAOYSA-N 0.000 description 2
- 150000001991 dicarboxylic acids Chemical class 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000001530 fumaric acid Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- ZRCIGGQCPZGOSK-UHFFFAOYSA-H hexasodium hexathiocyanate Chemical compound [Na+].[Na+].[Na+].[Na+].[Na+].[Na+].[S-]C#N.[S-]C#N.[S-]C#N.[S-]C#N.[S-]C#N.[S-]C#N ZRCIGGQCPZGOSK-UHFFFAOYSA-H 0.000 description 2
- RXPAJWPEYBDXOG-UHFFFAOYSA-N hydron;methyl 4-methoxypyridine-2-carboxylate;chloride Chemical compound Cl.COC(=O)C1=CC(OC)=CC=N1 RXPAJWPEYBDXOG-UHFFFAOYSA-N 0.000 description 2
- NBZBKCUXIYYUSX-UHFFFAOYSA-N iminodiacetic acid Chemical compound OC(=O)CNCC(O)=O NBZBKCUXIYYUSX-UHFFFAOYSA-N 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 2
- 239000011976 maleic acid Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 2
- 229940053662 nickel sulfate Drugs 0.000 description 2
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- XAEFZNCEHLXOMS-UHFFFAOYSA-M potassium benzoate Chemical compound [K+].[O-]C(=O)C1=CC=CC=C1 XAEFZNCEHLXOMS-UHFFFAOYSA-M 0.000 description 2
- 159000000000 sodium salts Chemical class 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 150000003464 sulfur compounds Chemical class 0.000 description 2
- AWDBHOZBRXWRKS-UHFFFAOYSA-N tetrapotassium;iron(6+);hexacyanide Chemical compound [K+].[K+].[K+].[K+].[Fe+6].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-] AWDBHOZBRXWRKS-UHFFFAOYSA-N 0.000 description 2
- GPRSKVBHOMRGMO-UHFFFAOYSA-H tripotassium;chromium(3+);oxalate Chemical compound [K+].[K+].[K+].[Cr+3].[O-]C(=O)C([O-])=O.[O-]C(=O)C([O-])=O.[O-]C(=O)C([O-])=O GPRSKVBHOMRGMO-UHFFFAOYSA-H 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- QYIGOGBGVKONDY-UHFFFAOYSA-N 1-(2-bromo-5-chlorophenyl)-3-methylpyrazole Chemical compound N1=C(C)C=CN1C1=CC(Cl)=CC=C1Br QYIGOGBGVKONDY-UHFFFAOYSA-N 0.000 description 1
- VILCJCGEZXAXTO-UHFFFAOYSA-N 2,2,2-tetramine Chemical compound NCCNCCNCCN VILCJCGEZXAXTO-UHFFFAOYSA-N 0.000 description 1
- LCPVQAHEFVXVKT-UHFFFAOYSA-N 2-(2,4-difluorophenoxy)pyridin-3-amine Chemical compound NC1=CC=CN=C1OC1=CC=C(F)C=C1F LCPVQAHEFVXVKT-UHFFFAOYSA-N 0.000 description 1
- XXSPKSHUSWQAIZ-UHFFFAOYSA-L 36026-88-7 Chemical compound [Ni+2].[O-]P=O.[O-]P=O XXSPKSHUSWQAIZ-UHFFFAOYSA-L 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- 239000004475 Arginine Substances 0.000 description 1
- 229910021581 Cobalt(III) chloride Inorganic materials 0.000 description 1
- VMQMZMRVKUZKQL-UHFFFAOYSA-N Cu+ Chemical compound [Cu+] VMQMZMRVKUZKQL-UHFFFAOYSA-N 0.000 description 1
- RGHNJXZEOKUKBD-UHFFFAOYSA-N D-gluconic acid Natural products OCC(O)C(O)C(O)C(O)C(O)=O RGHNJXZEOKUKBD-UHFFFAOYSA-N 0.000 description 1
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 1
- VTLYFUHAOXGGBS-UHFFFAOYSA-N Fe3+ Chemical compound [Fe+3] VTLYFUHAOXGGBS-UHFFFAOYSA-N 0.000 description 1
- WHUUTDBJXJRKMK-UHFFFAOYSA-N Glutamic acid Natural products OC(=O)C(N)CCC(O)=O WHUUTDBJXJRKMK-UHFFFAOYSA-N 0.000 description 1
- QNAYBMKLOCPYGJ-REOHCLBHSA-N L-alanine Chemical compound C[C@H](N)C(O)=O QNAYBMKLOCPYGJ-REOHCLBHSA-N 0.000 description 1
- ODKSFYDXXFIFQN-BYPYZUCNSA-P L-argininium(2+) Chemical compound NC(=[NH2+])NCCC[C@H]([NH3+])C(O)=O ODKSFYDXXFIFQN-BYPYZUCNSA-P 0.000 description 1
- CKLJMWTZIZZHCS-REOHCLBHSA-N L-aspartic acid Chemical compound OC(=O)[C@@H](N)CC(O)=O CKLJMWTZIZZHCS-REOHCLBHSA-N 0.000 description 1
- WHUUTDBJXJRKMK-VKHMYHEASA-N L-glutamic acid Chemical compound OC(=O)[C@@H](N)CCC(O)=O WHUUTDBJXJRKMK-VKHMYHEASA-N 0.000 description 1
- QPCDCPDFJACHGM-UHFFFAOYSA-N N,N-bis{2-[bis(carboxymethyl)amino]ethyl}glycine Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(=O)O)CCN(CC(O)=O)CC(O)=O QPCDCPDFJACHGM-UHFFFAOYSA-N 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- FTFQJNKYIZIHQO-UHFFFAOYSA-M [NH4+].[Cl-].[Cl-].[Cu+] Chemical compound [NH4+].[Cl-].[Cl-].[Cu+] FTFQJNKYIZIHQO-UHFFFAOYSA-M 0.000 description 1
- MKZJXUJNFRVEAF-UHFFFAOYSA-N [Na].N#C[Co](C#N)(C#N)(C#N)(C#N)C#N Chemical compound [Na].N#C[Co](C#N)(C#N)(C#N)(C#N)C#N MKZJXUJNFRVEAF-UHFFFAOYSA-N 0.000 description 1
- GFORUURFPDRRRJ-UHFFFAOYSA-N [Na].[Mn] Chemical compound [Na].[Mn] GFORUURFPDRRRJ-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000001361 adipic acid Substances 0.000 description 1
- 235000011037 adipic acid Nutrition 0.000 description 1
- 235000004279 alanine Nutrition 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- ODKSFYDXXFIFQN-UHFFFAOYSA-N arginine Natural products OC(=O)C(N)CCCNC(N)=N ODKSFYDXXFIFQN-UHFFFAOYSA-N 0.000 description 1
- 235000009697 arginine Nutrition 0.000 description 1
- 235000003704 aspartic acid Nutrition 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- VUCAVCCCXQVHAN-UHFFFAOYSA-L azane dichlorocopper Chemical compound N.Cl[Cu]Cl VUCAVCCCXQVHAN-UHFFFAOYSA-L 0.000 description 1
- WSRCQWPVBBOVSM-UHFFFAOYSA-N azanide;cobalt(2+) Chemical compound [NH2-].[NH2-].[NH2-].[NH2-].[NH2-].[NH2-].[Co+2] WSRCQWPVBBOVSM-UHFFFAOYSA-N 0.000 description 1
- OQFSQFPPLPISGP-UHFFFAOYSA-N beta-carboxyaspartic acid Natural products OC(=O)C(N)C(C(O)=O)C(O)=O OQFSQFPPLPISGP-UHFFFAOYSA-N 0.000 description 1
- 150000001621 bismuth Chemical class 0.000 description 1
- RJTANRZEWTUVMA-UHFFFAOYSA-N boron;n-methylmethanamine Chemical compound [B].CNC RJTANRZEWTUVMA-UHFFFAOYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical class OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- SWZDPOQDVXVJOR-UHFFFAOYSA-L chlorocopper;chloride Chemical compound [Cl-].[Cu]Cl SWZDPOQDVXVJOR-UHFFFAOYSA-L 0.000 description 1
- BFGKITSFLPAWGI-UHFFFAOYSA-N chromium(3+) Chemical compound [Cr+3] BFGKITSFLPAWGI-UHFFFAOYSA-N 0.000 description 1
- 229910000361 cobalt sulfate Inorganic materials 0.000 description 1
- 229940044175 cobalt sulfate Drugs 0.000 description 1
- KTVIXTQDYHMGHF-UHFFFAOYSA-L cobalt(2+) sulfate Chemical compound [Co+2].[O-]S([O-])(=O)=O KTVIXTQDYHMGHF-UHFFFAOYSA-L 0.000 description 1
- JAWGVVJVYSANRY-UHFFFAOYSA-N cobalt(3+) Chemical compound [Co+3] JAWGVVJVYSANRY-UHFFFAOYSA-N 0.000 description 1
- OOMOMODKLPLOKW-UHFFFAOYSA-H cobalt(3+);trisulfate Chemical compound [Co+3].[Co+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O OOMOMODKLPLOKW-UHFFFAOYSA-H 0.000 description 1
- 229910000362 cobalt(III) sulfate Inorganic materials 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000013527 degreasing agent Substances 0.000 description 1
- 238000005237 degreasing agent Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- IFQUWYZCAGRUJN-UHFFFAOYSA-N ethylenediaminediacetic acid Chemical compound OC(=O)CNCCNCC(O)=O IFQUWYZCAGRUJN-UHFFFAOYSA-N 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 239000000174 gluconic acid Substances 0.000 description 1
- 235000012208 gluconic acid Nutrition 0.000 description 1
- 235000013922 glutamic acid Nutrition 0.000 description 1
- 239000004220 glutamic acid Substances 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 229940046892 lead acetate Drugs 0.000 description 1
- 229940099690 malic acid Drugs 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- MMIPFLVOWGHZQD-UHFFFAOYSA-N manganese(3+) Chemical compound [Mn+3] MMIPFLVOWGHZQD-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- 150000002763 monocarboxylic acids Chemical class 0.000 description 1
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 1
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 1
- MGFYIUFZLHCRTH-UHFFFAOYSA-N nitrilotriacetic acid Chemical compound OC(=O)CN(CC(O)=O)CC(O)=O MGFYIUFZLHCRTH-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000010979 pH adjustment Methods 0.000 description 1
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 1
- 229960003330 pentetic acid Drugs 0.000 description 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-M phosphinate Chemical compound [O-][PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-M 0.000 description 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical compound O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 description 1
- PHNJLQNXDCGBBP-UHFFFAOYSA-L potassium chlorocopper chloride Chemical compound [Cl-].[K+].[Cu]Cl PHNJLQNXDCGBBP-UHFFFAOYSA-L 0.000 description 1
- KQIRLLVCCSEEOQ-UHFFFAOYSA-N potassium;iron(3+) Chemical compound [K+].[Fe+3] KQIRLLVCCSEEOQ-UHFFFAOYSA-N 0.000 description 1
- CHQMHPLRPQMAMX-UHFFFAOYSA-L sodium persulfate Substances [Na+].[Na+].[O-]S(=O)(=O)OOS([O-])(=O)=O CHQMHPLRPQMAMX-UHFFFAOYSA-L 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- VPOIXCYASUPXIC-UHFFFAOYSA-J tetrasodium oxalate Chemical compound C(C(=O)[O-])(=O)[O-].C(C(=O)[O-])(=O)[O-].[Na+].[Na+].[Na+].[Na+] VPOIXCYASUPXIC-UHFFFAOYSA-J 0.000 description 1
- IEKWPPTXWFKANS-UHFFFAOYSA-K trichlorocobalt Chemical compound Cl[Co](Cl)Cl IEKWPPTXWFKANS-UHFFFAOYSA-K 0.000 description 1
- XZGIUVFSLFPYOB-UHFFFAOYSA-H tripotassium;chromium(3+);hexathiocyanate Chemical compound [K+].[K+].[K+].[Cr+3].[S-]C#N.[S-]C#N.[S-]C#N.[S-]C#N.[S-]C#N.[S-]C#N XZGIUVFSLFPYOB-UHFFFAOYSA-H 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Chemically Coating (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
【解決手段】(1)水溶性ニッケル塩、(2)還元剤、(3)錯化剤、及び(4)銅、クロム、マンガン、鉄、コバルト及びスズからなる群から選ばれた少なくとも一種を金属成分として含む錯化合物、を含有することを特徴とする無電解ニッケルめっき液。
【選択図】なし
Description
1. (1)水溶性ニッケル塩、(2)還元剤、(3)錯化剤、及び(4)銅、クロム、マンガン、鉄、コバルト及びスズからなる群から選ばれた少なくとも一種を金属成分として含む錯化合物、を含有することを特徴とする無電解ニッケルめっき液。
2. 銅、クロム、マンガン、鉄、コバルト及びスズからなる群から選ばれた少なくとも一種を金属成分として含む錯化合物が、Cl、NH3、OH、NO2、SCN、CN、F、Br、NH2CH2CH2NH2、C2O4及びH2Oからなる群から選ばれる少なくとも一種の配位子を含む化合物である上記項1に記載の無電解ニッケルめっき液。
3. 上記項1又は2に記載の無電解ニッケルめっき液に被めっき物を接触させることを特徴とする無電解ニッケルめっき方法。
下記組成の無電解ニッケルめっき浴を調製した。
(本発明めっき浴1)
硫酸ニッケル・6水和物 22.5g/l
次亜リン酸ナトリウム 20g/l
リンゴ酸 10g/l
コハク酸 10g/l
グリシン 0.5g/l
チオジグリコール酸 5mg/l
ヘキサアンミンクロム(II)クロリド 50mg/l
pH 4.6(水酸化ナトリウムで調整)
(本発明めっき浴2)
硫酸ニッケル・6水和物 22.5g/l
次亜リン酸ナトリウム 20g/l
リンゴ酸 10g/l
コハク酸 10g/l
グリシン 0.5g/l
チオジグリコール酸 5mg/l
ヘキサアンミンクロム(III)クロリド 50mg/l
pH 4.6(水酸化ナトリウムで調整)
(本発明めっき浴3)
硫酸ニッケル・6水和物 22.5g/l
次亜リン酸ナトリウム 20g/l
リンゴ酸 10g/l
コハク酸 10g/l
グリシン 0.5g/l
チオジグリコール酸 5mg/l
トリオクサラトマンガン(III)酸ナトリウム 10mg/l
トリオクサラト鉄(III)酸カリウム 50mg/l
pH 4.6(水酸化ナトリウムで調整)
(本発明めっき浴4)
硫酸ニッケル・6水和物 22.5g/l
次亜リン酸ナトリウム 20g/l
リンゴ酸 10g/l
コハク酸 10g/l
グリシン 0.5g/l
チオジグリコール酸 5mg/l
ヘキサアンミンコバルト(III)クロリド 50mg/l
pH 4.6(水酸化ナトリウムで調整)
(本発明めっき浴5)
硫酸ニッケル・6水和物 22.5g/l
次亜リン酸ナトリウム 20g/l
リンゴ酸 10g/l
コハク酸 10g/l
グリシン 0.5g/l
チオジグリコール酸 5mg/l
ヘキサクロロスズ(IV)酸ナトリウム 50mg/l
pH 4.6(水酸化ナトリウムで調整)
(本発明めっき浴6)
硫酸ニッケル・6水和物 22.5g/l
次亜リン酸ナトリウム 20g/l
リンゴ酸 10g/l
コハク酸 10g/l
グリシン 0.5g/l
チオジグリコール酸 5mg/l
ジオクサラト銅(II)酸ナトリウム 50mg/l
pH 4.6(水酸化ナトリウムで調整)
(本発明めっき浴7)
硫酸ニッケル・6水和物 22.5g/l
次亜リン酸ナトリウム 20g/l
リンゴ酸 10g/l
コハク酸 10g/l
グリシン 0.5g/l
チオジグリコール酸 5mg/l
硝酸鉛 0.5mg/l
トリオクサラトマンガン(III)ナトリウム 10mg/l
トリオクサラト鉄(III)カリウム 50mg/l
pH 4.6(水酸化ナトリウムで調整)
(本発明めっき浴8)
硫酸ニッケル・6水和物 22.5g/l
次亜リン酸ナトリウム 20g/l
リンゴ酸 10g/l
コハク酸 10g/l
グリシン 0.5g/l
チオジグリコール酸 5mg/l
硝酸ビスマス 0.5mg/l
ヘキサアンミンコバルト(III)クロリド 50mg/l
pH 4.6(水酸化ナトリウムで調整)
(比較めっき浴1)
硫酸ニッケル・6水和物 22.5g/l
次亜リン酸ナトリウム 20g/l
リンゴ酸 10g/l
コハク酸 10g/l
グリシン 0.5g/l
pH 4.6(水酸化ナトリウムで調整)
(比較めっき浴2)
硫酸ニッケル・6水和物 22.5g/l
次亜リン酸ナトリウム 20g/l
リンゴ酸 10g/l
コハク酸 10g/l
グリシン 0.5g/l
硝酸鉛 0.5mg/l
チオジグリコール酸 5mg/l
pH 4.6(水酸化ナトリウムで調整)
浴温 80℃
(比較めっき浴3)
硫酸ニッケル・6水和物 22.5g/l
次亜リン酸ナトリウム 20g/l
リンゴ酸 10g/l
コハク酸 10g/l
グリシン 0.5g/l
硝酸鉛 0.5mg/l
チオジグリコール酸 5mg/l
硫酸コバルト(II) 50mg/l
pH 4.6
浴温 80℃
(比較めっき浴4)
硫酸ニッケル・6水和物 22.5g/l
次亜リン酸ナトリウム 20g/l
リンゴ酸 10g/l
コハク酸 10g/l
グリシン 0.5g/l
硝酸鉛 0.5mg/l
チオジグリコール酸 5mg/l
硫酸コバルト(III) 50mg/l
pH 4.6
浴温 80℃
(1)脱脂
硫酸を主成分とする酸性脱脂剤(商標名:ICPクリーンS−135、奥野製薬工業(株)製)中に、40℃で3分間浸漬。
(2)ソフトエッチング
過硫酸ナトリウム100g/lと98%硫酸10ml/lを含有する水溶液中に室温で1分間浸漬。
(3)プリディッピング
35%塩酸100ml/lを含有する水溶液中に室温で0.5分間浸漬。
(4)触媒付与
塩化パラジウム及び塩酸を含有する触媒付与液(商標名:ICPアクセラ、奥野製薬工業(製))200ml/l水溶液中に室温で1分間浸漬。
(5)無電解ニッケルめっき
上記した各無電解ニッケルめっき浴(空気撹拌)中に80℃で20分間浸漬。
*めっき拡がり:
配線基板における銅配線パターン部分のニッケルめっきの析出状態を光学顕微鏡(1000倍)で観察した。評価基準は、○:配線パターン外へのめっき拡がり無し、△:配線間の短絡は認められないがスリット部に異常析出(めっき拡がり)が認められる、×:配線間の短絡箇所が認められる、とした。
*微小パッド部への析出性:
CSP基板の微小パッド部(全225個)におけるめっきの析出状態を、拡大鏡を用いた目視観察によって調べた。正常にめっきが析出した微小パッド部分は白色となるのに対して、めっきの全く析出していない未反応部分は赤黒い色調となり、めっき中に反応が停止した反応停止箇所は黒〜灰黒色となることにより判定した。未反応部分と反応停止部分の微小パッド数を下記表1に示す。
*浴安定性:
各めっき液をガラスビーカーに入れ、90℃で2日間放置した後、ビーカー底部の状態を観察した。評価基準は、◎:ビーカー底部において反応ガスの発生無し、○:ビーカー底部において僅かな反応ガスの発生、△:ビーカー底全面から反応ガスが発生、×:ビーカー底および壁面にNi膜形成、とした。
Claims (3)
- (1)水溶性ニッケル塩、(2)還元剤、(3)錯化剤、及び(4)銅、クロム、マンガン、鉄、コバルト及びスズからなる群から選ばれた少なくとも一種を金属成分として含む錯化合物、を含有することを特徴とする無電解ニッケルめっき液。
- 銅、クロム、マンガン、鉄、コバルト及びスズからなる群から選ばれた少なくとも一種を金属成分として含む錯化合物が、Cl、NH3、OH、NO2、SCN、CN、F、Br、NH2CH2CH2NH2、C2O4及びH2Oからなる群から選ばれる少なくとも一種の配位子を含む化合物である請求項1に記載の無電解ニッケルめっき液。
- 請求項1又は2に記載の無電解ニッケルめっき液に被めっき物を接触させることを特徴とする無電解ニッケルめっき方法。
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JP4885954B2 (ja) * | 2007-02-28 | 2012-02-29 | 小島化学薬品株式会社 | 無電解純パラジウムめっき液 |
JP2013536900A (ja) * | 2010-09-03 | 2013-09-26 | オーエムジー エレクトロニク ケミカルズ,エルエルシー | 無電解ニッケル合金めっき浴およびそれを析出させる方法 |
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