JP2005055438A5 - - Google Patents

Download PDF

Info

Publication number
JP2005055438A5
JP2005055438A5 JP2004224295A JP2004224295A JP2005055438A5 JP 2005055438 A5 JP2005055438 A5 JP 2005055438A5 JP 2004224295 A JP2004224295 A JP 2004224295A JP 2004224295 A JP2004224295 A JP 2004224295A JP 2005055438 A5 JP2005055438 A5 JP 2005055438A5
Authority
JP
Japan
Prior art keywords
measuring
measurement
reflection
calibration standard
transmission characteristics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004224295A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005055438A (ja
Filing date
Publication date
Priority claimed from US10/635,395 external-priority patent/US7068049B2/en
Application filed filed Critical
Publication of JP2005055438A publication Critical patent/JP2005055438A/ja
Publication of JP2005055438A5 publication Critical patent/JP2005055438A5/ja
Pending legal-status Critical Current

Links

JP2004224295A 2003-08-05 2004-07-30 改良された直通路・反射路・線路計測較正を用いて試験対象デバイスを計測する方法及び装置 Pending JP2005055438A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/635,395 US7068049B2 (en) 2003-08-05 2003-08-05 Method and apparatus for measuring a device under test using an improved through-reflect-line measurement calibration

Publications (2)

Publication Number Publication Date
JP2005055438A JP2005055438A (ja) 2005-03-03
JP2005055438A5 true JP2005055438A5 (https=) 2007-09-13

Family

ID=34116234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004224295A Pending JP2005055438A (ja) 2003-08-05 2004-07-30 改良された直通路・反射路・線路計測較正を用いて試験対象デバイスを計測する方法及び装置

Country Status (3)

Country Link
US (1) US7068049B2 (https=)
JP (1) JP2005055438A (https=)
DE (1) DE102004034879B4 (https=)

Families Citing this family (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345170A (en) 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US6380751B2 (en) 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US5561377A (en) 1995-04-14 1996-10-01 Cascade Microtech, Inc. System for evaluating probing networks
US6232789B1 (en) * 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6002263A (en) 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US6578264B1 (en) 1999-06-04 2003-06-17 Cascade Microtech, Inc. Method for constructing a membrane probe using a depression
US6445202B1 (en) 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US6838890B2 (en) 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
DE10143173A1 (de) * 2000-12-04 2002-06-06 Cascade Microtech Inc Wafersonde
US7355420B2 (en) 2001-08-21 2008-04-08 Cascade Microtech, Inc. Membrane probing system
US6777964B2 (en) * 2002-01-25 2004-08-17 Cascade Microtech, Inc. Probe station
US7352258B2 (en) * 2002-03-28 2008-04-01 Cascade Microtech, Inc. Waveguide adapter for probe assembly having a detachable bias tee
EP1509776A4 (en) 2002-05-23 2010-08-18 Cascade Microtech Inc PROBE TO TEST ANY TESTING EQUIPMENT
US7019535B2 (en) * 2002-09-16 2006-03-28 Agilent Technologies, Inc. Method and system for calibrating a measurement device path and for measuring a device under test in the calibrated measurement device path
US6847219B1 (en) 2002-11-08 2005-01-25 Cascade Microtech, Inc. Probe station with low noise characteristics
US6724205B1 (en) 2002-11-13 2004-04-20 Cascade Microtech, Inc. Probe for combined signals
US7250779B2 (en) 2002-11-25 2007-07-31 Cascade Microtech, Inc. Probe station with low inductance path
US6861856B2 (en) 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure
US7221172B2 (en) 2003-05-06 2007-05-22 Cascade Microtech, Inc. Switched suspended conductor and connection
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7250626B2 (en) * 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
WO2005065258A2 (en) 2003-12-24 2005-07-21 Cascade Microtech, Inc. Active wafer probe
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
DE202005021434U1 (de) * 2004-06-07 2008-03-20 Cascade Microtech, Inc., Beaverton Thermooptische Einspannvorrichtung
US7330041B2 (en) 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
KR101157449B1 (ko) 2004-07-07 2012-06-22 캐스케이드 마이크로테크 인코포레이티드 멤브레인 서스펜디드 프로브를 구비한 프로브 헤드
KR20070058522A (ko) 2004-09-13 2007-06-08 캐스케이드 마이크로테크 인코포레이티드 양측 프루빙 구조
US7068046B2 (en) * 2004-11-18 2006-06-27 Anritsu Company Calibration techniques for simplified high-frequency multiport differential measurements
US7030625B1 (en) * 2005-01-18 2006-04-18 Agilent Technologies, Inc. Method and apparatus for performing a minimum connection multiport through-reflect-line calibration and measurement
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7656172B2 (en) * 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
DE102005018073B4 (de) * 2005-03-04 2009-03-19 Rohde & Schwarz Gmbh & Co. Kg Vieltor-Kalibriermatrix
US7148702B2 (en) * 2005-03-30 2006-12-12 Agilent Technologies, Inc. VNA and method for addressing transmission line effects in VNA measurement data
US7449899B2 (en) * 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
EP1932003A2 (en) 2005-06-13 2008-06-18 Cascade Microtech, Inc. Wideband active-passive differential signal probe
JP2005321417A (ja) * 2005-08-18 2005-11-17 Agilent Technol Inc テストセットおよび測定システム
US7609077B2 (en) 2006-06-09 2009-10-27 Cascade Microtech, Inc. Differential signal probe with integral balun
US7403028B2 (en) * 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7443186B2 (en) 2006-06-12 2008-10-28 Cascade Microtech, Inc. On-wafer test structures for differential signals
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7532014B2 (en) * 2006-08-08 2009-05-12 Credence Systems Corporation LRL vector calibration to the end of the probe needles for non-standard probe cards for ATE RF testers
US7518378B2 (en) * 2007-02-13 2009-04-14 Keithley Instruments, Inc. Cable compensation for pulsed I-V measurements
DE102007018096A1 (de) 2007-04-17 2008-10-23 Rohde & Schwarz Gmbh & Co. Kg Verfahren zur Ermittlung von Zeitunterschieden zwischen durch zumindest zwei gekoppelte Messgeräte gemessenen Signalen sowie Messsystem und entsprechende Umschaltvorrichtung
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
US7777497B2 (en) * 2008-01-17 2010-08-17 Com Dev International Ltd. Method and system for tracking scattering parameter test system calibration
US7741857B2 (en) * 2008-03-06 2010-06-22 International Business Machines Corporation System and method for de-embedding a device under test employing a parametrized netlist
US8319502B2 (en) * 2008-06-26 2012-11-27 Dune Medical Devices Ltd. RF calibration device and method
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
DE202008013687U1 (de) * 2008-10-15 2009-01-02 Rosenberger Hochfrequenztechnik Gmbh & Co. Kg Messanordnung mit Kalibriersubstrat und elektronischer Schaltung
US8410806B2 (en) 2008-11-21 2013-04-02 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
US8706438B2 (en) * 2010-02-01 2014-04-22 Teledyne Lecroy, Inc. Time domain network analyzer
US20110199107A1 (en) * 2010-02-12 2011-08-18 Ate Systems, Inc. Method and apparatus for calibrating a test system for measuring a device under test
FR2976362B1 (fr) * 2011-06-07 2013-05-24 Tekcem Procede pour evaluer les effets d'une interconnexion sur des variables electriques
TWI470248B (zh) * 2011-06-22 2015-01-21 Wistron Corp 量測待測物散射參數的方法
US8928333B2 (en) * 2011-11-30 2015-01-06 Raytheon Company Calibration measurements for network analyzers
JP6055215B2 (ja) * 2012-06-29 2016-12-27 キーサイト テクノロジーズ, インク. インピーダンス測定方法及び測定装置
DE102013200033B4 (de) * 2012-10-10 2023-06-15 Rohde & Schwarz GmbH & Co. Kommanditgesellschaft Verfahren und System zur Bestimmung von Streuparametern eines frequenzumsetzenden Messobjekts
CN103364752B (zh) * 2013-07-19 2015-12-23 中国电子科技集团公司第十三研究所 一种在片负载牵引测量系统的现场校准方法
CN104734789A (zh) * 2013-12-19 2015-06-24 梅尔根电子有限公司 多端口射频元件的量测方法
CN103995526B (zh) * 2014-04-29 2017-10-31 北京航天发射技术研究所 基于can总线的电源控制器模拟量参数标定系统及方法
US11215655B2 (en) * 2014-10-12 2022-01-04 Compass Technology Group, LLC Correction of transmission line induced phase and amplitude errors in reflectivity measurements
CN104569887B (zh) * 2014-12-22 2018-03-27 大唐移动通信设备有限公司 一种单端口网络校准中的误差获取方法和装置
US9841449B2 (en) * 2015-11-30 2017-12-12 Keysight Technologies, Inc. Apparatus and method for cable phase correction for vector analyzer remote heads
DE102016119562B3 (de) * 2016-10-13 2018-02-15 Friedrich-Alexander-Universität Erlangen-Nürnberg Elektrisches Messsystem zur Frequenzmessung und Erkennung von Störsignalen und Betriebsverfahren hierfür
JP6765104B2 (ja) * 2017-01-31 2020-10-07 国立研究開発法人産業技術総合研究所 電気的中点におけるrfプローブシステムの校正技術
CN107643450B (zh) * 2017-08-31 2019-11-26 中国计量科学研究院 低损低介电材料的测量方法及测量系统
CN107784650A (zh) * 2017-10-30 2018-03-09 湖北坚丰科技股份有限公司 一种用于电机转轴轴承档直径的在线视觉检测方法
US10938490B1 (en) * 2018-10-31 2021-03-02 Christos Tsironis Calibration method for coupler-tuner assembly
US11754606B1 (en) * 2019-06-26 2023-09-12 Anritsu Company System and method for connecting vector network analyzer modules
US11428770B2 (en) * 2020-03-30 2022-08-30 Rohde & Schwarz Gmbh & Co. Kg Method of calibrating a setup
CN112051534B (zh) * 2020-08-31 2023-08-25 中电科思仪科技股份有限公司 一种提高微波网络测量与校准精度的外置式装置及方法
US11668737B2 (en) * 2021-03-10 2023-06-06 Dell Products L.P. Self-calibrating transmission line resonator oscillating driver apparatus

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4816767A (en) * 1984-01-09 1989-03-28 Hewlett-Packard Company Vector network analyzer with integral processor
US4853613A (en) * 1987-10-27 1989-08-01 Martin Marietta Corporation Calibration method for apparatus evaluating microwave/millimeter wave circuits
DE69227056T2 (de) * 1991-03-22 1999-05-12 Nec Corp., Tokio/Tokyo Verfahren zur Fehleranalyse unter Verwendung eines Elektronenstrahles
US5434511A (en) * 1993-05-24 1995-07-18 Atn Microwave, Inc. Electronic microwave calibration device
US5467021A (en) 1993-05-24 1995-11-14 Atn Microwave, Inc. Calibration method and apparatus
DE4401068C2 (de) * 1993-08-30 1997-04-10 Rohde & Schwarz Netzwerkanalysator und Verfahren zum Kalibrieren
US5793213A (en) * 1996-08-01 1998-08-11 Motorola, Inc. Method and apparatus for calibrating a network analyzer
US5825669A (en) * 1996-12-17 1998-10-20 Wiltron Company Method of updating automatic calibration to provide a perceived perfect through connection
US6060888A (en) * 1998-04-24 2000-05-09 Hewlett-Packard Company Error correction method for reflection measurements of reciprocal devices in vector network analyzers
US6300775B1 (en) * 1999-02-02 2001-10-09 Com Dev Limited Scattering parameter calibration system and method
US6614237B2 (en) * 2000-09-18 2003-09-02 Agilent Technologies, Inc. Multiport automatic calibration device for a multiport test system
US6832170B2 (en) * 2002-05-02 2004-12-14 Anritsu Company Methods for embedding and de-embedding using a circulator
US6853198B2 (en) * 2002-11-14 2005-02-08 Agilent Technologies, Inc. Method and apparatus for performing multiport through-reflect-line calibration and measurement

Similar Documents

Publication Publication Date Title
JP2005055438A5 (https=)
TWI470248B (zh) 量測待測物散射參數的方法
US6650123B2 (en) Methods for determining characteristics of interface devices used with vector network analyzers
CN102279376B (zh) 基于10项误差模型的二端口矢量网络分析仪校准方法
US8504315B2 (en) Method for the secondary error correction of a multi-port network analyzer
CN111983539B (zh) 在片s参数测量系统校准方法
JP6499177B2 (ja) 検査装置構成を校正する方法
JP2004251904A5 (https=)
WO2004111768A2 (en) Correcting test system calibration and transforming device measurements when using multiple test fixtures
US20040160228A1 (en) Network analyzer calibration employing reciprocity of a device
JPH11326413A (ja) ネットワ―ク・アナライザにおける測定誤差補正方法
CN103399286A (zh) 一种多特性阻抗网络的测量校准方法
CN101932942B (zh) 测定误差的修正方法及电子元器件特性测定装置
CN112698257B (zh) 矢量网络分析仪硬件指标对测量精度影响的分析方法
CN113849958A (zh) 在片s参数测量系统串扰误差修正方法及电子设备
US20080122451A1 (en) Method for calibration of a vectorial network analyzer having more than two ports
CN107543970A (zh) 一种基于数据库校准方法的介电常数测量方法
CN113821763A (zh) 在片s参数测量系统校准方法及电子设备
US6647357B1 (en) Method for correcting reciprocity error in two port network measurements
US20050256658A1 (en) Multi-port scattering parameter calibration system and method
KR20130117841A (ko) 측정 오차의 보정방법 및 전자부품 특성 측정장치
CN107102284A (zh) 一种基于理想零直通的多端口非插入式精确校准方法
CN111611765A (zh) 夹具去嵌入方法、系统、存储介质、计算机程序及应用
CN107643450B (zh) 低损低介电材料的测量方法及测量系统
US20060161369A1 (en) Method for implementing trl calibration in vna