JP2004535589A5 - - Google Patents

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Publication number
JP2004535589A5
JP2004535589A5 JP2003514583A JP2003514583A JP2004535589A5 JP 2004535589 A5 JP2004535589 A5 JP 2004535589A5 JP 2003514583 A JP2003514583 A JP 2003514583A JP 2003514583 A JP2003514583 A JP 2003514583A JP 2004535589 A5 JP2004535589 A5 JP 2004535589A5
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JP
Japan
Prior art keywords
electrode
capacitive sensor
layer
additive
porous layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003514583A
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English (en)
Japanese (ja)
Other versions
JP4227516B2 (ja
JP2004535589A (ja
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Publication date
Priority claimed from DE10134938A external-priority patent/DE10134938A1/de
Application filed filed Critical
Publication of JP2004535589A publication Critical patent/JP2004535589A/ja
Publication of JP2004535589A5 publication Critical patent/JP2004535589A5/ja
Application granted granted Critical
Publication of JP4227516B2 publication Critical patent/JP4227516B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003514583A 2001-07-18 2002-07-06 容量式センサ並びに容量式センサの製造方法 Expired - Fee Related JP4227516B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10134938A DE10134938A1 (de) 2001-07-18 2001-07-18 Halbleiterbauelement sowie ein Verfahren zur Herstellung des Halbleiterbauelements
PCT/DE2002/002481 WO2003009334A2 (de) 2001-07-18 2002-07-06 Halbleiterbauelement als kapazitiver feuchtesensor, sowie ein verfahren zur herstellung des halbleiterbauelements

Publications (3)

Publication Number Publication Date
JP2004535589A JP2004535589A (ja) 2004-11-25
JP2004535589A5 true JP2004535589A5 (enExample) 2005-12-22
JP4227516B2 JP4227516B2 (ja) 2009-02-18

Family

ID=7692211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003514583A Expired - Fee Related JP4227516B2 (ja) 2001-07-18 2002-07-06 容量式センサ並びに容量式センサの製造方法

Country Status (6)

Country Link
US (1) US7193290B2 (enExample)
EP (1) EP1412732B1 (enExample)
JP (1) JP4227516B2 (enExample)
AT (1) ATE329255T1 (enExample)
DE (2) DE10134938A1 (enExample)
WO (1) WO2003009334A2 (enExample)

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US6931003B2 (en) * 2000-02-09 2005-08-16 Bookline Flolmstead Llc Packet prioritization protocol for a large-scale, high speed computer network
US7110629B2 (en) * 2002-07-22 2006-09-19 Applied Materials, Inc. Optical ready substrates
WO2004106987A2 (en) * 2003-05-29 2004-12-09 Applied Materials, Inc. Impurity-based waveguide detectors
US7075165B2 (en) * 2003-05-29 2006-07-11 Applied Material, Inc. Embedded waveguide detectors
US7205624B2 (en) * 2003-10-07 2007-04-17 Applied Materials, Inc. Self-aligned implanted waveguide detector
US7368312B1 (en) * 2004-10-15 2008-05-06 Morgan Research Corporation MEMS sensor suite on a chip
ITMO20050159A1 (it) * 2005-06-22 2006-12-23 Angelo Grandi Cucine Societa P Sistema per il controllo dell'umidita'.
WO2007027615A1 (en) * 2005-09-01 2007-03-08 Applied Materials, Inc. Ridge technique for fabricating an optical detector and an optical waveguide
JP5005702B2 (ja) * 2005-11-17 2012-08-22 エヌエックスピー ビー ヴィ 湿度センサー
US7710128B2 (en) * 2006-09-09 2010-05-04 Honeywell International Inc. Method and apparatus for controlling the sensitivity and value of a capacitive humidity sensor
DE202008003354U1 (de) 2008-03-09 2008-05-15 Hidde, Axel R., Dr. Ing. Leckageüberwachung bei zylindrischen Anordnungen
KR101093612B1 (ko) 2008-11-12 2011-12-15 전자부품연구원 정전용량형 습도센서 및 그 제조방법
EP2336757B1 (en) * 2009-12-07 2018-09-19 ams international AG Integrated circuit with water presence detection arrangement and manufacturing method therefor
CN103119429B (zh) * 2010-05-06 2016-01-20 首尔大学校产学协力团 电容性元件传感器及其制造方法
EP2693207A1 (en) * 2012-07-30 2014-02-05 Nxp B.V. Integrated circuit comprising a capacitive gas sensor
DE102012108997A1 (de) * 2012-09-24 2014-03-27 Heinrich-Heine-Universität Düsseldorf Sensoranordnung und Verfahren zum Herstellen einer Sensoranordnung
US8815054B2 (en) 2012-10-05 2014-08-26 The Procter & Gamble Company Methods for making fibrous paper structures utilizing waterborne shape memory polymers
US9588073B2 (en) 2012-12-19 2017-03-07 Robert Bosch Gmbh Resistive MEMS humidity sensor
EP2988122B1 (en) * 2014-08-20 2019-04-24 ams international AG Capacitive sensor
TWI601954B (zh) * 2016-09-09 2017-10-11 長庚大學 電容式感濕元件及其使用方法
KR102007446B1 (ko) * 2018-05-21 2019-10-21 해성디에스 주식회사 센서 유닛, 이를 포함하는 온도 센서, 센서 유닛의 제조방법 및 이를 이용하여 제조된 온도 센서
DE102018215018A1 (de) * 2018-09-04 2020-03-05 Infineon Technologies Ag Feuchtigkeitssensor
CN116854027A (zh) * 2023-06-21 2023-10-10 北京大学 体硅内空腔结构及其制备方法

Family Cites Families (9)

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Publication number Priority date Publication date Assignee Title
US4057823A (en) 1976-07-02 1977-11-08 International Business Machines Corporation Porous silicon dioxide moisture sensor and method for manufacture of a moisture sensor
US4277742A (en) * 1977-01-31 1981-07-07 Panametrics, Inc. Absolute humidity sensors and methods of manufacturing humidity sensors
US4347550A (en) * 1977-12-22 1982-08-31 Peter Rockliff Sensor detector element for an electrical hygrometer
GB2043908A (en) * 1979-03-09 1980-10-08 Moisture Control & Mesurement Humidity Sensor Element
US4356150A (en) * 1981-05-15 1982-10-26 Honeywell Inc. Humidity sensor with electrical rejection of contaminants
US4795968A (en) * 1986-06-30 1989-01-03 Sri International Gas detection method and apparatus using chemisorption and/or physisorption
US5332697A (en) * 1989-05-31 1994-07-26 Smith Rosemary L Formation of silicon nitride by nitridation of porous silicon
GB9306594D0 (en) * 1993-03-30 1993-05-26 Univ Keele Sensor
US6202471B1 (en) * 1997-10-10 2001-03-20 Nanomaterials Research Corporation Low-cost multilaminate sensors

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