ATE329255T1 - Halbleiterbauelement als kapazitiver feuchtesensor, sowie ein verfahren zur herstellung des halbleiterbauelements - Google Patents

Halbleiterbauelement als kapazitiver feuchtesensor, sowie ein verfahren zur herstellung des halbleiterbauelements

Info

Publication number
ATE329255T1
ATE329255T1 AT02754323T AT02754323T ATE329255T1 AT E329255 T1 ATE329255 T1 AT E329255T1 AT 02754323 T AT02754323 T AT 02754323T AT 02754323 T AT02754323 T AT 02754323T AT E329255 T1 ATE329255 T1 AT E329255T1
Authority
AT
Austria
Prior art keywords
semiconductor component
producing
humidity sensor
capacitive humidity
electrode
Prior art date
Application number
AT02754323T
Other languages
German (de)
English (en)
Inventor
Hubert Benzel
Heribert Weber
Frank Schaefer
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Application granted granted Critical
Publication of ATE329255T1 publication Critical patent/ATE329255T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
AT02754323T 2001-07-18 2002-07-06 Halbleiterbauelement als kapazitiver feuchtesensor, sowie ein verfahren zur herstellung des halbleiterbauelements ATE329255T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10134938A DE10134938A1 (de) 2001-07-18 2001-07-18 Halbleiterbauelement sowie ein Verfahren zur Herstellung des Halbleiterbauelements

Publications (1)

Publication Number Publication Date
ATE329255T1 true ATE329255T1 (de) 2006-06-15

Family

ID=7692211

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02754323T ATE329255T1 (de) 2001-07-18 2002-07-06 Halbleiterbauelement als kapazitiver feuchtesensor, sowie ein verfahren zur herstellung des halbleiterbauelements

Country Status (6)

Country Link
US (1) US7193290B2 (enExample)
EP (1) EP1412732B1 (enExample)
JP (1) JP4227516B2 (enExample)
AT (1) ATE329255T1 (enExample)
DE (2) DE10134938A1 (enExample)
WO (1) WO2003009334A2 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6931003B2 (en) * 2000-02-09 2005-08-16 Bookline Flolmstead Llc Packet prioritization protocol for a large-scale, high speed computer network
US7110629B2 (en) * 2002-07-22 2006-09-19 Applied Materials, Inc. Optical ready substrates
KR20060033721A (ko) * 2003-05-29 2006-04-19 어플라이드 머티어리얼스, 인코포레이티드 내장형 도파관 검출기
CN1795592A (zh) * 2003-05-29 2006-06-28 应用材料股份有限公司 掺杂质基底的波导检测器
US7205624B2 (en) * 2003-10-07 2007-04-17 Applied Materials, Inc. Self-aligned implanted waveguide detector
US7368312B1 (en) * 2004-10-15 2008-05-06 Morgan Research Corporation MEMS sensor suite on a chip
ITMO20050159A1 (it) * 2005-06-22 2006-12-23 Angelo Grandi Cucine Societa P Sistema per il controllo dell'umidita'.
WO2007027615A1 (en) * 2005-09-01 2007-03-08 Applied Materials, Inc. Ridge technique for fabricating an optical detector and an optical waveguide
WO2007057794A1 (en) * 2005-11-17 2007-05-24 Nxp B.V. Moisture sensor
US7710128B2 (en) * 2006-09-09 2010-05-04 Honeywell International Inc. Method and apparatus for controlling the sensitivity and value of a capacitive humidity sensor
DE202008003354U1 (de) 2008-03-09 2008-05-15 Hidde, Axel R., Dr. Ing. Leckageüberwachung bei zylindrischen Anordnungen
KR101093612B1 (ko) 2008-11-12 2011-12-15 전자부품연구원 정전용량형 습도센서 및 그 제조방법
EP2336757B1 (en) * 2009-12-07 2018-09-19 ams international AG Integrated circuit with water presence detection arrangement and manufacturing method therefor
CN103119429B (zh) * 2010-05-06 2016-01-20 首尔大学校产学协力团 电容性元件传感器及其制造方法
EP2693207A1 (en) * 2012-07-30 2014-02-05 Nxp B.V. Integrated circuit comprising a capacitive gas sensor
DE102012108997A1 (de) * 2012-09-24 2014-03-27 Heinrich-Heine-Universität Düsseldorf Sensoranordnung und Verfahren zum Herstellen einer Sensoranordnung
US8815054B2 (en) 2012-10-05 2014-08-26 The Procter & Gamble Company Methods for making fibrous paper structures utilizing waterborne shape memory polymers
US9588073B2 (en) 2012-12-19 2017-03-07 Robert Bosch Gmbh Resistive MEMS humidity sensor
EP2988122B1 (en) 2014-08-20 2019-04-24 ams international AG Capacitive sensor
TWI601954B (zh) * 2016-09-09 2017-10-11 長庚大學 電容式感濕元件及其使用方法
KR102007446B1 (ko) * 2018-05-21 2019-10-21 해성디에스 주식회사 센서 유닛, 이를 포함하는 온도 센서, 센서 유닛의 제조방법 및 이를 이용하여 제조된 온도 센서
DE102018215018A1 (de) 2018-09-04 2020-03-05 Infineon Technologies Ag Feuchtigkeitssensor
CN116854027A (zh) * 2023-06-21 2023-10-10 北京大学 体硅内空腔结构及其制备方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4057823A (en) * 1976-07-02 1977-11-08 International Business Machines Corporation Porous silicon dioxide moisture sensor and method for manufacture of a moisture sensor
US4277742A (en) * 1977-01-31 1981-07-07 Panametrics, Inc. Absolute humidity sensors and methods of manufacturing humidity sensors
US4347550A (en) * 1977-12-22 1982-08-31 Peter Rockliff Sensor detector element for an electrical hygrometer
GB2043908A (en) * 1979-03-09 1980-10-08 Moisture Control & Mesurement Humidity Sensor Element
US4356150A (en) * 1981-05-15 1982-10-26 Honeywell Inc. Humidity sensor with electrical rejection of contaminants
US4795968A (en) * 1986-06-30 1989-01-03 Sri International Gas detection method and apparatus using chemisorption and/or physisorption
US5332697A (en) * 1989-05-31 1994-07-26 Smith Rosemary L Formation of silicon nitride by nitridation of porous silicon
GB9306594D0 (en) * 1993-03-30 1993-05-26 Univ Keele Sensor
US6202471B1 (en) * 1997-10-10 2001-03-20 Nanomaterials Research Corporation Low-cost multilaminate sensors

Also Published As

Publication number Publication date
US7193290B2 (en) 2007-03-20
JP4227516B2 (ja) 2009-02-18
US20040155751A1 (en) 2004-08-12
EP1412732A2 (de) 2004-04-28
JP2004535589A (ja) 2004-11-25
DE10134938A1 (de) 2003-02-06
WO2003009334A3 (de) 2003-08-28
DE50207120D1 (de) 2006-07-20
WO2003009334A2 (de) 2003-01-30
EP1412732B1 (de) 2006-06-07

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Legal Events

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REN Ceased due to non-payment of the annual fee