JP2004527881A - 改良されたプラズマランプ及び方法 - Google Patents
改良されたプラズマランプ及び方法 Download PDFInfo
- Publication number
- JP2004527881A JP2004527881A JP2002580365A JP2002580365A JP2004527881A JP 2004527881 A JP2004527881 A JP 2004527881A JP 2002580365 A JP2002580365 A JP 2002580365A JP 2002580365 A JP2002580365 A JP 2002580365A JP 2004527881 A JP2004527881 A JP 2004527881A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- lamp
- filter
- coating
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 56
- 229910001507 metal halide Inorganic materials 0.000 claims abstract description 26
- 150000005309 metal halides Chemical class 0.000 claims abstract description 19
- 239000000463 material Substances 0.000 claims abstract description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 14
- -1 sodium scandium metal halide Chemical class 0.000 claims abstract description 14
- 230000002596 correlated effect Effects 0.000 claims abstract description 4
- 238000009877 rendering Methods 0.000 claims abstract description 4
- 238000000576 coating method Methods 0.000 claims description 91
- 239000011248 coating agent Substances 0.000 claims description 83
- 230000003595 spectral effect Effects 0.000 claims description 43
- 238000001429 visible spectrum Methods 0.000 claims description 22
- 238000010521 absorption reaction Methods 0.000 claims description 18
- 238000009826 distribution Methods 0.000 claims description 16
- 239000010409 thin film Substances 0.000 claims description 15
- 239000000945 filler Substances 0.000 claims description 13
- 238000009501 film coating Methods 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 9
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 8
- 238000002310 reflectometry Methods 0.000 claims description 8
- 229910052706 scandium Inorganic materials 0.000 claims description 8
- 229910052708 sodium Inorganic materials 0.000 claims description 8
- 239000011734 sodium Substances 0.000 claims description 8
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims description 6
- 150000004820 halides Chemical class 0.000 claims description 5
- 230000005855 radiation Effects 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 3
- 230000000704 physical effect Effects 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- 229910052726 zirconium Inorganic materials 0.000 claims description 3
- 229910052776 Thorium Inorganic materials 0.000 claims description 2
- 238000001914 filtration Methods 0.000 claims 5
- 238000001704 evaporation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 abstract description 15
- 229910052753 mercury Inorganic materials 0.000 abstract description 15
- 239000010453 quartz Substances 0.000 abstract description 4
- 230000005540 biological transmission Effects 0.000 description 8
- JNXCLGBJTVLDAI-UHFFFAOYSA-N [Sc].[Na] Chemical compound [Sc].[Na] JNXCLGBJTVLDAI-UHFFFAOYSA-N 0.000 description 7
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000295 emission spectrum Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 235000011449 Rosa Nutrition 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000313 electron-beam-induced deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007737 ion beam deposition Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/38—Devices for influencing the colour or wavelength of the light
- H01J61/40—Devices for influencing the colour or wavelength of the light by light filters; by coloured coatings in or on the envelope
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
- H01J61/827—Metal halide arc lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/245—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps
- H01J9/247—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps specially adapted for gas-discharge lamps
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Discharge Lamp (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US27968501P | 2001-03-30 | 2001-03-30 | |
| PCT/US2002/009979 WO2002082490A1 (en) | 2001-03-30 | 2002-04-01 | An improved plasma lamp and method |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005102440A Division JP2005285775A (ja) | 2001-03-30 | 2005-03-31 | 改良されたプラズマランプ及び方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004527881A true JP2004527881A (ja) | 2004-09-09 |
| JP2004527881A5 JP2004527881A5 (enExample) | 2005-12-22 |
Family
ID=23070007
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002580365A Pending JP2004527881A (ja) | 2001-03-30 | 2002-04-01 | 改良されたプラズマランプ及び方法 |
| JP2005102440A Pending JP2005285775A (ja) | 2001-03-30 | 2005-03-31 | 改良されたプラズマランプ及び方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005102440A Pending JP2005285775A (ja) | 2001-03-30 | 2005-03-31 | 改良されたプラズマランプ及び方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US6897609B2 (enExample) |
| EP (1) | EP1384245A4 (enExample) |
| JP (2) | JP2004527881A (enExample) |
| WO (1) | WO2002082490A1 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004088698A2 (en) * | 2003-02-12 | 2004-10-14 | Advanced Lighting Technologies, Inc. | An improved plasma lamp and method |
| CN101027747A (zh) * | 2003-05-12 | 2007-08-29 | 皇家飞利浦电子股份有限公司 | 高压放电灯 |
| US20060202598A1 (en) * | 2003-07-22 | 2006-09-14 | Koninklijke Philips Electronics N.V. | High-pressure discharge lamp |
| KR20070001882A (ko) * | 2003-11-25 | 2007-01-04 | 코닌클리즈케 필립스 일렉트로닉스 엔.브이. | 전기 램프 |
| US9354370B1 (en) * | 2007-09-25 | 2016-05-31 | Semrock, Inc. | Optical thin-film notch filter with very wide pass band regions |
| PT2387065E (pt) | 2010-05-13 | 2015-12-07 | Flowil Int Lighting | Uma lâmpada de descarga de alta intensidade para regeneração de colagénio na pele |
| US9927094B2 (en) * | 2012-01-17 | 2018-03-27 | Kla-Tencor Corporation | Plasma cell for providing VUV filtering in a laser-sustained plasma light source |
| US9530636B2 (en) * | 2014-03-20 | 2016-12-27 | Kla-Tencor Corporation | Light source with nanostructured antireflection layer |
Family Cites Families (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3234421A (en) * | 1961-01-23 | 1966-02-08 | Gen Electric | Metallic halide electric discharge lamps |
| DE2519377A1 (de) * | 1975-04-30 | 1976-11-11 | Patra Patent Treuhand | Quecksilberdampf-hochdruckentladungslampe |
| US4792716A (en) * | 1981-10-29 | 1988-12-20 | Duro-Test Corporation | Energy-efficient electric discharge lamp with reflective coating |
| US4709184A (en) * | 1984-08-20 | 1987-11-24 | Gte Products Corporation | Low wattage metal halide lamp |
| US5059865A (en) * | 1988-02-18 | 1991-10-22 | General Electric Company | Xenon-metal halide lamp particularly suited for automotive applications |
| DE3813421A1 (de) * | 1988-04-21 | 1989-11-02 | Philips Patentverwaltung | Hochdruck-quecksilberdampfentladungslampe |
| CA2017471C (en) * | 1989-07-19 | 2000-10-24 | Matthew Eric Krisl | Optical interference coatings and lamps using same |
| US5039912A (en) * | 1989-09-08 | 1991-08-13 | U.S. Philips Corporation | High-pressure discharge lamp |
| US5220237A (en) * | 1990-05-31 | 1993-06-15 | Iwasaki Electric Co., Ltd. | Metal halide lamp apparatus |
| JP2768074B2 (ja) * | 1991-09-09 | 1998-06-25 | 日産自動車株式会社 | 灯 具 |
| DE4132530A1 (de) * | 1991-09-30 | 1993-04-01 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Hochdruckentladungslampe kleiner leistung |
| US5471110A (en) * | 1991-12-23 | 1995-11-28 | Philips Electronics North America Corporation | High pressure discharge lamp having filament electrodes |
| US6020676A (en) * | 1992-04-13 | 2000-02-01 | Fusion Lighting, Inc. | Lamp with light reflection back into bulb |
| JP3367167B2 (ja) * | 1993-10-26 | 2003-01-14 | 株式会社ニコン | 照明光学装置、該装置に使用される放電ランプ、及び露光装置 |
| US5666017A (en) * | 1994-03-22 | 1997-09-09 | Tailored Lighting Inc. | Daylight lamp |
| CN1069148C (zh) * | 1994-04-13 | 2001-08-01 | 皇家菲利浦电子有限公司 | 高压金属卤化物灯 |
| DE69514710T2 (de) * | 1994-05-12 | 2000-09-28 | Iwasaki Electric Co., Ltd. | Metallhalogenidlampe |
| JPH08185828A (ja) * | 1994-12-27 | 1996-07-16 | Matsushita Electric Ind Co Ltd | 照明ランプおよび照明器具 |
| US5552671A (en) * | 1995-02-14 | 1996-09-03 | General Electric Company | UV Radiation-absorbing coatings and their use in lamps |
| US5610469A (en) * | 1995-03-16 | 1997-03-11 | General Electric Company | Electric lamp with ellipsoidal shroud |
| US5849162A (en) * | 1995-04-25 | 1998-12-15 | Deposition Sciences, Inc. | Sputtering device and method for reactive for reactive sputtering |
| US6005346A (en) * | 1996-04-08 | 1999-12-21 | Ilc Technology, Inc. | Trichrominance metal halide lamp for use with twisted nematic subtractive color light valves |
| US5694002A (en) * | 1996-05-08 | 1997-12-02 | Osram Sylvania Inc. | Metal halide lamp with improved color characteristics |
| WO1998000669A1 (en) * | 1996-06-28 | 1998-01-08 | Bausch & Lomb Incorporated | A system for extending the useful life of colored gels |
| US6005332A (en) * | 1996-12-20 | 1999-12-21 | Fusion Lighting, Inc. | Polarized light producing lamp apparatus that uses low temperature polarizing film |
| US6833675B2 (en) * | 1998-05-12 | 2004-12-21 | Musco Corporation | Method and apparatus of blocking ultraviolet radiation from arc tubes |
| WO2000016365A1 (en) * | 1998-09-17 | 2000-03-23 | Fusion Lighting, Inc. | Lamp with improved dichroic reflector |
| US6229252B1 (en) * | 1999-01-21 | 2001-05-08 | Asahi Glass Company, Limited | Dye combinations for multiple bandpass filters for video displays |
| US6605888B1 (en) * | 1999-10-26 | 2003-08-12 | Matsushita Electric Works, Ltd. | Metal halide lamp with enhanced red emission, in excess of a blackbody |
| US6498433B1 (en) * | 1999-12-30 | 2002-12-24 | General Electric Company | High temperature glaze for metal halide arctubes |
| US6600254B2 (en) * | 2000-12-27 | 2003-07-29 | Koninklijke Philips Electronics N.V. | Quartz metal halide lamps with high lumen output |
-
2002
- 2002-04-01 EP EP02736527A patent/EP1384245A4/en not_active Withdrawn
- 2002-04-01 US US10/112,024 patent/US6897609B2/en not_active Expired - Fee Related
- 2002-04-01 JP JP2002580365A patent/JP2004527881A/ja active Pending
- 2002-04-01 WO PCT/US2002/009979 patent/WO2002082490A1/en not_active Ceased
-
2005
- 2005-03-31 JP JP2005102440A patent/JP2005285775A/ja active Pending
- 2005-04-26 US US11/113,977 patent/US7396271B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP1384245A4 (en) | 2005-03-16 |
| EP1384245A1 (en) | 2004-01-28 |
| US20020195943A1 (en) | 2002-12-26 |
| US7396271B2 (en) | 2008-07-08 |
| JP2005285775A (ja) | 2005-10-13 |
| US20050194907A1 (en) | 2005-09-08 |
| WO2002082490A1 (en) | 2002-10-17 |
| US6897609B2 (en) | 2005-05-24 |
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