JP2004519541A5 - - Google Patents

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Publication number
JP2004519541A5
JP2004519541A5 JP2002570012A JP2002570012A JP2004519541A5 JP 2004519541 A5 JP2004519541 A5 JP 2004519541A5 JP 2002570012 A JP2002570012 A JP 2002570012A JP 2002570012 A JP2002570012 A JP 2002570012A JP 2004519541 A5 JP2004519541 A5 JP 2004519541A5
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JP
Japan
Prior art keywords
group
isocyanates
polymer
independently
moiety
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002570012A
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English (en)
Japanese (ja)
Other versions
JP4259871B2 (ja
JP2004519541A (ja
Filing date
Publication date
Priority claimed from US09/798,178 external-priority patent/US6576408B2/en
Application filed filed Critical
Publication of JP2004519541A publication Critical patent/JP2004519541A/ja
Publication of JP2004519541A5 publication Critical patent/JP2004519541A5/ja
Application granted granted Critical
Publication of JP4259871B2 publication Critical patent/JP4259871B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002570012A 2001-03-02 2002-02-22 ヒドロキシプロピルセルロースのアリールウレタン類を含む熱硬化性の反射防止コーティング Expired - Fee Related JP4259871B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/798,178 US6576408B2 (en) 1998-04-29 2001-03-02 Thermosetting anti-reflective coatings comprising aryl urethanes of hydroxypropyl cellulose
PCT/US2002/005658 WO2002071155A1 (en) 2001-03-02 2002-02-22 Thermosetting anti-reflective coatings comprising aryl urethanes of hydroxypropyl cellulose

Publications (3)

Publication Number Publication Date
JP2004519541A JP2004519541A (ja) 2004-07-02
JP2004519541A5 true JP2004519541A5 (enExample) 2009-01-29
JP4259871B2 JP4259871B2 (ja) 2009-04-30

Family

ID=25172722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002570012A Expired - Fee Related JP4259871B2 (ja) 2001-03-02 2002-02-22 ヒドロキシプロピルセルロースのアリールウレタン類を含む熱硬化性の反射防止コーティング

Country Status (5)

Country Link
US (1) US6576408B2 (enExample)
EP (1) EP1370910A4 (enExample)
JP (1) JP4259871B2 (enExample)
KR (1) KR100891046B1 (enExample)
WO (1) WO2002071155A1 (enExample)

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US6824879B2 (en) 1999-06-10 2004-11-30 Honeywell International Inc. Spin-on-glass anti-reflective coatings for photolithography
KR100804873B1 (ko) 1999-06-10 2008-02-20 얼라이드시그날 인코퍼레이티드 포토리소그래피용 ｓｏｇ 반사방지 코팅
US7132219B2 (en) * 2001-02-02 2006-11-07 Brewer Science Inc. Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition
KR20040066124A (ko) 2001-11-15 2004-07-23 허니웰 인터내셔널 인코포레이티드 포토리소그라피용 스핀온 반사 방지 피막
TWI360726B (en) 2003-10-30 2012-03-21 Nissan Chemical Ind Ltd Sublayer coating-forming composition containing de
US8053159B2 (en) 2003-11-18 2011-11-08 Honeywell International Inc. Antireflective coatings for via fill and photolithography applications and methods of preparation thereof
US7939131B2 (en) 2004-08-16 2011-05-10 Molecular Imprints, Inc. Method to provide a layer with uniform etch characteristics
WO2006049046A1 (ja) 2004-11-01 2006-05-11 Nissan Chemical Industries, Ltd. シクロデキストリン化合物を含有するリソグラフィー用下層膜形成組成物
JP4832955B2 (ja) * 2005-06-07 2011-12-07 信越化学工業株式会社 レジスト下層膜材料並びにそれを用いたパターン形成方法
US8642246B2 (en) 2007-02-26 2014-02-04 Honeywell International Inc. Compositions, coatings and films for tri-layer patterning applications and methods of preparation thereof
US8557877B2 (en) 2009-06-10 2013-10-15 Honeywell International Inc. Anti-reflective coatings for optically transparent substrates
US8864898B2 (en) 2011-05-31 2014-10-21 Honeywell International Inc. Coating formulations for optical elements
KR101562094B1 (ko) * 2012-12-28 2015-10-20 제일모직주식회사 셀룰로오스계 수지 및 그 제조방법
JP6395356B2 (ja) * 2013-08-30 2018-09-26 国立大学法人 大分大学 液晶性を備えたセルロース誘導体、及び、液晶性を備えたセルロース誘導体の製造方法、並びに、同セルロース誘導体を含有する樹脂材料
US10544329B2 (en) 2015-04-13 2020-01-28 Honeywell International Inc. Polysiloxane formulations and coatings for optoelectronic applications
CN110183698B (zh) * 2019-06-28 2021-11-16 陕西科技大学 一种hec/cnc/聚多异氰酸酯复合膜及其制备方法和应用
CN111171162B (zh) * 2020-01-13 2020-12-04 福建农林大学 一种纤维素电子传输聚合物及其制备方法和应用

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KR100281903B1 (ko) * 1998-12-24 2001-03-02 윤종용 백본이 환상 구조를가지는 감광성 폴리머 및 이를 포함하는 레지스트 조성물

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