JP2004319476A - ポリマー・スイッチおよびポリマー・スイッチの製造方法 - Google Patents
ポリマー・スイッチおよびポリマー・スイッチの製造方法 Download PDFInfo
- Publication number
- JP2004319476A JP2004319476A JP2004112425A JP2004112425A JP2004319476A JP 2004319476 A JP2004319476 A JP 2004319476A JP 2004112425 A JP2004112425 A JP 2004112425A JP 2004112425 A JP2004112425 A JP 2004112425A JP 2004319476 A JP2004319476 A JP 2004319476A
- Authority
- JP
- Japan
- Prior art keywords
- switch
- heater
- liquid metal
- polymer
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H29/00—Switches having at least one liquid contact
- H01H29/28—Switches having at least one liquid contact with level of surface of contact liquid displaced by fluid pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H11/00—Apparatus or processes specially adapted for the manufacture of electric switches
- H01H11/02—Apparatus or processes specially adapted for the manufacture of electric switches for mercury switches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H29/00—Switches having at least one liquid contact
- H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Contacts (AREA)
- Micromachines (AREA)
- Push-Button Switches (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
【解決手段】ポリマー・スイッチは、スイッチ基板(120)と、チャネル支持板(102)と、前記チャネル支持板(102)と前記スイッチ基板(120)との間に固定されたポリマー層(104)と、前記ポリマー層(104)内に形成されたスイッチング・チャネル(106)と、第1及び第2の電気コネクタ(510、132)と、前記スイッチング・チャネル(106)内に備えられ、前記第1及び第2の電気コネクタ(510、132)間で電気回路を形成または切断する液体金属スイッチとを具備する。
【選択図】図2
Description
104 ポリマー層
106 スイッチング・チャネル
114 第1のはんだリング
126 第2のはんだリング
128 気密封止(はんだ接合部)
130 中間コンタクト・パッド
132 第2の電気コネクタ
302 第1のヒーター空洞
304 第1のヒーター
314 低熱伝導率を持つパッド、ポリマー層
402 チャネル構造
404 第2のヒーター空洞
502 第1の外部コンタクト・パッド
504 第2の外部コンタクト・パッド
506 第2の液体金属塊
508 第1の液体金属塊
510 第1の電気コネクタ
512 第3の電気コネクタ
702 第2のヒーター
Claims (1)
- スイッチ基板と、
チャネル支持板と、
前記チャネル支持板と前記スイッチ基板との間に固定されたポリマー層と、
前記ポリマー層内に形成されたスイッチング・チャネルと、
第1、第2の電気コネクタと、
前記スイッチング・チャネル内に備えられ、前記第1、第2の電気コネクタ間の電気回路を形成、或いは切断する液体金属スイッチと、
を具備したポリマー・スイッチ。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/413,094 US6743991B1 (en) | 2003-04-14 | 2003-04-14 | Polymeric liquid metal switch |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004319476A true JP2004319476A (ja) | 2004-11-11 |
JP2004319476A5 JP2004319476A5 (ja) | 2007-04-05 |
Family
ID=32298258
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004112425A Pending JP2004319476A (ja) | 2003-04-14 | 2004-04-06 | ポリマー・スイッチおよびポリマー・スイッチの製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US6743991B1 (ja) |
JP (1) | JP2004319476A (ja) |
DE (1) | DE10360994A1 (ja) |
GB (1) | GB2400735B (ja) |
TW (1) | TW200425197A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007042636A (ja) * | 2005-08-01 | 2007-02-15 | Avago Technologies Ecbu Ip (Singapore) Pte Ltd | 流体スイッチ及びその製造方法 |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004079288A (ja) * | 2002-08-13 | 2004-03-11 | Agilent Technol Inc | 液体金属を用いた電気接点開閉装置 |
US6888977B2 (en) * | 2003-04-14 | 2005-05-03 | Agilent Technologies, Inc. | Polymeric liquid metal optical switch |
US6798937B1 (en) * | 2003-04-14 | 2004-09-28 | Agilent Technologies, Inc. | Pressure actuated solid slug optical latching relay |
US7189934B2 (en) * | 2003-11-13 | 2007-03-13 | Honeywell International Inc. | Self-healing liquid contact switch |
US6822176B1 (en) * | 2004-04-16 | 2004-11-23 | Agilent Technologies, Inc. | Liquid metal switch and method of manufacture therefor |
US7164090B2 (en) * | 2005-02-28 | 2007-01-16 | Agilent Technologies, Inc. | Liquid metal switch employing a single volume of liquid metal |
US20060211233A1 (en) * | 2005-03-21 | 2006-09-21 | Skyworks Solutions, Inc. | Method for fabricating a wafer level package having through wafer vias for external package connectivity and related structure |
US7576426B2 (en) * | 2005-04-01 | 2009-08-18 | Skyworks Solutions, Inc. | Wafer level package including a device wafer integrated with a passive component |
US20060289607A1 (en) * | 2005-06-28 | 2006-12-28 | Buchwalter Stephen L | Composite solder transfer moldplate structure and method of making same |
US7358452B2 (en) * | 2005-06-30 | 2008-04-15 | Agilent Technlolgies, Inc. | Architecture and method of fabrication for a liquid metal microswitch (LIMMS) |
US7358833B2 (en) * | 2006-03-14 | 2008-04-15 | Lucent Technologies Inc. | Method and apparatus for signal processing using electrowetting |
US7449649B2 (en) * | 2006-05-23 | 2008-11-11 | Lucent Technologies Inc. | Liquid switch |
US7635606B2 (en) * | 2006-08-02 | 2009-12-22 | Skyworks Solutions, Inc. | Wafer level package with cavities for active devices |
US20080217708A1 (en) * | 2007-03-09 | 2008-09-11 | Skyworks Solutions, Inc. | Integrated passive cap in a system-in-package |
US20090001576A1 (en) * | 2007-06-29 | 2009-01-01 | Surinder Tuli | Interconnect using liquid metal |
US8324728B2 (en) * | 2007-11-30 | 2012-12-04 | Skyworks Solutions, Inc. | Wafer level packaging using flip chip mounting |
US8900931B2 (en) * | 2007-12-26 | 2014-12-02 | Skyworks Solutions, Inc. | In-situ cavity integrated circuit package |
US7939945B2 (en) | 2008-04-30 | 2011-05-10 | Intel Corporation | Electrically conductive fluid interconnects for integrated circuit devices |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR0174871B1 (ko) | 1995-12-13 | 1999-02-01 | 양승택 | 랫칭형 열구동 마이크로 릴레이 소자 |
US6323447B1 (en) | 1998-12-30 | 2001-11-27 | Agilent Technologies, Inc. | Electrical contact breaker switch, integrated electrical contact breaker switch, and electrical contact switching method |
US6373356B1 (en) | 1999-05-21 | 2002-04-16 | Interscience, Inc. | Microelectromechanical liquid metal current carrying system, apparatus and method |
US6512322B1 (en) | 2001-10-31 | 2003-01-28 | Agilent Technologies, Inc. | Longitudinal piezoelectric latching relay |
US6515404B1 (en) | 2002-02-14 | 2003-02-04 | Agilent Technologies, Inc. | Bending piezoelectrically actuated liquid metal switch |
-
2003
- 2003-04-14 US US10/413,094 patent/US6743991B1/en not_active Expired - Fee Related
- 2003-10-28 TW TW092129941A patent/TW200425197A/zh unknown
- 2003-12-23 DE DE10360994A patent/DE10360994A1/de not_active Withdrawn
-
2004
- 2004-03-30 GB GB0407165A patent/GB2400735B/en not_active Expired - Fee Related
- 2004-04-06 JP JP2004112425A patent/JP2004319476A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007042636A (ja) * | 2005-08-01 | 2007-02-15 | Avago Technologies Ecbu Ip (Singapore) Pte Ltd | 流体スイッチ及びその製造方法 |
JP4701136B2 (ja) * | 2005-08-01 | 2011-06-15 | アバゴ・テクノロジーズ・イーシービーユー・アイピー(シンガポール)プライベート・リミテッド | 流体スイッチ及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
GB2400735B (en) | 2006-05-24 |
US6743991B1 (en) | 2004-06-01 |
DE10360994A1 (de) | 2004-11-25 |
GB2400735A (en) | 2004-10-20 |
GB0407165D0 (en) | 2004-05-05 |
TW200425197A (en) | 2004-11-16 |
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