JP2004260153A5 - - Google Patents
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- Publication number
- JP2004260153A5 JP2004260153A5 JP2004028144A JP2004028144A JP2004260153A5 JP 2004260153 A5 JP2004260153 A5 JP 2004260153A5 JP 2004028144 A JP2004028144 A JP 2004028144A JP 2004028144 A JP2004028144 A JP 2004028144A JP 2004260153 A5 JP2004260153 A5 JP 2004260153A5
- Authority
- JP
- Japan
- Prior art keywords
- adhesive
- substrate holder
- holding
- holder according
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000853 adhesive Substances 0.000 claims 55
- 230000001070 adhesive effect Effects 0.000 claims 55
- 239000000758 substrate Substances 0.000 claims 37
- 239000000463 material Substances 0.000 claims 11
- 238000004519 manufacturing process Methods 0.000 claims 7
- 238000003825 pressing Methods 0.000 claims 7
- 239000002245 particle Substances 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- 230000003746 surface roughness Effects 0.000 claims 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
- 238000003486 chemical etching Methods 0.000 claims 1
- 229920001971 elastomer Polymers 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000004615 ingredient Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229920003225 polyurethane elastomer Polymers 0.000 claims 1
- 229920002379 silicone rubber Polymers 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004028144A JP3794693B2 (ja) | 2003-02-07 | 2004-02-04 | 基板保持具、基板保持具の製造方法、および、金型の製造方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003031094 | 2003-02-07 | ||
| JP2004028144A JP3794693B2 (ja) | 2003-02-07 | 2004-02-04 | 基板保持具、基板保持具の製造方法、および、金型の製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006078892A Division JP4272216B2 (ja) | 2003-02-07 | 2006-03-22 | 基板保持具 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004260153A JP2004260153A (ja) | 2004-09-16 |
| JP2004260153A5 true JP2004260153A5 (enExample) | 2005-11-04 |
| JP3794693B2 JP3794693B2 (ja) | 2006-07-05 |
Family
ID=33133775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004028144A Expired - Lifetime JP3794693B2 (ja) | 2003-02-07 | 2004-02-04 | 基板保持具、基板保持具の製造方法、および、金型の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3794693B2 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4144886B2 (ja) * | 2005-01-18 | 2008-09-03 | 株式会社ユー・エム・アイ | 回路基板保持治具 |
| JP2007059822A (ja) * | 2005-08-26 | 2007-03-08 | Nippon Steel Chem Co Ltd | ヒンジ基板及びその製造方法 |
| JP2007158233A (ja) * | 2005-12-08 | 2007-06-21 | Mitsubishi Electric Corp | 配線構造およびその製造方法ならびに治具 |
| JP4838818B2 (ja) * | 2008-01-18 | 2011-12-14 | ミライアル株式会社 | クッションシート付ウエハ収納容器 |
| JP5352151B2 (ja) * | 2008-08-05 | 2013-11-27 | トッパン・フォームズ株式会社 | 電子部品搬送装置 |
| JP6809077B2 (ja) * | 2016-09-20 | 2021-01-06 | 日本電気株式会社 | 搬送パレットおよび搬送方法 |
| CN109964545B (zh) * | 2016-11-17 | 2021-08-10 | 住友电工印刷电路株式会社 | 柔性印刷配线板的制造方法、板状夹具、其单片的装卸用具及柔性印刷配线板的制造设备 |
| JP2020115238A (ja) * | 2020-04-17 | 2020-07-30 | 堺ディスプレイプロダクト株式会社 | フレキシブル発光デバイスの製造方法および製造装置 |
-
2004
- 2004-02-04 JP JP2004028144A patent/JP3794693B2/ja not_active Expired - Lifetime
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