JP3794693B2 - 基板保持具、基板保持具の製造方法、および、金型の製造方法 - Google Patents

基板保持具、基板保持具の製造方法、および、金型の製造方法 Download PDF

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Publication number
JP3794693B2
JP3794693B2 JP2004028144A JP2004028144A JP3794693B2 JP 3794693 B2 JP3794693 B2 JP 3794693B2 JP 2004028144 A JP2004028144 A JP 2004028144A JP 2004028144 A JP2004028144 A JP 2004028144A JP 3794693 B2 JP3794693 B2 JP 3794693B2
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pallet
adhesive
region
holding
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Japanese (ja)
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JP2004260153A5 (enExample
JP2004260153A (ja
Inventor
辰樹 野際
浩典 植村
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Panasonic Corp
Panasonic Holdings Corp
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Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Priority to JP2004028144A priority Critical patent/JP3794693B2/ja
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Publication of JP2004260153A5 publication Critical patent/JP2004260153A5/ja
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JP2004028144A 2003-02-07 2004-02-04 基板保持具、基板保持具の製造方法、および、金型の製造方法 Expired - Lifetime JP3794693B2 (ja)

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JP2004028144A JP3794693B2 (ja) 2003-02-07 2004-02-04 基板保持具、基板保持具の製造方法、および、金型の製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003031094 2003-02-07
JP2004028144A JP3794693B2 (ja) 2003-02-07 2004-02-04 基板保持具、基板保持具の製造方法、および、金型の製造方法

Related Child Applications (1)

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JP2006078892A Division JP4272216B2 (ja) 2003-02-07 2006-03-22 基板保持具

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JP2004260153A JP2004260153A (ja) 2004-09-16
JP2004260153A5 JP2004260153A5 (enExample) 2005-11-04
JP3794693B2 true JP3794693B2 (ja) 2006-07-05

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Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4144886B2 (ja) * 2005-01-18 2008-09-03 株式会社ユー・エム・アイ 回路基板保持治具
JP2007059822A (ja) * 2005-08-26 2007-03-08 Nippon Steel Chem Co Ltd ヒンジ基板及びその製造方法
JP2007158233A (ja) * 2005-12-08 2007-06-21 Mitsubishi Electric Corp 配線構造およびその製造方法ならびに治具
JP4838818B2 (ja) * 2008-01-18 2011-12-14 ミライアル株式会社 クッションシート付ウエハ収納容器
JP5352151B2 (ja) * 2008-08-05 2013-11-27 トッパン・フォームズ株式会社 電子部品搬送装置
JP6809077B2 (ja) * 2016-09-20 2021-01-06 日本電気株式会社 搬送パレットおよび搬送方法
CN109964545B (zh) * 2016-11-17 2021-08-10 住友电工印刷电路株式会社 柔性印刷配线板的制造方法、板状夹具、其单片的装卸用具及柔性印刷配线板的制造设备
JP2020115238A (ja) * 2020-04-17 2020-07-30 堺ディスプレイプロダクト株式会社 フレキシブル発光デバイスの製造方法および製造装置

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