JP2004137480A - 蛍光体薄膜およびその製造方法ならびにｅｌパネル - Google Patents

蛍光体薄膜およびその製造方法ならびにｅｌパネル Download PDF

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Publication number
JP2004137480A
JP2004137480A JP2003326736A JP2003326736A JP2004137480A JP 2004137480 A JP2004137480 A JP 2004137480A JP 2003326736 A JP2003326736 A JP 2003326736A JP 2003326736 A JP2003326736 A JP 2003326736A JP 2004137480 A JP2004137480 A JP 2004137480A
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Japan
Prior art keywords
thin film
phosphor thin
panel
phosphor
film
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Pending
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JP2003326736A
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English (en)
Japanese (ja)
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JP2004137480A5 (enExample
Inventor
Noboru Miura
三浦　登
Mitsuhiro Kawanishi
川西　光宏
Yoshihiko Yano
矢野　義彦
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TDK Corp
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TDK Corp
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Publication date
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Priority to JP2003326736A priority Critical patent/JP2004137480A/ja
Priority to US10/664,923 priority patent/US6939482B2/en
Publication of JP2004137480A publication Critical patent/JP2004137480A/ja
Publication of JP2004137480A5 publication Critical patent/JP2004137480A5/ja
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/77—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing rare earth metals
    • C09K11/7783—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing rare earth metals containing two or more rare earth metals one of which being europium
    • C09K11/7784—Chalcogenides
    • C09K11/7787—Oxides
    • C09K11/7789—Oxysulfides
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/77—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing rare earth metals
    • C09K11/7701—Chalogenides
    • C09K11/7702—Chalogenides with zinc or cadmium
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/77—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing rare earth metals
    • C09K11/7701—Chalogenides
    • C09K11/7703—Chalogenides with alkaline earth metals
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/77—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing rare earth metals
    • C09K11/7783—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing rare earth metals containing two or more rare earth metals one of which being europium
    • C09K11/7784—Chalcogenides
    • C09K11/7786—Chalcogenides with alkaline earth metals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/917—Electroluminescent

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Electroluminescent Light Sources (AREA)
  • Luminescent Compositions (AREA)
  • Physical Vapour Deposition (AREA)
JP2003326736A 2002-09-20 2003-09-18 蛍光体薄膜およびその製造方法ならびにｅｌパネル Pending JP2004137480A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003326736A JP2004137480A (ja) 2002-09-20 2003-09-18 蛍光体薄膜およびその製造方法ならびにｅｌパネル
US10/664,923 US6939482B2 (en) 2002-09-20 2003-09-22 Phosphor thin film, manufacturing method of the same, and electroluminescent panel

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002274516 2002-09-20
JP2003326736A JP2004137480A (ja) 2002-09-20 2003-09-18 蛍光体薄膜およびその製造方法ならびにｅｌパネル

Publications (2)

Publication Number Publication Date
JP2004137480A true JP2004137480A (ja) 2004-05-13
JP2004137480A5 JP2004137480A5 (enExample) 2005-08-04

Family

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Family Applications (1)

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JP2003326736A Pending JP2004137480A (ja) 2002-09-20 2003-09-18 蛍光体薄膜およびその製造方法ならびにｅｌパネル

Country Status (2)

Country Link
US (1) US6939482B2 (enExample)
JP (1) JP2004137480A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006129593A1 (ja) * 2005-06-03 2006-12-07 Kabushiki Kaisha Toshiba 表示装置用蛍光体および電界放出型表示装置
JP2009132932A (ja) * 2008-12-24 2009-06-18 National Institute Of Advanced Industrial & Technology 結晶化金属酸化物薄膜を備えた蛍光体

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7812522B2 (en) * 2004-07-22 2010-10-12 Ifire Ip Corporation Aluminum oxide and aluminum oxynitride layers for use with phosphors for electroluminescent displays
WO2006045195A1 (en) * 2004-10-29 2006-05-04 Ifire Technology Corp. Novel thiosilicate phosphor compositions and deposition methods using barium-silicon vacuum deposition sources for deposition of thiosilicate phosphor films
JP2006140083A (ja) * 2004-11-15 2006-06-01 Tohoku Univ 蛍光ランプ
US7638002B2 (en) * 2004-11-29 2009-12-29 Tokyo Electron Limited Multi-tray film precursor evaporation system and thin film deposition system incorporating same
US7708835B2 (en) * 2004-11-29 2010-05-04 Tokyo Electron Limited Film precursor tray for use in a film precursor evaporation system and method of using
US7488512B2 (en) * 2004-11-29 2009-02-10 Tokyo Electron Limited Method for preparing solid precursor tray for use in solid precursor evaporation system
US7484315B2 (en) * 2004-11-29 2009-02-03 Tokyo Electron Limited Replaceable precursor tray for use in a multi-tray solid precursor delivery system
KR100730122B1 (ko) * 2004-12-24 2007-06-19 삼성에스디아이 주식회사 전도성 물질을 포함하는 이트륨계 형광체, 그의 제조방법및 이를 채용한 표시소자
US7651570B2 (en) * 2005-03-31 2010-01-26 Tokyo Electron Limited Solid precursor vaporization system for use in chemical vapor deposition
WO2007086311A1 (en) * 2006-01-27 2007-08-02 Semiconductor Energy Laboratory Co., Ltd. Light-emitting material, light-emitting element, light-emitting device, and electronic appliance
CN101374925A (zh) * 2006-01-27 2009-02-25 株式会社半导体能源研究所 发光材料、发光器件和电子设备
WO2007091500A1 (en) * 2006-02-10 2007-08-16 Semiconductor Energy Laboratory Co., Ltd. Light emitting element, light emitting device, and electronic device
US20070190235A1 (en) * 2006-02-10 2007-08-16 Semiconductor Energy Laboratory Co., Ltd. Film forming apparatus, film forming method, and manufacturing method of light emitting element
US20070190675A1 (en) * 2006-02-10 2007-08-16 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of display device
US20070194321A1 (en) * 2006-02-17 2007-08-23 Semiconductor Energy Laboratory Co., Ltd. Light emitting element, light emitting device, and electronic device
EP1821579A3 (en) * 2006-02-17 2008-04-02 Semiconductor Energy Laboratory Co., Ltd. Light emitting element, light emitting device, and electronic appliance
CN101395966A (zh) * 2006-03-02 2009-03-25 株式会社半导体能源研究所 发光元件、发光设备、照明设备和电子器具
WO2007108390A1 (en) 2006-03-21 2007-09-27 Semiconductor Energy Laboratory Co., Ltd. Light-emitting element, display device, and electronic appliance
US20070281574A1 (en) * 2006-06-01 2007-12-06 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing electroluminescent material
US20080012027A1 (en) * 2006-07-13 2008-01-17 Semiconductor Energy Laboratory Co., Ltd. Light-emitting element, light-emitting device, and method of fabricating light-emitting element
US7846256B2 (en) * 2007-02-23 2010-12-07 Tokyo Electron Limited Ampule tray for and method of precursor surface area
DE102010017438A1 (de) * 2010-06-17 2011-12-22 Paul Hettich Gmbh & Co. Kg Bauteil, insbesondere für einen Beschlag, ein Möbel und/oder ein Haushaltsgerät, Verfahren zur Herstellung eines Bauteils, Beschlag, Möbel und/oder Haushaltsgerät
CN103094159B (zh) * 2011-10-31 2016-02-24 细美事有限公司 基板处理设备及基板处理方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01206594A (ja) 1987-10-14 1989-08-18 Komatsu Ltd 薄膜ｅｌ素子およびその製造方法
JPH0251891A (ja) 1988-08-12 1990-02-21 Hitachi Ltd 薄膜ｅｌ素子
JPH02148688A (ja) 1988-11-30 1990-06-07 Sumitomo Metal Ind Ltd 薄膜ｅｌ素子
US5309070A (en) 1991-03-12 1994-05-03 Sun Sey Shing AC TFEL device having blue light emitting thiogallate phosphor
JP2840185B2 (ja) 1993-10-21 1998-12-24 松下電器産業株式会社 蛍光体薄膜とこれを用いた薄膜ｅｌパネル
JP3590986B2 (ja) 1994-03-22 2004-11-17 株式会社デンソー エレクトロルミネッセンス素子
US6042746A (en) * 1997-01-17 2000-03-28 Micron Technology, Inc. Specialized phosphors prepared by a multi-stage grinding and firing sequence
US6252254B1 (en) * 1998-02-06 2001-06-26 General Electric Company Light emitting device with phosphor composition

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006129593A1 (ja) * 2005-06-03 2006-12-07 Kabushiki Kaisha Toshiba 表示装置用蛍光体および電界放出型表示装置
JP2009132932A (ja) * 2008-12-24 2009-06-18 National Institute Of Advanced Industrial & Technology 結晶化金属酸化物薄膜を備えた蛍光体

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US20040206935A1 (en) 2004-10-21
US6939482B2 (en) 2005-09-06

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