JP2004134399A - 一体遮蔽型マイクロ回路用の電気的に絶縁された液体金属マイクロスイッチ - Google Patents

一体遮蔽型マイクロ回路用の電気的に絶縁された液体金属マイクロスイッチ Download PDF

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Publication number
JP2004134399A
JP2004134399A JP2003338616A JP2003338616A JP2004134399A JP 2004134399 A JP2004134399 A JP 2004134399A JP 2003338616 A JP2003338616 A JP 2003338616A JP 2003338616 A JP2003338616 A JP 2003338616A JP 2004134399 A JP2004134399 A JP 2004134399A
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Japan
Prior art keywords
dielectric layer
liquid metal
substrate
heater
ground plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
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JP2003338616A
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English (en)
Japanese (ja)
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JP2004134399A5 (enExample
Inventor
Lewis R Dove
ルイス　アール．　ダヴ
John F Casey
ジョン　エフ．　ケイシー
Marvin Glenn Wong
マーヴィン　グレン　ウォン
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Agilent Technologies Inc
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Agilent Technologies Inc
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Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of JP2004134399A publication Critical patent/JP2004134399A/ja
Publication of JP2004134399A5 publication Critical patent/JP2004134399A5/ja
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H29/28—Switches having at least one liquid contact with level of surface of contact liquid displaced by fluid pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
JP2003338616A 2002-10-08 2003-09-29 一体遮蔽型マイクロ回路用の電気的に絶縁された液体金属マイクロスイッチ Ceased JP2004134399A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/266,872 US6689976B1 (en) 2002-10-08 2002-10-08 Electrically isolated liquid metal micro-switches for integrally shielded microcircuits

Publications (2)

Publication Number Publication Date
JP2004134399A true JP2004134399A (ja) 2004-04-30
JP2004134399A5 JP2004134399A5 (enExample) 2006-11-09

Family

ID=30770714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003338616A Ceased JP2004134399A (ja) 2002-10-08 2003-09-29 一体遮蔽型マイクロ回路用の電気的に絶縁された液体金属マイクロスイッチ

Country Status (4)

Country Link
US (2) US6689976B1 (enExample)
JP (1) JP2004134399A (enExample)
SG (1) SG120114A1 (enExample)
TW (1) TW200406015A (enExample)

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Also Published As

Publication number Publication date
TW200406015A (en) 2004-04-16
US6689976B1 (en) 2004-02-10
US6781075B2 (en) 2004-08-24
SG120114A1 (en) 2006-03-28
US20040066259A1 (en) 2004-04-08

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