JP2004134399A5 - - Google Patents

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Publication number
JP2004134399A5
JP2004134399A5 JP2003338616A JP2003338616A JP2004134399A5 JP 2004134399 A5 JP2004134399 A5 JP 2004134399A5 JP 2003338616 A JP2003338616 A JP 2003338616A JP 2003338616 A JP2003338616 A JP 2003338616A JP 2004134399 A5 JP2004134399 A5 JP 2004134399A5
Authority
JP
Japan
Prior art keywords
dielectric layer
microswitch
cavity
substrate
ground plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP2003338616A
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English (en)
Japanese (ja)
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JP2004134399A (ja
Filing date
Publication date
Priority claimed from US10/266,872 external-priority patent/US6689976B1/en
Application filed filed Critical
Publication of JP2004134399A publication Critical patent/JP2004134399A/ja
Publication of JP2004134399A5 publication Critical patent/JP2004134399A5/ja
Ceased legal-status Critical Current

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JP2003338616A 2002-10-08 2003-09-29 一体遮蔽型マイクロ回路用の電気的に絶縁された液体金属マイクロスイッチ Ceased JP2004134399A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/266,872 US6689976B1 (en) 2002-10-08 2002-10-08 Electrically isolated liquid metal micro-switches for integrally shielded microcircuits

Publications (2)

Publication Number Publication Date
JP2004134399A JP2004134399A (ja) 2004-04-30
JP2004134399A5 true JP2004134399A5 (enExample) 2006-11-09

Family

ID=30770714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003338616A Ceased JP2004134399A (ja) 2002-10-08 2003-09-29 一体遮蔽型マイクロ回路用の電気的に絶縁された液体金属マイクロスイッチ

Country Status (4)

Country Link
US (2) US6689976B1 (enExample)
JP (1) JP2004134399A (enExample)
SG (1) SG120114A1 (enExample)
TW (1) TW200406015A (enExample)

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