JP2004115137A5 - - Google Patents
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- Publication number
- JP2004115137A5 JP2004115137A5 JP2002276558A JP2002276558A JP2004115137A5 JP 2004115137 A5 JP2004115137 A5 JP 2004115137A5 JP 2002276558 A JP2002276558 A JP 2002276558A JP 2002276558 A JP2002276558 A JP 2002276558A JP 2004115137 A5 JP2004115137 A5 JP 2004115137A5
- Authority
- JP
- Japan
- Prior art keywords
- thin plate
- lateral direction
- support member
- frame
- conveying apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002276558A JP4216029B2 (ja) | 2002-09-24 | 2002-09-24 | 薄板搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002276558A JP4216029B2 (ja) | 2002-09-24 | 2002-09-24 | 薄板搬送装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004115137A JP2004115137A (ja) | 2004-04-15 |
| JP2004115137A5 true JP2004115137A5 (enrdf_load_stackoverflow) | 2005-05-19 |
| JP4216029B2 JP4216029B2 (ja) | 2009-01-28 |
Family
ID=32272394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002276558A Expired - Fee Related JP4216029B2 (ja) | 2002-09-24 | 2002-09-24 | 薄板搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4216029B2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005090211A1 (ja) * | 2004-03-18 | 2005-09-29 | Daiichi Institution Industry Co. Ltd. | アライメント機能付き移載装置 |
| KR200487579Y1 (ko) * | 2017-06-21 | 2018-11-28 | 이이원 | 기판 운반 카세트 |
| JP7342840B2 (ja) * | 2020-11-05 | 2023-09-12 | トヨタ自動車株式会社 | 薄板材の搬送方法、及び搬送装置 |
-
2002
- 2002-09-24 JP JP2002276558A patent/JP4216029B2/ja not_active Expired - Fee Related
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