JP2004079705A5 - - Google Patents
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- Publication number
- JP2004079705A5 JP2004079705A5 JP2002236535A JP2002236535A JP2004079705A5 JP 2004079705 A5 JP2004079705 A5 JP 2004079705A5 JP 2002236535 A JP2002236535 A JP 2002236535A JP 2002236535 A JP2002236535 A JP 2002236535A JP 2004079705 A5 JP2004079705 A5 JP 2004079705A5
- Authority
- JP
- Japan
- Prior art keywords
- mis transistor
- region
- gate electrode
- drain
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 38
- 239000012535 impurity Substances 0.000 claims 21
- 239000000758 substrate Substances 0.000 claims 13
- 230000001747 exhibiting effect Effects 0.000 claims 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 6
- 229910052710 silicon Inorganic materials 0.000 claims 6
- 239000010703 silicon Substances 0.000 claims 6
- 238000009792 diffusion process Methods 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 3
- 229910021332 silicide Inorganic materials 0.000 claims 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002236535A JP2004079705A (ja) | 2002-08-14 | 2002-08-14 | 半導体集積回路装置およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002236535A JP2004079705A (ja) | 2002-08-14 | 2002-08-14 | 半導体集積回路装置およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004079705A JP2004079705A (ja) | 2004-03-11 |
| JP2004079705A5 true JP2004079705A5 (enExample) | 2005-11-04 |
Family
ID=32020681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002236535A Pending JP2004079705A (ja) | 2002-08-14 | 2002-08-14 | 半導体集積回路装置およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004079705A (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7274072B2 (en) * | 2005-04-15 | 2007-09-25 | International Business Machines Corporation | Hybrid bulk-SOI 6T-SRAM cell for improved cell stability and performance |
| JP5190189B2 (ja) * | 2006-08-09 | 2013-04-24 | パナソニック株式会社 | 半導体装置及びその製造方法 |
| KR20180137606A (ko) * | 2008-10-24 | 2018-12-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제조 방법 |
| WO2012131818A1 (ja) * | 2011-03-25 | 2012-10-04 | パナソニック株式会社 | 半導体装置及びその製造方法 |
| KR101923946B1 (ko) | 2012-08-31 | 2018-11-30 | 삼성전자 주식회사 | 반도체 장치 및 그 제조 방법 |
| JP6110686B2 (ja) * | 2013-02-26 | 2017-04-05 | 旭化成エレクトロニクス株式会社 | 半導体装置の製造方法 |
| JP7145032B2 (ja) * | 2018-10-19 | 2022-09-30 | キヤノン株式会社 | 表示装置および電子機器 |
-
2002
- 2002-08-14 JP JP2002236535A patent/JP2004079705A/ja active Pending
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