JP2004077458A - ガスセンサ，およびガスセンサの製造方法 - Google Patents

ガスセンサ，およびガスセンサの製造方法 Download PDF

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Publication number
JP2004077458A
JP2004077458A JP2002329930A JP2002329930A JP2004077458A JP 2004077458 A JP2004077458 A JP 2004077458A JP 2002329930 A JP2002329930 A JP 2002329930A JP 2002329930 A JP2002329930 A JP 2002329930A JP 2004077458 A JP2004077458 A JP 2004077458A
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Japan
Prior art keywords
gas sensor
gas
protective layer
metal
catalytically active
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Pending
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JP2002329930A
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English (en)
Japanese (ja)
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JP2004077458A5 (https=
Inventor
Akiyoshi Hattori
章良 服部
Nobuyuki Machii
信幸 待井
Yoshihiro Hori
喜博 堀
Shigeru Sasabe
茂 笹部
Yukako Akeyama
悠香子 明山
Katsuya Wakita
克也 脇田
Tomoko Wada
智子 和田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Refrigeration Co
Matsushita Electric Industrial Co Ltd
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Application filed by Matsushita Refrigeration Co, Matsushita Electric Industrial Co Ltd filed Critical Matsushita Refrigeration Co
Priority to JP2002329930A priority Critical patent/JP2004077458A/ja
Publication of JP2004077458A publication Critical patent/JP2004077458A/ja
Publication of JP2004077458A5 publication Critical patent/JP2004077458A5/ja
Pending legal-status Critical Current

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JP2002329930A 2001-11-14 2002-11-13 ガスセンサ，およびガスセンサの製造方法 Pending JP2004077458A (ja)

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JP2002329930A JP2004077458A (ja) 2001-11-14 2002-11-13 ガスセンサ，およびガスセンサの製造方法

Applications Claiming Priority (3)

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JP2001349066 2001-11-14
JP2002180363 2002-06-20
JP2002329930A JP2004077458A (ja) 2001-11-14 2002-11-13 ガスセンサ，およびガスセンサの製造方法

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JP2004077458A true JP2004077458A (ja) 2004-03-11
JP2004077458A5 JP2004077458A5 (https=) 2005-02-03

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JP2002329930A Pending JP2004077458A (ja) 2001-11-14 2002-11-13 ガスセンサ，およびガスセンサの製造方法

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Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101329294B (zh) * 2007-06-22 2012-05-23 郑州炜盛电子科技有限公司 一种抗干扰性强的气体传感器
CN101329293B (zh) * 2007-06-22 2012-05-23 郑州炜盛电子科技有限公司 一种用于酒精蒸汽和呼气酒精检测的半导体气体传感器
JP2012112718A (ja) * 2010-11-22 2012-06-14 Ngk Spark Plug Co Ltd ガスセンサ
CN102662002A (zh) * 2012-04-25 2012-09-12 中国科学院微电子研究所 半导体薄膜、气体传感器及其制作方法
JP2014031565A (ja) * 2012-08-06 2014-02-20 Kochi Univ Of Technology 酸化亜鉛を主成分とする膜構造体及びその製造方法、並びに該膜構造体からなる感受素子
KR101457374B1 (ko) 2012-09-21 2014-11-04 고려대학교 산학협력단 철이 도핑된 산화 니켈 나노 구조체를 이용한 에탄올 가스 센서 및 그 제조 방법
US10481146B2 (en) 2015-05-22 2019-11-19 Fujitsu Limited Gas sensor and information processing system
US10670552B2 (en) 2014-06-09 2020-06-02 Fujitsu Limited Gas sensor and sensor device
JP2021096190A (ja) * 2019-12-18 2021-06-24 新コスモス電機株式会社 半導体式ガス検知素子
CN113758974A (zh) * 2021-08-30 2021-12-07 中国科学院合肥物质科学研究院 一种氧化物半导体气体传感器及其制备方法和用途
CN116046853A (zh) * 2023-01-29 2023-05-02 国网吉林省电力有限公司电力科学研究院 一种金属In掺杂的ZnO量子点传感器的制备方法及应用
JP7352714B1 (ja) 2022-11-29 2023-09-28 新コスモス電機株式会社 半導体式ガス検知素子

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101329293B (zh) * 2007-06-22 2012-05-23 郑州炜盛电子科技有限公司 一种用于酒精蒸汽和呼气酒精检测的半导体气体传感器
CN101329294B (zh) * 2007-06-22 2012-05-23 郑州炜盛电子科技有限公司 一种抗干扰性强的气体传感器
JP2012112718A (ja) * 2010-11-22 2012-06-14 Ngk Spark Plug Co Ltd ガスセンサ
CN102662002A (zh) * 2012-04-25 2012-09-12 中国科学院微电子研究所 半导体薄膜、气体传感器及其制作方法
JP2014031565A (ja) * 2012-08-06 2014-02-20 Kochi Univ Of Technology 酸化亜鉛を主成分とする膜構造体及びその製造方法、並びに該膜構造体からなる感受素子
KR101457374B1 (ko) 2012-09-21 2014-11-04 고려대학교 산학협력단 철이 도핑된 산화 니켈 나노 구조체를 이용한 에탄올 가스 센서 및 그 제조 방법
US12105046B2 (en) 2014-06-09 2024-10-01 Fujitsu Limited Gas sensor and sensor device
US10670552B2 (en) 2014-06-09 2020-06-02 Fujitsu Limited Gas sensor and sensor device
US10481146B2 (en) 2015-05-22 2019-11-19 Fujitsu Limited Gas sensor and information processing system
JP7352461B2 (ja) 2019-12-18 2023-09-28 新コスモス電機株式会社 半導体式ガス検知素子
JP2021096190A (ja) * 2019-12-18 2021-06-24 新コスモス電機株式会社 半導体式ガス検知素子
CN113758974A (zh) * 2021-08-30 2021-12-07 中国科学院合肥物质科学研究院 一种氧化物半导体气体传感器及其制备方法和用途
JP7352714B1 (ja) 2022-11-29 2023-09-28 新コスモス電機株式会社 半導体式ガス検知素子
JP2024078306A (ja) * 2022-11-29 2024-06-10 新コスモス電機株式会社 半導体式ガス検知素子
CN116046853A (zh) * 2023-01-29 2023-05-02 国网吉林省电力有限公司电力科学研究院 一种金属In掺杂的ZnO量子点传感器的制备方法及应用

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