JP2004048025A5 - - Google Patents
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- Publication number
- JP2004048025A5 JP2004048025A5 JP2003207585A JP2003207585A JP2004048025A5 JP 2004048025 A5 JP2004048025 A5 JP 2004048025A5 JP 2003207585 A JP2003207585 A JP 2003207585A JP 2003207585 A JP2003207585 A JP 2003207585A JP 2004048025 A5 JP2004048025 A5 JP 2004048025A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- dummy
- integrated circuit
- circuit device
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000004065 semiconductor Substances 0.000 claims 71
- 238000005498 polishing Methods 0.000 claims 20
- 238000004519 manufacturing process Methods 0.000 claims 19
- 238000000034 method Methods 0.000 claims 16
- 238000002955 isolation Methods 0.000 claims 14
- 239000000758 substrate Substances 0.000 claims 13
- 239000010410 layer Substances 0.000 claims 12
- 230000015572 biosynthetic process Effects 0.000 claims 7
- 239000011229 interlayer Substances 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000011800 void material Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003207585A JP2004048025A (ja) | 1997-03-31 | 2003-08-14 | 半導体集積回路装置 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8101397 | 1997-03-31 | ||
| JP2003207585A JP2004048025A (ja) | 1997-03-31 | 2003-08-14 | 半導体集積回路装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP03338898A Division JP3638778B2 (ja) | 1997-03-31 | 1998-02-16 | 半導体集積回路装置およびその製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005337967A Division JP2006128709A (ja) | 1997-03-31 | 2005-11-24 | 半導体集積回路装置およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004048025A JP2004048025A (ja) | 2004-02-12 |
| JP2004048025A5 true JP2004048025A5 (enExample) | 2006-01-19 |
Family
ID=31718534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003207585A Withdrawn JP2004048025A (ja) | 1997-03-31 | 2003-08-14 | 半導体集積回路装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004048025A (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005303089A (ja) * | 2004-04-13 | 2005-10-27 | Nec Electronics Corp | 半導体装置 |
| JP2009099738A (ja) * | 2007-10-16 | 2009-05-07 | Toshiba Corp | 半導体装置、半導体装置の製造方法及び半導体記憶装置の製造方法 |
| CN101866884B (zh) * | 2009-04-14 | 2012-04-18 | 中芯国际集成电路制造(北京)有限公司 | 非易失性存储器控制栅极字线的加工方法 |
| JP5705610B2 (ja) * | 2010-08-05 | 2015-04-22 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| CN103296202B (zh) * | 2012-03-02 | 2015-04-29 | 中芯国际集成电路制造(上海)有限公司 | 相变存储器及其制作方法 |
| JP5918421B2 (ja) * | 2015-06-04 | 2016-05-18 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| JP5918422B2 (ja) * | 2015-06-04 | 2016-05-18 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| CN115020379B (zh) * | 2022-05-30 | 2025-01-24 | 上海华力集成电路制造有限公司 | Hkmg寄生电容测试结构的版图 |
-
2003
- 2003-08-14 JP JP2003207585A patent/JP2004048025A/ja not_active Withdrawn
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