JP2003507199A5 - - Google Patents

Download PDF

Info

Publication number
JP2003507199A5
JP2003507199A5 JP2001516715A JP2001516715A JP2003507199A5 JP 2003507199 A5 JP2003507199 A5 JP 2003507199A5 JP 2001516715 A JP2001516715 A JP 2001516715A JP 2001516715 A JP2001516715 A JP 2001516715A JP 2003507199 A5 JP2003507199 A5 JP 2003507199A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001516715A
Other languages
Japanese (ja)
Other versions
JP4519385B2 (ja
JP2003507199A (ja
Filing date
Publication date
Priority claimed from US09/375,962 external-priority patent/US6171181B1/en
Application filed filed Critical
Publication of JP2003507199A publication Critical patent/JP2003507199A/ja
Publication of JP2003507199A5 publication Critical patent/JP2003507199A5/ja
Application granted granted Critical
Publication of JP4519385B2 publication Critical patent/JP4519385B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2001516715A 1999-08-17 2000-08-10 一体化した窓を有する成形された研磨パッド Expired - Lifetime JP4519385B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/375,962 1999-08-17
US09/375,962 US6171181B1 (en) 1999-08-17 1999-08-17 Molded polishing pad having integral window
PCT/US2000/021776 WO2001012387A1 (en) 1999-08-17 2000-08-10 Molded polishing pad having integral window

Publications (3)

Publication Number Publication Date
JP2003507199A JP2003507199A (ja) 2003-02-25
JP2003507199A5 true JP2003507199A5 (enExample) 2007-09-06
JP4519385B2 JP4519385B2 (ja) 2010-08-04

Family

ID=23483104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001516715A Expired - Lifetime JP4519385B2 (ja) 1999-08-17 2000-08-10 一体化した窓を有する成形された研磨パッド

Country Status (6)

Country Link
US (2) US6171181B1 (enExample)
EP (1) EP1210209A4 (enExample)
JP (1) JP4519385B2 (enExample)
KR (1) KR100646887B1 (enExample)
TW (1) TW470688B (enExample)
WO (1) WO2001012387A1 (enExample)

Families Citing this family (98)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69635816T2 (de) * 1995-03-28 2006-10-12 Applied Materials, Inc., Santa Clara Verfahren zum Herstellen einer Vorrichtung zur In-Situ-Kontrolle und Bestimmung des Endes von chemisch-mechanischen Planiervorgängen
US5893796A (en) * 1995-03-28 1999-04-13 Applied Materials, Inc. Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus
US6876454B1 (en) 1995-03-28 2005-04-05 Applied Materials, Inc. Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations
US6716085B2 (en) 2001-12-28 2004-04-06 Applied Materials Inc. Polishing pad with transparent window
US6179709B1 (en) * 1999-02-04 2001-01-30 Applied Materials, Inc. In-situ monitoring of linear substrate polishing operations
US6524164B1 (en) * 1999-09-14 2003-02-25 Applied Materials, Inc. Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus
EP1257386A1 (en) 2000-02-25 2002-11-20 Rodel Holdings, Inc. Polishing pad with a transparent portion
KR100789663B1 (ko) * 2000-03-15 2007-12-31 롬 앤드 하스 일렉트로닉 머티리얼스 씨엠피 홀딩스 인코포레이티드 연마층에 투명 윈도우 부분을 갖는 연마 패드
US7374477B2 (en) * 2002-02-06 2008-05-20 Applied Materials, Inc. Polishing pads useful for endpoint detection in chemical mechanical polishing
US8485862B2 (en) * 2000-05-19 2013-07-16 Applied Materials, Inc. Polishing pad for endpoint detection and related methods
AU2001291143A1 (en) 2000-10-06 2002-04-22 Cabot Microelectronics Corporation Polishing pad comprising a filled translucent region
US6688956B1 (en) * 2000-11-29 2004-02-10 Psiloquest Inc. Substrate polishing device and method
US6840843B2 (en) 2001-03-01 2005-01-11 Cabot Microelectronics Corporation Method for manufacturing a polishing pad having a compressed translucent region
WO2002102547A1 (en) * 2001-06-15 2002-12-27 Rodel Holdings, Inc. Polishing apparatus that provides a window
JP4570286B2 (ja) * 2001-07-03 2010-10-27 ニッタ・ハース株式会社 研磨パッド
JP2003048151A (ja) * 2001-08-08 2003-02-18 Rodel Nitta Co 研磨パッド
JP2003062748A (ja) * 2001-08-24 2003-03-05 Inoac Corp 研磨用パッド
US6884146B2 (en) 2002-02-04 2005-04-26 Kla-Tencor Technologies Corp. Systems and methods for characterizing a polishing process
US6875077B2 (en) * 2002-03-18 2005-04-05 Raytech Innovative Solutions, Inc. Polishing pad for use in chemical/mechanical planarization of semiconductor wafers having a transparent window for end-point determination and method of making
US20030194959A1 (en) * 2002-04-15 2003-10-16 Cabot Microelectronics Corporation Sintered polishing pad with regions of contrasting density
USD469766S1 (en) 2002-04-25 2003-02-04 Intec, Inc. Game controller
US20050276967A1 (en) * 2002-05-23 2005-12-15 Cabot Microelectronics Corporation Surface textured microporous polishing pads
US20040171339A1 (en) * 2002-10-28 2004-09-02 Cabot Microelectronics Corporation Microporous polishing pads
US6913517B2 (en) * 2002-05-23 2005-07-05 Cabot Microelectronics Corporation Microporous polishing pads
KR100465649B1 (ko) * 2002-09-17 2005-01-13 한국포리올 주식회사 일체형 연마 패드 및 그 제조 방법
US7579071B2 (en) * 2002-09-17 2009-08-25 Korea Polyol Co., Ltd. Polishing pad containing embedded liquid microelements and method of manufacturing the same
US7435165B2 (en) 2002-10-28 2008-10-14 Cabot Microelectronics Corporation Transparent microporous materials for CMP
US7311862B2 (en) * 2002-10-28 2007-12-25 Cabot Microelectronics Corporation Method for manufacturing microporous CMP materials having controlled pore size
US7267607B2 (en) * 2002-10-28 2007-09-11 Cabot Microelectronics Corporation Transparent microporous materials for CMP
TW200416102A (en) * 2002-11-27 2004-09-01 Toyo Boseki Polishing pad and method for manufacturing semiconductor device
US6676483B1 (en) 2003-02-03 2004-01-13 Rodel Holdings, Inc. Anti-scattering layer for polishing pad windows
US6832947B2 (en) * 2003-02-10 2004-12-21 Cabot Microelectronics Corporation CMP pad with composite transparent window
US6960120B2 (en) 2003-02-10 2005-11-01 Cabot Microelectronics Corporation CMP pad with composite transparent window
EP1594656B1 (en) * 2003-02-18 2007-09-12 Parker-Hannifin Corporation Polishing article for electro-chemical mechanical polishing
US6991514B1 (en) 2003-02-21 2006-01-31 Verity Instruments, Inc. Optical closed-loop control system for a CMP apparatus and method of manufacture thereof
US7704125B2 (en) 2003-03-24 2010-04-27 Nexplanar Corporation Customized polishing pads for CMP and methods of fabrication and use thereof
CA2519942A1 (en) 2003-03-25 2004-10-14 Neopad Technologies Corporation Chip customized polish pads for chemical mechanical planarization (cmp)
US9278424B2 (en) 2003-03-25 2016-03-08 Nexplanar Corporation Customized polishing pads for CMP and methods of fabrication and use thereof
US8864859B2 (en) 2003-03-25 2014-10-21 Nexplanar Corporation Customized polishing pads for CMP and methods of fabrication and use thereof
EP1466699A1 (en) * 2003-04-09 2004-10-13 JSR Corporation Abrasive pad, method and metal mold for manufacturing the same, and semiconductor wafer polishing method
US20040209066A1 (en) * 2003-04-17 2004-10-21 Swisher Robert G. Polishing pad with window for planarization
US7435161B2 (en) * 2003-06-17 2008-10-14 Cabot Microelectronics Corporation Multi-layer polishing pad material for CMP
US6884156B2 (en) * 2003-06-17 2005-04-26 Cabot Microelectronics Corporation Multi-layer polishing pad material for CMP
US6997777B2 (en) * 2003-06-17 2006-02-14 Cabot Microelectronics Corporation Ultrasonic welding method for the manufacture of a polishing pad comprising an optically transmissive region
US7086932B2 (en) * 2004-05-11 2006-08-08 Freudenberg Nonwovens Polishing pad
EP1498222B1 (en) 2003-07-17 2014-12-17 JSR Corporation Chemical mechanical polishing pad and chemical mechanical polishing method
JP4721016B2 (ja) * 2003-07-17 2011-07-13 Ｊｓｒ株式会社 化学機械研磨用パッドの製造方法
JP2005051237A (ja) * 2003-07-17 2005-02-24 Jsr Corp 化学機械研磨用パッドおよび化学機械研磨方法
US7195539B2 (en) * 2003-09-19 2007-03-27 Cabot Microelectronics Coporation Polishing pad with recessed window
US7258602B2 (en) * 2003-10-22 2007-08-21 Iv Technologies Co., Ltd. Polishing pad having grooved window therein and method of forming the same
US7442116B2 (en) * 2003-11-04 2008-10-28 Jsr Corporation Chemical mechanical polishing pad
US6984163B2 (en) * 2003-11-25 2006-01-10 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Polishing pad with high optical transmission window
US7132033B2 (en) * 2004-02-27 2006-11-07 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Method of forming a layered polishing pad
USD559063S1 (en) 2004-03-17 2008-01-08 Jsr Corporation Polishing pad
USD559064S1 (en) 2004-03-17 2008-01-08 Jsr Corporation Polishing pad
US7204742B2 (en) * 2004-03-25 2007-04-17 Cabot Microelectronics Corporation Polishing pad comprising hydrophobic region and endpoint detection port
KR100737201B1 (ko) * 2004-04-28 2007-07-10 제이에스알 가부시끼가이샤 화학 기계 연마 패드, 그 제조 방법 및 반도체 웨이퍼의화학 기계 연마 방법
US8075372B2 (en) * 2004-09-01 2011-12-13 Cabot Microelectronics Corporation Polishing pad with microporous regions
US20060089094A1 (en) * 2004-10-27 2006-04-27 Swisher Robert G Polyurethane urea polishing pad
US20060089095A1 (en) * 2004-10-27 2006-04-27 Swisher Robert G Polyurethane urea polishing pad
US20060089093A1 (en) * 2004-10-27 2006-04-27 Swisher Robert G Polyurethane urea polishing pad
TWI385050B (zh) * 2005-02-18 2013-02-11 Nexplanar Corp 用於ｃｍｐ之特製拋光墊及其製造方法及其用途
KR101398570B1 (ko) * 2005-08-22 2014-05-22 어플라이드 머티어리얼스, 인코포레이티드 화학적 기계적 폴리싱의 스펙트럼 기반 모니터링을 위한 장치 및 방법
US7226339B2 (en) 2005-08-22 2007-06-05 Applied Materials, Inc. Spectrum based endpointing for chemical mechanical polishing
JP2007118106A (ja) * 2005-10-26 2007-05-17 Toyo Tire & Rubber Co Ltd 研磨パッド及びその製造方法
US20070197147A1 (en) * 2006-02-15 2007-08-23 Applied Materials, Inc. Polishing system with spiral-grooved subpad
US20070212979A1 (en) * 2006-03-09 2007-09-13 Rimpad Tech Ltd. Composite polishing pad
JP4971028B2 (ja) * 2007-05-16 2012-07-11 東洋ゴム工業株式会社 研磨パッドの製造方法
US8562389B2 (en) * 2007-06-08 2013-10-22 Applied Materials, Inc. Thin polishing pad with window and molding process
TWI411495B (zh) * 2007-08-16 2013-10-11 Cabot Microelectronics Corp 拋光墊
JP2009148891A (ja) * 2009-04-02 2009-07-09 Nitta Haas Inc 研磨パッド
US8257544B2 (en) * 2009-06-10 2012-09-04 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pad having a low defect integral window
US8506355B1 (en) * 2010-01-04 2013-08-13 Applied Micro Circuits Corporation System and method for in-situ inspection during metallurgical cross-sectioning
US9017140B2 (en) 2010-01-13 2015-04-28 Nexplanar Corporation CMP pad with local area transparency
JP5715770B2 (ja) * 2010-06-17 2015-05-13 ローム アンド ハース エレクトロニック マテリアルズ シーエムピー ホウルディングス インコーポレイテッド 低欠陥の一体型窓を有する化学機械研磨パッド及び当該化学機械研磨パッドを用いて基体を化学機械研磨する方法
US9156124B2 (en) * 2010-07-08 2015-10-13 Nexplanar Corporation Soft polishing pad for polishing a semiconductor substrate
CN102310366B (zh) * 2010-07-08 2014-03-05 罗门哈斯电子材料Cmp控股股份有限公司 具有低缺陷整体窗的化学机械抛光垫
US8257545B2 (en) 2010-09-29 2012-09-04 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pad with light stable polymeric endpoint detection window and method of polishing therewith
JP5918254B2 (ja) * 2010-11-18 2016-05-18 キャボット マイクロエレクトロニクス コーポレイション 透過性領域を含む研磨パッド
US10022842B2 (en) * 2012-04-02 2018-07-17 Thomas West, Inc. Method and systems to control optical transmissivity of a polish pad material
US10722997B2 (en) 2012-04-02 2020-07-28 Thomas West, Inc. Multilayer polishing pads made by the methods for centrifugal casting of polymer polish pads
KR102100654B1 (ko) 2012-04-02 2020-04-14 토마스 웨스트 인코포레이티드 폴리머 연마패드의 원심주조를 위한 방법 및 시스템 및 상기 방법으로 만들어진 연마패드
US9156125B2 (en) * 2012-04-11 2015-10-13 Cabot Microelectronics Corporation Polishing pad with light-stable light-transmitting region
US20140256226A1 (en) * 2013-03-07 2014-09-11 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Broad spectrum, endpoint detection window chemical mechanical polishing pad and polishing method
US9186772B2 (en) 2013-03-07 2015-11-17 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pad with broad spectrum, endpoint detection window and method of polishing therewith
US9064806B1 (en) 2014-03-28 2015-06-23 Rohm and Haas Electronics Materials CMP Holdings, Inc. Soft and conditionable chemical mechanical polishing pad with window
US9259820B2 (en) 2014-03-28 2016-02-16 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pad with polishing layer and window
US9216489B2 (en) 2014-03-28 2015-12-22 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pad with endpoint detection window
US9333620B2 (en) 2014-04-29 2016-05-10 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pad with clear endpoint detection window
US9314897B2 (en) 2014-04-29 2016-04-19 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pad with endpoint detection window
US10213894B2 (en) * 2016-02-26 2019-02-26 Applied Materials, Inc. Method of placing window in thin polishing pad
KR101904322B1 (ko) * 2017-01-23 2018-10-04 에스케이씨 주식회사 연마패드 및 이의 제조방법
KR20190006703A (ko) 2017-07-11 2019-01-21 에스케이씨 주식회사 연마패드의 비파괴 누수 검사 방법
KR101945878B1 (ko) 2017-07-11 2019-02-11 에스케이씨 주식회사 연마층과 유사 경도를 갖는 윈도우를 포함하는 연마패드
KR101945869B1 (ko) 2017-08-07 2019-02-11 에스케이씨 주식회사 우수한 기밀성을 갖는 연마패드
KR102080840B1 (ko) 2018-03-29 2020-02-24 에스케이씨 주식회사 누수 방지된 연마패드 및 이의 제조방법
CN109202693B (zh) 2017-10-16 2021-10-12 Skc索密思株式会社 防泄漏抛光垫及其制造方法
KR101890331B1 (ko) 2017-10-16 2018-08-21 에스케이씨 주식회사 누수 방지된 연마패드 및 이의 제조방법

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4179488A (en) * 1976-03-31 1979-12-18 Yoshino Kogyosho Co., Ltd. Method of making a frosted bottle of saturated polyester
US4564497A (en) * 1982-07-28 1986-01-14 Yoshino Kogyosho Co., Ltd. Method of producing bottles of saturated polyester
US4728559A (en) * 1987-07-16 1988-03-01 Eastman Kodak Company Thermoformed plastic containers with transparent windows and method of making same
US5182070A (en) * 1991-04-08 1993-01-26 The Torrington Company Process for molding polymer bearing cage with amorphous case
US5413941A (en) 1994-01-06 1995-05-09 Micron Technology, Inc. Optical end point detection methods in semiconductor planarizing polishing processes
US5893796A (en) 1995-03-28 1999-04-13 Applied Materials, Inc. Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus
JP2796077B2 (ja) * 1995-06-08 1998-09-10 松下電器産業株式会社 基板の研磨装置及び基板の研磨方法
US5605760A (en) 1995-08-21 1997-02-25 Rodel, Inc. Polishing pads
JPH09277162A (ja) * 1996-04-12 1997-10-28 Nikon Corp 半導体研磨装置
US6074287A (en) * 1996-04-12 2000-06-13 Nikon Corporation Semiconductor wafer polishing apparatus
AU6959798A (en) * 1997-04-16 1998-11-11 Husky Injection Molding Systems, Inc. Partial crystallization method and apparatus of amorphous plastic articles

Similar Documents

Publication Publication Date Title
BE2016C018I2 (enExample)
BE2012C026I2 (enExample)
BE2010C008I2 (enExample)
BRPI0113420B8 (enExample)
JP2002169407A5 (enExample)
JP2003502639A5 (enExample)
BR0112866A2 (enExample)
BY5768C1 (enExample)
CN300955183S (zh) 连接件
CN3137476S (enExample)
CN3141860S (enExample)
AU2000280319A8 (enExample)
BY6855C1 (enExample)
CL2006000179A1 (enExample)
AU2000270757A8 (enExample)
CN3133795S (enExample)
CN3133951S (enExample)
CN3134731S (enExample)
CN3135470S (enExample)
CN3135585S (enExample)
CN3135639S (enExample)
CN3135640S (enExample)
CN3136653S (enExample)
CN3136792S (enExample)
AU2002213435A8 (enExample)