JP2003340359A - 高精度スピン成膜方法 - Google Patents

高精度スピン成膜方法

Info

Publication number
JP2003340359A
JP2003340359A JP2002158113A JP2002158113A JP2003340359A JP 2003340359 A JP2003340359 A JP 2003340359A JP 2002158113 A JP2002158113 A JP 2002158113A JP 2002158113 A JP2002158113 A JP 2002158113A JP 2003340359 A JP2003340359 A JP 2003340359A
Authority
JP
Japan
Prior art keywords
ultraviolet light
curable resin
viscosity
forming method
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002158113A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003340359A5 (enExample
Inventor
Tsutomu Fujii
努 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2002158113A priority Critical patent/JP2003340359A/ja
Publication of JP2003340359A publication Critical patent/JP2003340359A/ja
Publication of JP2003340359A5 publication Critical patent/JP2003340359A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP2002158113A 2002-05-30 2002-05-30 高精度スピン成膜方法 Pending JP2003340359A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002158113A JP2003340359A (ja) 2002-05-30 2002-05-30 高精度スピン成膜方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002158113A JP2003340359A (ja) 2002-05-30 2002-05-30 高精度スピン成膜方法

Publications (2)

Publication Number Publication Date
JP2003340359A true JP2003340359A (ja) 2003-12-02
JP2003340359A5 JP2003340359A5 (enExample) 2005-10-06

Family

ID=29773614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002158113A Pending JP2003340359A (ja) 2002-05-30 2002-05-30 高精度スピン成膜方法

Country Status (1)

Country Link
JP (1) JP2003340359A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004095108A (ja) * 2002-09-03 2004-03-25 Global Mach Kk 光学記録媒体の製造方法
EP1520865A2 (en) 2003-09-30 2005-04-06 Nippon Shokubai Co., Ltd. Water-based emulsion for vibration damper
WO2006030494A1 (ja) * 2004-09-14 2006-03-23 Origin Electric Company, Limited 樹脂膜の形成方法及び装置
JP2009514671A (ja) * 2005-11-08 2009-04-09 ジングルス・テヒノロギース・アクチェンゲゼルシャフト スピンコートにより膜厚を制御する方法および装置
US8088438B2 (en) 2004-06-03 2012-01-03 Shibaura Mechatronics Corporation Resin layer formation method, resin layer formation device, and disk manufacturing method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004095108A (ja) * 2002-09-03 2004-03-25 Global Mach Kk 光学記録媒体の製造方法
EP1520865A2 (en) 2003-09-30 2005-04-06 Nippon Shokubai Co., Ltd. Water-based emulsion for vibration damper
US8088438B2 (en) 2004-06-03 2012-01-03 Shibaura Mechatronics Corporation Resin layer formation method, resin layer formation device, and disk manufacturing method
US8220410B2 (en) 2004-06-03 2012-07-17 Shibaura Mechatronics Corporation Resin layer formation method, resin layer formation device, disk, and disk manufacturing method
US8475870B2 (en) 2004-06-03 2013-07-02 Shibaura Mechatronics Corporation Resin layer formation method, resin layer formation device, disk and disk manufacturing method
WO2006030494A1 (ja) * 2004-09-14 2006-03-23 Origin Electric Company, Limited 樹脂膜の形成方法及び装置
JP2009514671A (ja) * 2005-11-08 2009-04-09 ジングルス・テヒノロギース・アクチェンゲゼルシャフト スピンコートにより膜厚を制御する方法および装置

Similar Documents

Publication Publication Date Title
JP3988834B2 (ja) 樹脂層形成方法及び樹脂層形成装置、ディスク及びディスク製造方法
JP5457866B2 (ja) スピンコート方法及びスピンコーター
US20100024974A1 (en) Bonding method and bonding apparatus
CN1655265B (zh) 制造光学信息记录介质的方法
JP2003340359A (ja) 高精度スピン成膜方法
US20030145941A1 (en) Method and apparatus for manufacturing an optical disc
RU2395348C2 (ru) Способ и устройство для управления толщинами слоя покрытия при нанесении центрифугированием
JP3680057B2 (ja) 記録媒体およびその製造方法
JPH064910A (ja) 光ディスクの製造方法
JP2004130298A (ja) 塗膜形成方法、被塗布物及びディスク
JP2006277803A (ja) 樹脂層形成装置及び樹脂層形成方法
JP2001126322A (ja) 情報記録媒体用基板の製造方法
TWI281154B (en) Recording medium producing method, recording medium producing apparatus and recording medium
JPH09265672A (ja) 光ディスクの貼り合わせ方法および貼り合わせ装置
JPH05253535A (ja) 回転塗布方法
WO2004003902A1 (ja) 光記録媒体、光記録媒体の製造方法及び製造装置
JP4774364B2 (ja) 光ディスクの製造装置及びその製造方法
JPS63307909A (ja) 樹脂円板の製造方法
JPH05337434A (ja) 回転塗布方法
JP2007250023A (ja) スピンコーティング方法及びその方法で製造された光ディスク
JP2000311394A (ja) 光学式記録媒体の製造方法
JP2006040396A (ja) 情報記録媒体の製造方法および情報記録媒体
JP2001134990A (ja) 光学記録ディスクの製造方法及び製造装置
JPS63255850A (ja) 光学式記録媒体の基板の製造方法
JPH0752523B2 (ja) 記録再生用のデイスク基板とその製造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050527

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050527

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20070607

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070703

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070828

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20080924