JP2003315296A5 - - Google Patents
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- Publication number
- JP2003315296A5 JP2003315296A5 JP2002121228A JP2002121228A JP2003315296A5 JP 2003315296 A5 JP2003315296 A5 JP 2003315296A5 JP 2002121228 A JP2002121228 A JP 2002121228A JP 2002121228 A JP2002121228 A JP 2002121228A JP 2003315296 A5 JP2003315296 A5 JP 2003315296A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- base
- detection device
- gap
- detection apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims 28
- 239000000758 substrate Substances 0.000 claims 22
- 239000012212 insulator Substances 0.000 claims 11
- 239000000126 substance Substances 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 3
- 150000001875 compounds Chemical class 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 2
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002121228A JP3931294B2 (ja) | 2002-04-23 | 2002-04-23 | 検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002121228A JP3931294B2 (ja) | 2002-04-23 | 2002-04-23 | 検出装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003315296A JP2003315296A (ja) | 2003-11-06 |
| JP2003315296A5 true JP2003315296A5 (enExample) | 2005-09-22 |
| JP3931294B2 JP3931294B2 (ja) | 2007-06-13 |
Family
ID=29537232
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002121228A Expired - Lifetime JP3931294B2 (ja) | 2002-04-23 | 2002-04-23 | 検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3931294B2 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007086268A1 (ja) * | 2006-01-24 | 2007-08-02 | National Institute Of Advanced Industrial Science And Technology | 微小電極およびその製造方法 |
| JP2009063462A (ja) * | 2007-09-07 | 2009-03-26 | Sony Corp | 光学測定装置及び微粒子解析装置 |
| JP5681965B2 (ja) * | 2007-09-26 | 2015-03-11 | 瑞穂 森田 | 検出素子およびそれを用いた検出装置 |
| JP2015141074A (ja) * | 2014-01-28 | 2015-08-03 | 九州エレクトロン株式会社 | 微粒子検出装置 |
| CN107810411B (zh) * | 2015-06-30 | 2020-04-14 | 豪夫迈·罗氏有限公司 | 用于使用纳米制造的设备来测量分析物的设计和方法 |
| JP6645902B2 (ja) * | 2016-04-26 | 2020-02-14 | 京セラ株式会社 | 粒子状物質検出装置 |
| DE102016107888A1 (de) * | 2016-04-28 | 2017-11-02 | Heraeus Sensor Technology Gmbh | Sensor zur Detektion elektrisch leitfähiger und/oder polarisierbarer Partikel, Sensorsystem, Verfahren zum Betreiben eines Sensors und Verwendung eines derartigen Sensors |
| JP6656732B2 (ja) * | 2016-08-10 | 2020-03-04 | メイン—エナージア インコーポレイテッド | 太陽光電池モジュールの表面の汚染度測定装置 |
-
2002
- 2002-04-23 JP JP2002121228A patent/JP3931294B2/ja not_active Expired - Lifetime
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