JP3931294B2 - 検出装置 - Google Patents

検出装置 Download PDF

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Publication number
JP3931294B2
JP3931294B2 JP2002121228A JP2002121228A JP3931294B2 JP 3931294 B2 JP3931294 B2 JP 3931294B2 JP 2002121228 A JP2002121228 A JP 2002121228A JP 2002121228 A JP2002121228 A JP 2002121228A JP 3931294 B2 JP3931294 B2 JP 3931294B2
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substrate
substrates
detection
base
detection device
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Japanese (ja)
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JP2003315296A (ja
JP2003315296A5 (enExample
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瑞穂 森田
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  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2002121228A 2002-04-23 2002-04-23 検出装置 Expired - Lifetime JP3931294B2 (ja)

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JP2002121228A JP3931294B2 (ja) 2002-04-23 2002-04-23 検出装置

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JP2002121228A JP3931294B2 (ja) 2002-04-23 2002-04-23 検出装置

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JP2003315296A JP2003315296A (ja) 2003-11-06
JP2003315296A5 JP2003315296A5 (enExample) 2005-09-22
JP3931294B2 true JP3931294B2 (ja) 2007-06-13

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JP2002121228A Expired - Lifetime JP3931294B2 (ja) 2002-04-23 2002-04-23 検出装置

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Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007086268A1 (ja) * 2006-01-24 2007-08-02 National Institute Of Advanced Industrial Science And Technology 微小電極およびその製造方法
JP2009063462A (ja) * 2007-09-07 2009-03-26 Sony Corp 光学測定装置及び微粒子解析装置
JP5681965B2 (ja) * 2007-09-26 2015-03-11 瑞穂 森田 検出素子およびそれを用いた検出装置
JP2015141074A (ja) * 2014-01-28 2015-08-03 九州エレクトロン株式会社 微粒子検出装置
CN107810411B (zh) * 2015-06-30 2020-04-14 豪夫迈·罗氏有限公司 用于使用纳米制造的设备来测量分析物的设计和方法
JP6645902B2 (ja) * 2016-04-26 2020-02-14 京セラ株式会社 粒子状物質検出装置
DE102016107888A1 (de) * 2016-04-28 2017-11-02 Heraeus Sensor Technology Gmbh Sensor zur Detektion elektrisch leitfähiger und/oder polarisierbarer Partikel, Sensorsystem, Verfahren zum Betreiben eines Sensors und Verwendung eines derartigen Sensors
JP6656732B2 (ja) * 2016-08-10 2020-03-04 メイン—エナージア インコーポレイテッド 太陽光電池モジュールの表面の汚染度測定装置

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JP2003315296A (ja) 2003-11-06

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