JP5681965B2 - 検出素子およびそれを用いた検出装置 - Google Patents
検出素子およびそれを用いた検出装置 Download PDFInfo
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- JP5681965B2 JP5681965B2 JP2007248433A JP2007248433A JP5681965B2 JP 5681965 B2 JP5681965 B2 JP 5681965B2 JP 2007248433 A JP2007248433 A JP 2007248433A JP 2007248433 A JP2007248433 A JP 2007248433A JP 5681965 B2 JP5681965 B2 JP 5681965B2
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Images
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/06—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a liquid
- G01N27/07—Construction of measuring vessels; Electrodes therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/1023—Microstructural devices for non-optical measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/1031—Investigating individual particles by measuring electrical or magnetic effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/01—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials specially adapted for biological cells, e.g. blood cells
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/01—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials specially adapted for biological cells, e.g. blood cells
- G01N2015/019—Biological contaminants; Fouling
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- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pathology (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- General Physics & Mathematics (AREA)
- Dispersion Chemistry (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Description
図1は、この発明の実施の形態1による検出素子の構成を示す斜視図である。図1を参照して、検出素子10は、基体1,4と、絶縁部材2,3と、支持体5と、電極6,7とを備える。
図15は、実施の形態2による検出素子の構成を示す斜視図である。図15を参照して、実施の形態2による検出素子11は、図1に示す検出素子10の絶縁部材3を絶縁部材31に代えたものであり、その他は、検出素子10と同じである。
図16は、実施の形態3による検出素子の構成を示す斜視図である。図16を参照して、実施の形態3による検出素子12は、図1に示す検出素子10の絶縁部材3を削除したものであり、その他は、検出素子10と同じである。
図17は、実施の形態4による検出素子の構成を示す斜視図である。図17を参照して、実施の形態4による検出素子13は、図1に示す検出素子10の基体1、絶縁部材2および電極6を支持体32、絶縁部材33,34、基体35および電極36に代えたものであり、その他は、検出素子10と同じである。
図20は、実施の形態5による検出素子の構成を示す斜視図である。図20を参照して、実施の形態5による検出素子14は、図1に示す検出素子10の絶縁部材2を絶縁部材39に代えたものであり、その他は、検出素子10と同じである。
図23は、実施の形態6による検出素子の構成を示す斜視図である。図23を参照して、実施の形態6による検出素子15は、支持体42,46と、基体43,47と、絶縁部材44,45と、電極48,49とを備える。
図25は、実施の形態7による検出素子の構成を示す斜視図である。図25を参照して、実施の形態7による検出素子16は、図1に示す検出素子10の絶縁部材2,3をそれぞれ絶縁部材51,52に代え、基体4を基体53,54に代え、電極7を電極55,56に代えたものであり、その他は、検出素子10と同じである。
図32は、実施の形態8による検出素子の構成を示す斜視図である。図32を参照して、実施の形態8による検出素子17は、基体62,66と、絶縁部材63,64と、複数の量子ドット65と、電極67,68とを備える。
図42は、実施の形態9による検出素子の構成を示す斜視図である。図42を参照して、実施の形態9による検出素子19は、基体81,85と、絶縁部材82,83と、複数の絶縁膜84と、電極86,87とを備える。
Claims (12)
- 平板形状を有し、金属、金属合金、金属半導体化合物、半金属、半導体、透明導電体および導電性有機物のいずれかからなる第1の基体と、
前記第1の基体に対向して設けられるとともに平板形状を有し、金属、金属合金、金属半導体化合物、半金属、半導体、透明導電体および導電性有機物のいずれかからなる第2の基体と、
前記第1の基体に接して設けられ、第1および第2の厚膜部と、前記第1の厚膜部と前記第2の厚膜部との間に配置された薄膜部とを有する第1の絶縁部材と、
平板形状を有し、前記第1の絶縁部材の前記第1および第2の厚膜部に接して配置された第2の絶縁部材と、
前記第1の絶縁部材の前記第1の厚膜部、前記第2の厚膜部および前記薄膜部と前記第2の絶縁部材とによって囲まれた間隙部とを備え、
前記間隙部は、前記第2の絶縁部材の厚み方向と前記第1の厚膜部から前記第2の厚膜部へ向かう方向とに垂直な方向において前記第1の絶縁部材を貫通し、
前記第2の基体は、前記第2の絶縁部材の前記間隙部と反対側の面に接しており、
前記第1の厚膜部から前記第2の厚膜部へ向かう方向において、前記第2の基体の両端部は、前記間隙部の内側に存在する、検出素子。 - 平板形状を有し、金属、金属合金、金属半導体化合物、半金属、半導体、透明導電体および導電性有機物のいずれかからなる第1の基体と、
前記第1の基体に対向して設けられるとともに平板形状を有し、金属、金属合金、金属半導体化合物、半金属、半導体、透明導電体および導電性有機物のいずれかからなる第2の基体と、
前記第1の基体に接して設けられ、厚膜部と薄膜部とを有する第1の絶縁部材と、
前記第1の絶縁部材の前記厚膜部に接して設けられた第2の絶縁部材と、
前記第1の絶縁部材の前記厚膜部および前記薄膜部と、前記第2の絶縁部材とによって囲まれるとともに、前記厚膜部に対向する側に開口部を有する間隙部とを備え、
前記厚膜部から前記厚膜部に対向する側へ向かう方向と前記第1の絶縁部材の厚み方向とに垂直な方向における前記間隙部の両端部は、開放されており、
前記第2の基体は、前記第2の絶縁部材の前記間隙部と反対側の面に接しており、
前記厚膜部から前記厚膜部に対向する側へ向かう方向において、前記第2の基体の両端は、前記間隙部からはみ出していない、検出素子。 - 前記第1の基体は、前記半導体からなり、
前記第1の絶縁部材は、前記第1の基体の材料を含む絶縁物からなる、請求項1または請求項2に記載の検出素子。 - 前記第1の基体は、シリコン材料からなり、
前記第1の絶縁部材は、前記第1の基体の熱酸化物、前記第1の基体の熱窒化物、前記第1の基体の熱炭化物、およびこれらの化合物のいずれかからなる、請求項3に記載の検出素子。 - 前記第1の基体は、シリコン材料からなり、
前記第1の絶縁部材は、前記第1の基体の熱酸化物、前記第1の基体の熱窒化物、前記第1の基体の熱炭化物、およびこれらの化合物のいずれかからなり、
前記第2の絶縁部材は、前記第1の絶縁部材と異なる絶縁材料からなる、請求項3に記載の検出素子。 - 前記第1の絶縁部材は、前記熱酸化物からなり、
前記第2の絶縁部材は、前記熱酸化物と異なるシリコン酸化膜からなる、請求項5に記載の検出素子。 - 前記第1の基体は、前記金属からなり、
前記第2の基体は、前記半導体からなる、請求項1または請求項2に記載の検出素子。 - 前記第1の基体は、p型の半導体からなり、
前記第2の基体は、n型の半導体からなる、請求項1または請求項2に記載の検出素子。 - 平板形状を有し、金属、金属合金、金属半導体化合物、半金属、半導体、透明導電体および導電性有機物のいずれかからなる第1の基体と、
前記第1の基体に対向して設けられるとともに平板形状を有し、金属、金属合金、金属半導体化合物、半金属、半導体、透明導電体および導電性有機物のいずれかからなる第2の基体と、
前記第1の基体に接して設けられ、第1および第2の厚膜部と、前記第1の厚膜部と前記第2の厚膜部との間に配置された薄膜部とを有する第1の絶縁部材と、
平板形状を有するとともに石英からなり、前記第1の絶縁部材の前記第1および第2の厚膜部に接して配置された支持体と、
前記第1の絶縁部材の前記第1の厚膜部、前記第2の厚膜部および前記薄膜部と前記支持体とによって囲まれた間隙部とを備え、
前記間隙部は、前記支持体の厚み方向と前記第1の厚膜部から前記第2の厚膜部へ向かう方向とに垂直な方向において前記第1の絶縁部材を貫通し、
前記第2の基体は、前記支持体の前記間隙部側の面に接しており、
前記第1の厚膜部から前記第2の厚膜部へ向かう方向において、前記第2の基体の両端部は、前記間隙部の内側に存在する、検出素子。 - 当該検出素子の装着の履歴を示すマークが付される装着検出部をさらに備える、請求項1または請求項2に記載の検出素子。
- 請求項10に記載の検出素子と、
前記検出素子が装着される装着部と、
前記検出素子の前記第1および第2の基体間に電圧を印加する電源と、
前記第1および第2の基体間に流れる電流を測定する測定部と、
前記測定部によって測定された電流に基づいて検出対象物を検出または分析する検出/分析部とを備え、
前記検出素子の前記装着検出部は、前記検出素子が前記装着部に装着されることにより前記マークが付される、検出装置。 - 請求項1または請求項2に記載の検出素子と、
前記検出素子の前記第1および第2の基体間に電圧を印加する電源と、
前記第1および第2の基体間に流れる電流を測定する測定部と、
前記測定部によって測定された電流に基づいて検出対象物を検出または分析する検出/分析部とを備える検出装置。
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JP2015141074A (ja) * | 2014-01-28 | 2015-08-03 | 九州エレクトロン株式会社 | 微粒子検出装置 |
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