JP2003254285A - ポンプ装置 - Google Patents

ポンプ装置

Info

Publication number
JP2003254285A
JP2003254285A JP2002053198A JP2002053198A JP2003254285A JP 2003254285 A JP2003254285 A JP 2003254285A JP 2002053198 A JP2002053198 A JP 2002053198A JP 2002053198 A JP2002053198 A JP 2002053198A JP 2003254285 A JP2003254285 A JP 2003254285A
Authority
JP
Japan
Prior art keywords
rotor
bearing
pump device
temperature
rotor shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2002053198A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003254285A5 (enrdf_load_stackoverflow
Inventor
Tsuyoshi Kabasawa
剛志 樺澤
Manabu Nonaka
学 野中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
BOC Edwards Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Edwards Technologies Ltd filed Critical BOC Edwards Technologies Ltd
Priority to JP2002053198A priority Critical patent/JP2003254285A/ja
Priority to US10/370,985 priority patent/US20030161733A1/en
Priority to EP20030251052 priority patent/EP1340918A1/en
Priority to KR10-2003-0011962A priority patent/KR20030071525A/ko
Publication of JP2003254285A publication Critical patent/JP2003254285A/ja
Publication of JP2003254285A5 publication Critical patent/JP2003254285A5/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Control Of Positive-Displacement Air Blowers (AREA)
JP2002053198A 2002-02-28 2002-02-28 ポンプ装置 Withdrawn JP2003254285A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2002053198A JP2003254285A (ja) 2002-02-28 2002-02-28 ポンプ装置
US10/370,985 US20030161733A1 (en) 2002-02-28 2003-02-20 Pump apparatus
EP20030251052 EP1340918A1 (en) 2002-02-28 2003-02-21 Turbomolecular pump
KR10-2003-0011962A KR20030071525A (ko) 2002-02-28 2003-02-26 펌프 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002053198A JP2003254285A (ja) 2002-02-28 2002-02-28 ポンプ装置

Publications (2)

Publication Number Publication Date
JP2003254285A true JP2003254285A (ja) 2003-09-10
JP2003254285A5 JP2003254285A5 (enrdf_load_stackoverflow) 2005-08-25

Family

ID=27678550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002053198A Withdrawn JP2003254285A (ja) 2002-02-28 2002-02-28 ポンプ装置

Country Status (4)

Country Link
US (1) US20030161733A1 (enrdf_load_stackoverflow)
EP (1) EP1340918A1 (enrdf_load_stackoverflow)
JP (1) JP2003254285A (enrdf_load_stackoverflow)
KR (1) KR20030071525A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009103138A (ja) * 2009-02-18 2009-05-14 Shimadzu Corp ターボ分子ポンプ
WO2012105116A1 (ja) * 2011-02-04 2012-08-09 エドワーズ株式会社 真空ポンプの回転体と、これに対向設置する固定部材、及び、これらを備えた真空ポンプ

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005320905A (ja) 2004-05-10 2005-11-17 Boc Edwards Kk 真空ポンプ
KR100604894B1 (ko) * 2004-08-21 2006-07-28 삼성전자주식회사 반도체 제조설비의 회전운동장치
KR100725524B1 (ko) * 2006-09-01 2007-06-08 삼성광주전자 주식회사 펌프 유량제어방법 및 펌프 유량제어시스템
JP4702236B2 (ja) * 2006-09-12 2011-06-15 株式会社豊田自動織機 真空ポンプの運転停止制御方法及び運転停止制御装置
DE102007027711A1 (de) * 2007-06-15 2008-12-18 Pfeiffer Vacuum Gmbh Verfahren zum Betreiben einer Anordnung mit Vakuumpumpe und Anordnung mit einer Vakuumpumpe
US8459392B2 (en) 2007-06-22 2013-06-11 Bombardier Recreational Products Inc. Snowmobile having electronically controlled lubrication
WO2011016223A1 (ja) * 2009-08-04 2011-02-10 キヤノンアネルバ株式会社 加熱処理装置および半導体デバイスの製造方法
WO2011021428A1 (ja) * 2009-08-21 2011-02-24 エドワーズ株式会社 真空ポンプ
CN103857918B (zh) * 2011-10-31 2016-08-24 埃地沃兹日本有限公司 固定部件及真空泵
DE102013207059A1 (de) 2013-04-18 2014-10-23 Agilent Technologies, Inc. - A Delaware Corporation - Turbomolekularpumpe mit Stator- und/oder Rotorelementen mit Metalloxid-Oberfläche mit hohem Strahlungsvermögen
CN104895808B (zh) * 2014-03-04 2017-06-06 上海复谣真空科技有限公司 复合分子泵
JP7119312B2 (ja) * 2017-09-04 2022-08-17 株式会社島津製作所 磁気軸受制御装置および真空ポンプ
JP7347964B2 (ja) * 2019-05-30 2023-09-20 エドワーズ株式会社 真空ポンプ及び該真空ポンプに備えられた保護部
JP2023000891A (ja) * 2021-06-18 2023-01-04 エドワーズ株式会社 真空ポンプ

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2444099C3 (de) * 1974-09-14 1979-04-12 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Berührungsloses Lagerelement für mindestens teilweise magnetisierbare Körper
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US5618167A (en) * 1994-07-28 1997-04-08 Ebara Corporation Vacuum pump apparatus having peltier elements for cooling the motor & bearing housing and heating the outer housing
JP3160504B2 (ja) * 1995-09-05 2001-04-25 三菱重工業株式会社 ターボ分子ポンプ
JP3550465B2 (ja) * 1996-08-30 2004-08-04 株式会社日立製作所 ターボ真空ポンプ及びその運転方法
US6114788A (en) * 1996-12-10 2000-09-05 Seagate Technology L.L.C. Motor/active magnetic bearing combination structure
JP3057486B2 (ja) * 1997-01-22 2000-06-26 セイコー精機株式会社 ターボ分子ポンプ
JP3382627B2 (ja) * 1997-07-16 2003-03-04 三菱重工業株式会社 モータ駆動高速回転体駆動制御装置と該駆動制御装置に使用される機種判別方法
US6123522A (en) * 1997-07-22 2000-09-26 Koyo Seiko Co., Ltd. Turbo molecular pump
JP3735749B2 (ja) * 1997-07-22 2006-01-18 光洋精工株式会社 ターボ分子ポンプ
DE69924556D1 (de) * 1998-04-28 2005-05-12 Matsushita Electric Ind Co Ltd Magnetlager
US6095754A (en) * 1998-05-06 2000-08-01 Applied Materials, Inc. Turbo-Molecular pump with metal matrix composite rotor and stator
JP3788558B2 (ja) * 1999-03-23 2006-06-21 株式会社荏原製作所 ターボ分子ポンプ
US6351983B1 (en) * 1999-04-12 2002-03-05 The Regents Of The University Of California Portable gas chromatograph mass spectrometer for on-site chemical analyses
JP3916821B2 (ja) * 1999-12-13 2007-05-23 株式会社荏原製作所 磁気浮上制御装置
JP2002048088A (ja) * 2000-07-31 2002-02-15 Seiko Instruments Inc 真空ポンプ
DE10053664A1 (de) * 2000-10-28 2002-05-08 Leybold Vakuum Gmbh Mechanische kinetische Vakuumpumpe
US6700258B2 (en) * 2001-05-23 2004-03-02 Calnetix Magnetic thrust bearing with permanent bias flux

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009103138A (ja) * 2009-02-18 2009-05-14 Shimadzu Corp ターボ分子ポンプ
WO2012105116A1 (ja) * 2011-02-04 2012-08-09 エドワーズ株式会社 真空ポンプの回転体と、これに対向設置する固定部材、及び、これらを備えた真空ポンプ

Also Published As

Publication number Publication date
US20030161733A1 (en) 2003-08-28
KR20030071525A (ko) 2003-09-03
EP1340918A1 (en) 2003-09-03

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