JP2003252885A5 - - Google Patents
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- Publication number
- JP2003252885A5 JP2003252885A5 JP2003008094A JP2003008094A JP2003252885A5 JP 2003252885 A5 JP2003252885 A5 JP 2003252885A5 JP 2003008094 A JP2003008094 A JP 2003008094A JP 2003008094 A JP2003008094 A JP 2003008094A JP 2003252885 A5 JP2003252885 A5 JP 2003252885A5
- Authority
- JP
- Japan
- Prior art keywords
- metal
- group
- alkyl
- substituted
- monoalkyl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US34972502P | 2002-01-17 | 2002-01-17 | |
| US60/349725 | 2002-01-17 | ||
| US35512402P | 2002-02-08 | 2002-02-08 | |
| US60/355124 | 2002-02-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003252885A JP2003252885A (ja) | 2003-09-10 |
| JP2003252885A5 true JP2003252885A5 (enExample) | 2006-03-09 |
Family
ID=27616746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003008094A Withdrawn JP2003252885A (ja) | 2002-01-17 | 2003-01-16 | アルキル第ｖａ族金属化合物 |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP1335416A1 (enExample) |
| JP (1) | JP2003252885A (enExample) |
| KR (1) | KR20030063175A (enExample) |
| CN (1) | CN1445233A (enExample) |
| TW (1) | TW200302203A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108409784B (zh) * | 2017-02-09 | 2020-07-14 | 上海交通大学 | 一种磷手性重要中间体的制备方法 |
| KR102680700B1 (ko) | 2017-12-20 | 2024-07-01 | 바스프 에스이 | 금속-함유 필름의 생성 방법 |
| KR102509744B1 (ko) * | 2018-07-30 | 2023-03-15 | 주식회사 유피케미칼 | 알루미늄 화합물 및 이를 사용한 알루미늄-함유 막의 형성 방법 |
| TWI862702B (zh) * | 2019-10-08 | 2024-11-21 | 法商液態空氣喬治斯克勞帝方法研究開發股份有限公司 | 用於沉積含鋰層、島或簇的鋰前驅體及使用彼之方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1344051A (en) * | 1951-08-09 | 1974-01-16 | Supply Minister Of | Manufacture of organic phosphorus compounds |
| US4734514A (en) * | 1984-10-25 | 1988-03-29 | Morton Thiokol, Inc. | Hydrocarbon-substituted analogs of phosphine and arsine, particularly for metal organic chemical vapor deposition |
| US4942252A (en) * | 1988-08-16 | 1990-07-17 | Cvd Incorporated | Synthesis of phosphorus and arsenic, halides and hydrides |
| JP3912436B2 (ja) * | 1996-11-29 | 2007-05-09 | 日本化学工業株式会社 | 高純度モノアルキルホスフィンおよびその製造方法 |
-
2003
- 2003-01-16 EP EP03250286A patent/EP1335416A1/en not_active Withdrawn
- 2003-01-16 JP JP2003008094A patent/JP2003252885A/ja not_active Withdrawn
- 2003-01-17 TW TW092100959A patent/TW200302203A/zh unknown
- 2003-01-17 CN CN03128658A patent/CN1445233A/zh active Pending
- 2003-01-17 KR KR10-2003-0003194A patent/KR20030063175A/ko not_active Withdrawn
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