JP2003238122A - 三フッ化窒素の製造方法及び製造装置 - Google Patents
三フッ化窒素の製造方法及び製造装置Info
- Publication number
- JP2003238122A JP2003238122A JP2003029347A JP2003029347A JP2003238122A JP 2003238122 A JP2003238122 A JP 2003238122A JP 2003029347 A JP2003029347 A JP 2003029347A JP 2003029347 A JP2003029347 A JP 2003029347A JP 2003238122 A JP2003238122 A JP 2003238122A
- Authority
- JP
- Japan
- Prior art keywords
- working fluid
- reactor
- mixing zone
- liquid
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 30
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 title claims abstract description 24
- 239000012530 fluid Substances 0.000 claims abstract description 103
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 47
- 239000011737 fluorine Substances 0.000 claims abstract description 47
- 238000002156 mixing Methods 0.000 claims abstract description 36
- KVBCYCWRDBDGBG-UHFFFAOYSA-N azane;dihydrofluoride Chemical compound [NH4+].F.[F-] KVBCYCWRDBDGBG-UHFFFAOYSA-N 0.000 claims abstract description 28
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims abstract description 26
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims abstract description 25
- 239000007795 chemical reaction product Substances 0.000 claims abstract description 9
- 238000006243 chemical reaction Methods 0.000 claims description 60
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 46
- 239000007788 liquid Substances 0.000 claims description 43
- 239000007789 gas Substances 0.000 claims description 38
- 239000000047 product Substances 0.000 claims description 17
- 238000004891 communication Methods 0.000 claims description 15
- 239000000155 melt Substances 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 8
- 230000008016 vaporization Effects 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 claims description 3
- 230000002378 acidificating effect Effects 0.000 claims description 2
- 230000000737 periodic effect Effects 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims description 2
- 229910000039 hydrogen halide Inorganic materials 0.000 claims 1
- 239000012433 hydrogen halide Substances 0.000 claims 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 abstract 1
- 229910017855 NH 4 F Inorganic materials 0.000 description 44
- 239000000376 reactant Substances 0.000 description 33
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 19
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 239000000126 substance Substances 0.000 description 11
- 229910021529 ammonia Inorganic materials 0.000 description 8
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 238000012546 transfer Methods 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 239000006227 byproduct Substances 0.000 description 6
- KEUKAQNPUBYCIC-UHFFFAOYSA-N ethaneperoxoic acid;hydrogen peroxide Chemical compound OO.CC(=O)OO KEUKAQNPUBYCIC-UHFFFAOYSA-N 0.000 description 6
- 229910000792 Monel Inorganic materials 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 238000009834 vaporization Methods 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 238000002161 passivation Methods 0.000 description 4
- 230000002441 reversible effect Effects 0.000 description 4
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- -1 ammonium poly (hydrogen fluoride) complexes Chemical class 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 239000013626 chemical specie Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000013067 intermediate product Substances 0.000 description 1
- 239000011872 intimate mixture Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910001512 metal fluoride Inorganic materials 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 235000013024 sodium fluoride Nutrition 0.000 description 1
- 239000011775 sodium fluoride Substances 0.000 description 1
- 239000011949 solid catalyst Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000001356 surgical procedure Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01C—AMMONIA; CYANOGEN; COMPOUNDS THEREOF
- C01C1/00—Ammonia; Compounds thereof
- C01C1/16—Halides of ammonium
- C01C1/162—Ammonium fluoride
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/40—Static mixers
- B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
- B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
- B01F25/435—Mixing tubes composed of concentric tubular members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J10/00—Chemical processes in general for reacting liquid with gaseous media other than in the presence of solid particles, or apparatus specially adapted therefor
- B01J10/002—Chemical processes in general for reacting liquid with gaseous media other than in the presence of solid particles, or apparatus specially adapted therefor carried out in foam, aerosol or bubbles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/24—Stationary reactors without moving elements inside
- B01J19/2415—Tubular reactors
- B01J19/244—Concentric tubes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/24—Stationary reactors without moving elements inside
- B01J19/2455—Stationary reactors without moving elements inside provoking a loop type movement of the reactants
- B01J19/246—Stationary reactors without moving elements inside provoking a loop type movement of the reactants internally, i.e. the mixture circulating inside the vessel such that the upward stream is separated physically from the downward stream(s)
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
- C01B21/0832—Binary compounds of nitrogen with halogens
- C01B21/0835—Nitrogen trifluoride
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/19—Fluorine; Hydrogen fluoride
- C01B7/191—Hydrogen fluoride
- C01B7/194—Preparation from ammonium fluoride
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01C—AMMONIA; CYANOGEN; COMPOUNDS THEREOF
- C01C1/00—Ammonia; Compounds thereof
- C01C1/16—Halides of ammonium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2215/00—Auxiliary or complementary information in relation with mixing
- B01F2215/04—Technical information in relation with mixing
- B01F2215/0413—Numerical information
- B01F2215/0436—Operational information
- B01F2215/0468—Numerical pressure values
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2215/00—Auxiliary or complementary information in relation with mixing
- B01F2215/04—Technical information in relation with mixing
- B01F2215/0413—Numerical information
- B01F2215/0436—Operational information
- B01F2215/0472—Numerical temperature values
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/20—Jet mixers, i.e. mixers using high-speed fluid streams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/40—Static mixers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00002—Chemical plants
- B01J2219/00004—Scale aspects
- B01J2219/00006—Large-scale industrial plants
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00074—Controlling the temperature by indirect heating or cooling employing heat exchange fluids
- B01J2219/00087—Controlling the temperature by indirect heating or cooling employing heat exchange fluids with heat exchange elements outside the reactor
- B01J2219/00094—Jackets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00074—Controlling the temperature by indirect heating or cooling employing heat exchange fluids
- B01J2219/00105—Controlling the temperature by indirect heating or cooling employing heat exchange fluids part or all of the reactants being heated or cooled outside the reactor while recycling
- B01J2219/00108—Controlling the temperature by indirect heating or cooling employing heat exchange fluids part or all of the reactants being heated or cooled outside the reactor while recycling involving reactant vapours
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Dispersion Chemistry (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/071114 | 2002-02-08 | ||
| US10/071,114 US6908601B2 (en) | 2002-02-08 | 2002-02-08 | Method for the production of nitrogen trifluoride |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003238122A true JP2003238122A (ja) | 2003-08-27 |
| JP2003238122A5 JP2003238122A5 (enExample) | 2006-03-02 |
Family
ID=27659163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003029347A Pending JP2003238122A (ja) | 2002-02-08 | 2003-02-06 | 三フッ化窒素の製造方法及び製造装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US6908601B2 (enExample) |
| EP (1) | EP1338559A3 (enExample) |
| JP (1) | JP2003238122A (enExample) |
| KR (1) | KR20030067587A (enExample) |
| CN (1) | CN1261349C (enExample) |
| SG (1) | SG102067A1 (enExample) |
| TW (1) | TW200303287A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007119294A (ja) * | 2005-10-27 | 2007-05-17 | Showa Denko Kk | 三フッ化窒素の製造方法 |
| JP2007176769A (ja) * | 2005-12-28 | 2007-07-12 | Showa Denko Kk | 三フッ化窒素の製造方法 |
| WO2009084475A1 (ja) | 2007-12-27 | 2009-07-09 | Central Glass Co., Ltd. | フッ素化気体化合物の製造方法及び装置 |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100452233B1 (ko) * | 2002-07-19 | 2004-10-12 | 한국과학기술연구원 | 젯트루프식 분사형 반응기를 이용한 삼불화질소 제조방법 |
| US20040096386A1 (en) * | 2002-11-19 | 2004-05-20 | Syvret Robert George | Method for nitrogen trifluoride production |
| US7128885B2 (en) * | 2002-12-23 | 2006-10-31 | The Boc Group, Inc. | NF3 production reactor |
| US7582793B2 (en) * | 2004-09-02 | 2009-09-01 | Eastman Chemical Company | Optimized liquid-phase oxidation |
| US7910769B2 (en) | 2004-09-02 | 2011-03-22 | Eastman Chemical Company | Optimized liquid-phase oxidation |
| US7568361B2 (en) * | 2004-09-02 | 2009-08-04 | Eastman Chemical Company | Optimized liquid-phase oxidation |
| US7589231B2 (en) * | 2004-09-02 | 2009-09-15 | Eastman Chemical Company | Optimized liquid-phase oxidation |
| US7507857B2 (en) | 2004-09-02 | 2009-03-24 | Eastman Chemical Company | Optimized liquid-phase oxidation |
| US7381836B2 (en) | 2004-09-02 | 2008-06-03 | Eastman Chemical Company | Optimized liquid-phase oxidation |
| US7572936B2 (en) * | 2004-09-02 | 2009-08-11 | Eastman Chemical Company | Optimized liquid-phase oxidation |
| US7504535B2 (en) * | 2004-09-02 | 2009-03-17 | Eastman Chemical Company | Optimized liquid-phase oxidation |
| US7692036B2 (en) | 2004-11-29 | 2010-04-06 | Eastman Chemical Company | Optimized liquid-phase oxidation |
| US7692037B2 (en) * | 2004-09-02 | 2010-04-06 | Eastman Chemical Company | Optimized liquid-phase oxidation |
| US7045107B2 (en) * | 2004-09-20 | 2006-05-16 | Air Products And Chemicals, Inc. | Process for the production of nitrogen trifluoride |
| US7884232B2 (en) | 2005-06-16 | 2011-02-08 | Eastman Chemical Company | Optimized liquid-phase oxidation |
| US7413722B2 (en) * | 2005-08-04 | 2008-08-19 | Foosung Co., Ltd. | Method and apparatus for manufacturing nitrogen trifluoride |
| DE102008021628A1 (de) * | 2008-04-25 | 2009-12-24 | Ibh Engineering Gmbh | Vorrichtung und Verfahren sowie Verwendung eines Reaktors zur Herstellung von Roh,- Brenn- und Kraftstoffen aus organischen Substanzen |
| US8163262B1 (en) | 2011-01-04 | 2012-04-24 | Omotowa Bamidele A | Method for production of nitrogen trifluoride from trimethylsilylamines |
| JP2017512133A (ja) * | 2014-02-10 | 2017-05-18 | ハネウェル・インターナショナル・インコーポレーテッド | 液相フッ素化のための反応器デザイン |
| CN104043363A (zh) * | 2014-06-26 | 2014-09-17 | 苏州创维晟自动化科技有限公司 | 一种用于制造汽车内饰的自动化物料搅拌桶 |
| CN106397761B (zh) * | 2016-09-06 | 2021-06-18 | 天津长芦新材料研究院有限公司 | 氟化全氟聚醚酸端基的方法 |
| CN106311097B (zh) * | 2016-09-06 | 2018-12-14 | 天津长芦新材料研究院有限公司 | 气液接触反应装置在氟化全氟聚醚酸方面的应用 |
| CN112742232B (zh) * | 2019-10-29 | 2023-04-18 | 中国石油化工股份有限公司 | 一种喷氨静态混合器 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4001380A (en) | 1961-05-16 | 1977-01-04 | Allied Chemical Corporation | Manufacture of nitrogen trifluoride |
| US4091081A (en) | 1977-04-19 | 1978-05-23 | Air Products And Chemicals, Inc. | Preparation of nitrogen trifluoride |
| JPS6071503A (ja) | 1983-09-27 | 1985-04-23 | Central Glass Co Ltd | Νｆ↓３の製造法 |
| DE3722163A1 (de) | 1987-07-04 | 1989-01-12 | Kali Chemie Ag | Verfahren zur herstellung von nf(pfeil abwaerts)3(pfeil abwaerts) |
| EP0366078B1 (en) | 1988-10-25 | 1996-06-26 | MITSUI TOATSU CHEMICALS, Inc. | Method for Purifying nitrogen trifluoride gas |
| EP0424727B1 (en) | 1989-10-26 | 1995-04-19 | MITSUI TOATSU CHEMICALS, Inc. | Method for producing nitrogen trifluoride |
| JPH05105411A (ja) * | 1991-10-22 | 1993-04-27 | Onoda Cement Co Ltd | 三フツ化窒素の製造方法 |
| US5804447A (en) * | 1992-07-23 | 1998-09-08 | Basf Aktiengesellschaft | Use of compounds which absorb and/or fluoresce in the IR region as markers for liquids |
| US5628894A (en) | 1995-10-17 | 1997-05-13 | Florida Scientific Laboratories, Inc. | Nitrogen trifluoride process |
| US6010605A (en) | 1995-10-17 | 2000-01-04 | Florida Scientific Laboratories Inc. | Nitrogen trifluoride production apparatus |
| US5637285A (en) | 1996-01-30 | 1997-06-10 | Air Products And Chemicals, Inc. | Process for nitrogen trifluoride synthesis |
| US5933158A (en) * | 1997-09-09 | 1999-08-03 | Compaq Computer Corporation | Use of a link bit to fetch entries of a graphic address remapping table |
| DE19836807A1 (de) | 1998-08-14 | 2000-02-17 | Basf Ag | Verfahren zur Herstellung von Aldehyden und/oder Alkoholen oder Aminen |
| WO2001085603A2 (en) * | 2000-05-12 | 2001-11-15 | Showa Denko K. K. | Process for producing nitrogen trifluoride and use thereof |
| US6986874B2 (en) * | 2000-12-14 | 2006-01-17 | The Boc Group, Inc. | Method and apparatus for the production of nitrogen trifluoride |
-
2002
- 2002-02-08 US US10/071,114 patent/US6908601B2/en not_active Expired - Fee Related
-
2003
- 2003-01-17 SG SG200300103A patent/SG102067A1/en unknown
- 2003-02-05 EP EP03250729A patent/EP1338559A3/en not_active Withdrawn
- 2003-02-06 JP JP2003029347A patent/JP2003238122A/ja active Pending
- 2003-02-07 KR KR10-2003-0007854A patent/KR20030067587A/ko not_active Withdrawn
- 2003-02-07 TW TW092102526A patent/TW200303287A/zh unknown
- 2003-02-08 CN CNB031206875A patent/CN1261349C/zh not_active Expired - Fee Related
-
2004
- 2004-04-13 US US10/823,210 patent/US20040191156A1/en not_active Abandoned
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007119294A (ja) * | 2005-10-27 | 2007-05-17 | Showa Denko Kk | 三フッ化窒素の製造方法 |
| JP2007176769A (ja) * | 2005-12-28 | 2007-07-12 | Showa Denko Kk | 三フッ化窒素の製造方法 |
| WO2009084475A1 (ja) | 2007-12-27 | 2009-07-09 | Central Glass Co., Ltd. | フッ素化気体化合物の製造方法及び装置 |
| JP5413201B2 (ja) * | 2007-12-27 | 2014-02-12 | セントラル硝子株式会社 | フッ素化気体化合物の製造方法及び装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1449992A (zh) | 2003-10-22 |
| EP1338559A3 (en) | 2004-04-21 |
| US20040191156A1 (en) | 2004-09-30 |
| CN1261349C (zh) | 2006-06-28 |
| EP1338559A2 (en) | 2003-08-27 |
| US6908601B2 (en) | 2005-06-21 |
| TW200303287A (en) | 2003-09-01 |
| US20030152507A1 (en) | 2003-08-14 |
| SG102067A1 (en) | 2004-02-27 |
| KR20030067587A (ko) | 2003-08-14 |
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