JP2003227572A - 受動マイクロバルブ - Google Patents

受動マイクロバルブ

Info

Publication number
JP2003227572A
JP2003227572A JP2002279388A JP2002279388A JP2003227572A JP 2003227572 A JP2003227572 A JP 2003227572A JP 2002279388 A JP2002279388 A JP 2002279388A JP 2002279388 A JP2002279388 A JP 2002279388A JP 2003227572 A JP2003227572 A JP 2003227572A
Authority
JP
Japan
Prior art keywords
microvalve
substrate
passive
closing member
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002279388A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003227572A5 (enExample
Inventor
Harold Samuel Gamble
ハロルド・サミュエル・ギャンブル
Samuel John Neil Mitchell
サミュエル・ジョン・ニール・ミッチェル
Daniel Chia Sheng Bien
ダニエル・チア・シェン・ビエン
Stephen Peter Fitzgerald
スティーブン・ピーター・フィッツジェラルド
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Randox Laboratories Ltd
Original Assignee
Randox Laboratories Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Randox Laboratories Ltd filed Critical Randox Laboratories Ltd
Publication of JP2003227572A publication Critical patent/JP2003227572A/ja
Publication of JP2003227572A5 publication Critical patent/JP2003227572A5/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F16K99/0009—Lift valves the valve element held by multiple arms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0094—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Fluid Mechanics (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Control Of El Displays (AREA)
  • Check Valves (AREA)
  • Details Of Reciprocating Pumps (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
JP2002279388A 2001-09-25 2002-09-25 受動マイクロバルブ Pending JP2003227572A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0123054.9A GB0123054D0 (en) 2001-09-25 2001-09-25 Passive microvalve
GB0123054-9 2001-09-25

Publications (2)

Publication Number Publication Date
JP2003227572A true JP2003227572A (ja) 2003-08-15
JP2003227572A5 JP2003227572A5 (enExample) 2005-11-10

Family

ID=9922660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002279388A Pending JP2003227572A (ja) 2001-09-25 2002-09-25 受動マイクロバルブ

Country Status (6)

Country Link
US (1) US20030071235A1 (enExample)
EP (1) EP1296067B1 (enExample)
JP (1) JP2003227572A (enExample)
AT (1) ATE319016T1 (enExample)
DE (1) DE60209449T2 (enExample)
GB (1) GB0123054D0 (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005172432A (ja) * 2003-12-05 2005-06-30 Toyota Central Res & Dev Lab Inc マイクロ構造体とその製造方法
JP2005220971A (ja) * 2004-02-04 2005-08-18 Nissan Motor Co Ltd マイクロバルブ
JP2008247472A (ja) * 2007-03-30 2008-10-16 Yoshino Kogyosho Co Ltd 逆止弁及び該逆止弁を使用したポンプ容器
US7868098B2 (en) * 2005-09-22 2011-01-11 Evonik Roehm Gmbh Process for preparing (meth) acrylate-based ABA triblock copolymers
WO2024070487A1 (ja) * 2022-09-30 2024-04-04 大研医器株式会社 弁構成部材

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7867193B2 (en) * 2004-01-29 2011-01-11 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
US7867194B2 (en) 2004-01-29 2011-01-11 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
DE102006011545B4 (de) * 2006-03-14 2016-03-17 Robert Bosch Gmbh Mikromechanisches Kombi-Bauelement und entsprechendes Herstellungsverfahren
US8256465B2 (en) * 2006-05-01 2012-09-04 Google Inc. Microfluidic valve structure
WO2008094672A2 (en) 2007-01-31 2008-08-07 Charles Stark Draper Laboratory, Inc. Membrane-based fluid control in microfluidic devices
WO2011008070A1 (en) * 2009-07-13 2011-01-20 Mimos Berhad Cantilever microvalve structure and method of fabricating same
US20130240073A1 (en) * 2010-09-17 2013-09-19 Agency For Science, Technology And Research Microfluidic Device for Altering a Fluid Flow and a Microfluidic System Including the Microfluidic Device
DE102010051743B4 (de) 2010-11-19 2022-09-01 C. Miethke Gmbh & Co. Kg Programmierbares Hydrocephalusventil
EP2670456B1 (en) 2011-02-02 2019-12-18 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
US9528633B2 (en) * 2012-12-17 2016-12-27 Novartis Ag MEMS check valve
US9572712B2 (en) 2012-12-17 2017-02-21 Novartis Ag Osmotically actuated fluidic valve
EP2964986A1 (en) 2013-03-07 2016-01-13 Debiotech S.A. Microfluidic valve having improved tolerance to particles
US11255465B2 (en) * 2016-11-30 2022-02-22 Agilent Technologies, Inc. Microfluidic check valve and related devices and systems
CN107448648A (zh) * 2017-09-25 2017-12-08 上海应用技术大学 一种全塑微型单向阀及其加工方法
US11236846B1 (en) * 2019-07-11 2022-02-01 Facebook Technologies, Llc Fluidic control: using exhaust as a control mechanism

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3053499A (en) * 1959-06-15 1962-09-11 Henry Valve Co Valve
US4756508A (en) * 1985-02-21 1988-07-12 Ford Motor Company Silicon valve
US4712583A (en) * 1986-05-27 1987-12-15 Pacesetter Infusion, Ltd. Precision passive flat-top valve for medication infusion system
US4826131A (en) * 1988-08-22 1989-05-02 Ford Motor Company Electrically controllable valve etched from silicon substrates
DE3914031C2 (de) * 1989-04-28 1993-10-28 Deutsche Aerospace Mikromechanischer Aktuator
JPH04501449A (ja) * 1989-06-14 1992-03-12 ウエストンブリッジ　インターナショナル　リミティド マイクロポンプ
WO1991001464A1 (fr) * 1989-07-19 1991-02-07 Westonbridge International Limited Clapet anti-retour, notamment pour micropompe et micropompe munie d'un tel clapet
US5171132A (en) * 1989-12-27 1992-12-15 Seiko Epson Corporation Two-valve thin plate micropump
US5259737A (en) * 1990-07-02 1993-11-09 Seiko Epson Corporation Micropump with valve structure
EP0491026B1 (en) * 1990-07-10 1995-03-01 Westonbridge International Limited Valve, method for producing said valve and micropump incorporating said valve
US5050838A (en) * 1990-07-31 1991-09-24 Hewlett-Packard Company Control valve utilizing mechanical beam buckling
EP0483469B1 (en) * 1990-10-30 1994-10-12 Hewlett-Packard Company Micropump
DE4039814A1 (de) * 1990-12-13 1992-06-17 Logica Medizintechnik Gmbh Rueckschlagventil, insbesondere fuer medizinische infusionsgeraete
DE4143343C2 (de) * 1991-09-11 1994-09-22 Fraunhofer Ges Forschung Mikrominiaturisierte, elektrostatisch betriebene Mikromembranpumpe
DE4220077A1 (de) * 1992-06-19 1993-12-23 Bosch Gmbh Robert Mikropumpe
DE69410487T2 (de) * 1993-12-28 1998-11-05 Westonbridge Int Ltd Mikropumpe
US5810325A (en) * 1996-06-25 1998-09-22 Bcam International, Inc. Microvalve
US5896882A (en) * 1996-06-27 1999-04-27 Northrop Grumman Corporation Pressure control valve
CA2267086A1 (en) * 1996-10-03 1998-04-09 Didier Maillefer Micro-machined device for fluids and method of manufacture
FR2757906A1 (fr) * 1996-12-31 1998-07-03 Westonbridge Int Ltd Micropompe avec piece intermediaire integree
US5780748A (en) * 1997-01-29 1998-07-14 Hewlett-Packard Company Flow device having parallel flow surfaces which move toward and away from one another to adjust the flow channel in proportion to applied force
AU9739898A (en) * 1997-08-20 1999-03-08 Westonbridge International Limited Micro pump comprising an inlet control member for its self-priming
IL123227A0 (en) * 1998-02-08 1998-09-24 3By Ltd Check valve
US5984258A (en) * 1998-09-28 1999-11-16 General Motors Corporation Method and apparatus for control of a shape memory alloy actuator for a fuel injector
JP3620316B2 (ja) * 1998-11-16 2005-02-16 株式会社日立製作所 マイクロポンプとその製造方法
US6412751B1 (en) * 2000-04-20 2002-07-02 Agilent Technologies, Inc. Extended range diaphragm valve and method for making same
US6644944B2 (en) * 2000-11-06 2003-11-11 Nanostream, Inc. Uni-directional flow microfluidic components

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005172432A (ja) * 2003-12-05 2005-06-30 Toyota Central Res & Dev Lab Inc マイクロ構造体とその製造方法
JP2005220971A (ja) * 2004-02-04 2005-08-18 Nissan Motor Co Ltd マイクロバルブ
US7868098B2 (en) * 2005-09-22 2011-01-11 Evonik Roehm Gmbh Process for preparing (meth) acrylate-based ABA triblock copolymers
JP2008247472A (ja) * 2007-03-30 2008-10-16 Yoshino Kogyosho Co Ltd 逆止弁及び該逆止弁を使用したポンプ容器
WO2024070487A1 (ja) * 2022-09-30 2024-04-04 大研医器株式会社 弁構成部材

Also Published As

Publication number Publication date
DE60209449D1 (de) 2006-04-27
EP1296067A3 (en) 2004-02-11
GB0123054D0 (en) 2001-11-14
DE60209449T2 (de) 2006-10-12
EP1296067B1 (en) 2006-03-01
ATE319016T1 (de) 2006-03-15
EP1296067A2 (en) 2003-03-26
US20030071235A1 (en) 2003-04-17

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