DE60209449D1 - Passives Mikroventil - Google Patents

Passives Mikroventil

Info

Publication number
DE60209449D1
DE60209449D1 DE60209449T DE60209449T DE60209449D1 DE 60209449 D1 DE60209449 D1 DE 60209449D1 DE 60209449 T DE60209449 T DE 60209449T DE 60209449 T DE60209449 T DE 60209449T DE 60209449 D1 DE60209449 D1 DE 60209449D1
Authority
DE
Germany
Prior art keywords
aperture
substrate
passive microvalve
upper plate
passive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60209449T
Other languages
English (en)
Other versions
DE60209449T2 (de
Inventor
Harold Samuel Gamble
Samuel John Neil Mitchell
Daniel Chia Sheng Bien
Stephen Peter Fitzgerald
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Randox Laboratories Ltd
Original Assignee
Randox Laboratories Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Randox Laboratories Ltd filed Critical Randox Laboratories Ltd
Publication of DE60209449D1 publication Critical patent/DE60209449D1/de
Application granted granted Critical
Publication of DE60209449T2 publication Critical patent/DE60209449T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F16K99/0009—Lift valves the valve element held by multiple arms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0094—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Fluid Mechanics (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Control Of El Displays (AREA)
  • Check Valves (AREA)
  • Details Of Reciprocating Pumps (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
DE60209449T 2001-09-25 2002-09-16 Passives Mikroventil Expired - Lifetime DE60209449T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0123054.9A GB0123054D0 (en) 2001-09-25 2001-09-25 Passive microvalve
GB0123054 2001-09-25

Publications (2)

Publication Number Publication Date
DE60209449D1 true DE60209449D1 (de) 2006-04-27
DE60209449T2 DE60209449T2 (de) 2006-10-12

Family

ID=9922660

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60209449T Expired - Lifetime DE60209449T2 (de) 2001-09-25 2002-09-16 Passives Mikroventil

Country Status (6)

Country Link
US (1) US20030071235A1 (de)
EP (1) EP1296067B1 (de)
JP (1) JP2003227572A (de)
AT (1) ATE319016T1 (de)
DE (1) DE60209449T2 (de)
GB (1) GB0123054D0 (de)

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JP4529431B2 (ja) * 2003-12-05 2010-08-25 株式会社豊田中央研究所 マイクロ構造体の製造方法
US7867194B2 (en) 2004-01-29 2011-01-11 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
WO2005072793A1 (en) * 2004-01-29 2005-08-11 The Charles Stark Draper Laboratory, Inc. Implantable drug delivery apparatus
JP2005220971A (ja) * 2004-02-04 2005-08-18 Nissan Motor Co Ltd マイクロバルブ
DE102005045458A1 (de) * 2005-09-22 2007-03-29 Röhm Gmbh Verfahren zur Herstellung von ABA-Triblockcopolymeren auf (Meth)acrylatbasis
DE102006011545B4 (de) * 2006-03-14 2016-03-17 Robert Bosch Gmbh Mikromechanisches Kombi-Bauelement und entsprechendes Herstellungsverfahren
US8256465B2 (en) * 2006-05-01 2012-09-04 Google Inc. Microfluidic valve structure
WO2008094672A2 (en) 2007-01-31 2008-08-07 Charles Stark Draper Laboratory, Inc. Membrane-based fluid control in microfluidic devices
JP5182785B2 (ja) * 2007-03-30 2013-04-17 株式会社吉野工業所 ポンプ容器
WO2011008070A1 (en) * 2009-07-13 2011-01-20 Mimos Berhad Cantilever microvalve structure and method of fabricating same
WO2012036627A1 (en) * 2010-09-17 2012-03-22 Agency For Science, Technology And Research A microfluidic device for altering a fluid flow and a microfluidic system including the microfluidic device
DE102010051743B4 (de) 2010-11-19 2022-09-01 C. Miethke Gmbh & Co. Kg Programmierbares Hydrocephalusventil
US8876795B2 (en) 2011-02-02 2014-11-04 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
US9572712B2 (en) 2012-12-17 2017-02-21 Novartis Ag Osmotically actuated fluidic valve
US9528633B2 (en) 2012-12-17 2016-12-27 Novartis Ag MEMS check valve
US9903508B2 (en) 2013-03-07 2018-02-27 Debiotech S.A. Microfluidic valve having improved tolerance to particles
US11255465B2 (en) 2016-11-30 2022-02-22 Agilent Technologies, Inc. Microfluidic check valve and related devices and systems
CN107448648A (zh) * 2017-09-25 2017-12-08 上海应用技术大学 一种全塑微型单向阀及其加工方法
US11236846B1 (en) * 2019-07-11 2022-02-01 Facebook Technologies, Llc Fluidic control: using exhaust as a control mechanism
JP2024051971A (ja) * 2022-09-30 2024-04-11 大研医器株式会社 弁構成部材

Family Cites Families (27)

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US3053499A (en) * 1959-06-15 1962-09-11 Henry Valve Co Valve
US4756508A (en) * 1985-02-21 1988-07-12 Ford Motor Company Silicon valve
US4712583A (en) * 1986-05-27 1987-12-15 Pacesetter Infusion, Ltd. Precision passive flat-top valve for medication infusion system
US4826131A (en) * 1988-08-22 1989-05-02 Ford Motor Company Electrically controllable valve etched from silicon substrates
DE3914031C2 (de) * 1989-04-28 1993-10-28 Deutsche Aerospace Mikromechanischer Aktuator
JPH04501449A (ja) * 1989-06-14 1992-03-12 ウエストンブリッジ　インターナショナル　リミティド マイクロポンプ
WO1991001464A1 (fr) * 1989-07-19 1991-02-07 Westonbridge International Limited Clapet anti-retour, notamment pour micropompe et micropompe munie d'un tel clapet
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US5277556A (en) 1990-07-10 1994-01-11 Westonbridge International Limited Valve and micropump incorporating said valve
US5050838A (en) * 1990-07-31 1991-09-24 Hewlett-Packard Company Control valve utilizing mechanical beam buckling
DE69104585T2 (de) * 1990-10-30 1995-05-18 Hewlett Packard Co Mikropumpe.
DE4039814A1 (de) * 1990-12-13 1992-06-17 Logica Medizintechnik Gmbh Rueckschlagventil, insbesondere fuer medizinische infusionsgeraete
DE4143343C2 (de) * 1991-09-11 1994-09-22 Fraunhofer Ges Forschung Mikrominiaturisierte, elektrostatisch betriebene Mikromembranpumpe
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US5984258A (en) * 1998-09-28 1999-11-16 General Motors Corporation Method and apparatus for control of a shape memory alloy actuator for a fuel injector
JP3620316B2 (ja) * 1998-11-16 2005-02-16 株式会社日立製作所 マイクロポンプとその製造方法
US6412751B1 (en) * 2000-04-20 2002-07-02 Agilent Technologies, Inc. Extended range diaphragm valve and method for making same
EP1334279A1 (de) * 2000-11-06 2003-08-13 Nanostream, Inc. Unidirektional-durchfluss-mikrofluidkomponenten

Also Published As

Publication number Publication date
EP1296067A3 (de) 2004-02-11
EP1296067A2 (de) 2003-03-26
EP1296067B1 (de) 2006-03-01
GB0123054D0 (en) 2001-11-14
JP2003227572A (ja) 2003-08-15
ATE319016T1 (de) 2006-03-15
DE60209449T2 (de) 2006-10-12
US20030071235A1 (en) 2003-04-17

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Legal Events

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8380 Miscellaneous part iii

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8380 Miscellaneous part iii

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