ATE319016T1 - Passives mikroventil - Google Patents

Passives mikroventil

Info

Publication number
ATE319016T1
ATE319016T1 AT02256397T AT02256397T ATE319016T1 AT E319016 T1 ATE319016 T1 AT E319016T1 AT 02256397 T AT02256397 T AT 02256397T AT 02256397 T AT02256397 T AT 02256397T AT E319016 T1 ATE319016 T1 AT E319016T1
Authority
AT
Austria
Prior art keywords
micro valve
aperture
substrate
passive micro
upper plate
Prior art date
Application number
AT02256397T
Other languages
German (de)
English (en)
Inventor
Harold Samuel Gamble
Samuel John Neil Mitchell
Daniel Chia Sheng Bien
Stephen Peter Rando Fitzgerald
Original Assignee
Randox Lab Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Randox Lab Ltd filed Critical Randox Lab Ltd
Application granted granted Critical
Publication of ATE319016T1 publication Critical patent/ATE319016T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F16K99/0009—Lift valves the valve element held by multiple arms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0094—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Fluid Mechanics (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Control Of El Displays (AREA)
  • Check Valves (AREA)
  • Details Of Reciprocating Pumps (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
AT02256397T 2001-09-25 2002-09-16 Passives mikroventil ATE319016T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0123054.9A GB0123054D0 (en) 2001-09-25 2001-09-25 Passive microvalve

Publications (1)

Publication Number Publication Date
ATE319016T1 true ATE319016T1 (de) 2006-03-15

Family

ID=9922660

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02256397T ATE319016T1 (de) 2001-09-25 2002-09-16 Passives mikroventil

Country Status (6)

Country Link
US (1) US20030071235A1 (enExample)
EP (1) EP1296067B1 (enExample)
JP (1) JP2003227572A (enExample)
AT (1) ATE319016T1 (enExample)
DE (1) DE60209449T2 (enExample)
GB (1) GB0123054D0 (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7867193B2 (en) * 2004-01-29 2011-01-11 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
JP4529431B2 (ja) * 2003-12-05 2010-08-25 株式会社豊田中央研究所 マイクロ構造体の製造方法
US7867194B2 (en) 2004-01-29 2011-01-11 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
JP2005220971A (ja) * 2004-02-04 2005-08-18 Nissan Motor Co Ltd マイクロバルブ
DE102005045458A1 (de) * 2005-09-22 2007-03-29 Röhm Gmbh Verfahren zur Herstellung von ABA-Triblockcopolymeren auf (Meth)acrylatbasis
DE102006011545B4 (de) * 2006-03-14 2016-03-17 Robert Bosch Gmbh Mikromechanisches Kombi-Bauelement und entsprechendes Herstellungsverfahren
US8256465B2 (en) * 2006-05-01 2012-09-04 Google Inc. Microfluidic valve structure
WO2008094672A2 (en) 2007-01-31 2008-08-07 Charles Stark Draper Laboratory, Inc. Membrane-based fluid control in microfluidic devices
JP5182785B2 (ja) * 2007-03-30 2013-04-17 株式会社吉野工業所 ポンプ容器
WO2011008070A1 (en) * 2009-07-13 2011-01-20 Mimos Berhad Cantilever microvalve structure and method of fabricating same
US20130240073A1 (en) * 2010-09-17 2013-09-19 Agency For Science, Technology And Research Microfluidic Device for Altering a Fluid Flow and a Microfluidic System Including the Microfluidic Device
DE102010051743B4 (de) 2010-11-19 2022-09-01 C. Miethke Gmbh & Co. Kg Programmierbares Hydrocephalusventil
EP2670456B1 (en) 2011-02-02 2019-12-18 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
US9528633B2 (en) * 2012-12-17 2016-12-27 Novartis Ag MEMS check valve
US9572712B2 (en) 2012-12-17 2017-02-21 Novartis Ag Osmotically actuated fluidic valve
EP2964986A1 (en) 2013-03-07 2016-01-13 Debiotech S.A. Microfluidic valve having improved tolerance to particles
US11255465B2 (en) * 2016-11-30 2022-02-22 Agilent Technologies, Inc. Microfluidic check valve and related devices and systems
CN107448648A (zh) * 2017-09-25 2017-12-08 上海应用技术大学 一种全塑微型单向阀及其加工方法
US11236846B1 (en) * 2019-07-11 2022-02-01 Facebook Technologies, Llc Fluidic control: using exhaust as a control mechanism
JP2024051971A (ja) * 2022-09-30 2024-04-11 大研医器株式会社 弁構成部材

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3053499A (en) * 1959-06-15 1962-09-11 Henry Valve Co Valve
US4756508A (en) * 1985-02-21 1988-07-12 Ford Motor Company Silicon valve
US4712583A (en) * 1986-05-27 1987-12-15 Pacesetter Infusion, Ltd. Precision passive flat-top valve for medication infusion system
US4826131A (en) * 1988-08-22 1989-05-02 Ford Motor Company Electrically controllable valve etched from silicon substrates
DE3914031C2 (de) * 1989-04-28 1993-10-28 Deutsche Aerospace Mikromechanischer Aktuator
JPH04501449A (ja) * 1989-06-14 1992-03-12 ウエストンブリッジ　インターナショナル　リミティド マイクロポンプ
WO1991001464A1 (fr) * 1989-07-19 1991-02-07 Westonbridge International Limited Clapet anti-retour, notamment pour micropompe et micropompe munie d'un tel clapet
US5171132A (en) * 1989-12-27 1992-12-15 Seiko Epson Corporation Two-valve thin plate micropump
US5259737A (en) * 1990-07-02 1993-11-09 Seiko Epson Corporation Micropump with valve structure
EP0491026B1 (en) * 1990-07-10 1995-03-01 Westonbridge International Limited Valve, method for producing said valve and micropump incorporating said valve
US5050838A (en) * 1990-07-31 1991-09-24 Hewlett-Packard Company Control valve utilizing mechanical beam buckling
EP0483469B1 (en) * 1990-10-30 1994-10-12 Hewlett-Packard Company Micropump
DE4039814A1 (de) * 1990-12-13 1992-06-17 Logica Medizintechnik Gmbh Rueckschlagventil, insbesondere fuer medizinische infusionsgeraete
DE4143343C2 (de) * 1991-09-11 1994-09-22 Fraunhofer Ges Forschung Mikrominiaturisierte, elektrostatisch betriebene Mikromembranpumpe
DE4220077A1 (de) * 1992-06-19 1993-12-23 Bosch Gmbh Robert Mikropumpe
DE69410487T2 (de) * 1993-12-28 1998-11-05 Westonbridge Int Ltd Mikropumpe
US5810325A (en) * 1996-06-25 1998-09-22 Bcam International, Inc. Microvalve
US5896882A (en) * 1996-06-27 1999-04-27 Northrop Grumman Corporation Pressure control valve
CA2267086A1 (en) * 1996-10-03 1998-04-09 Didier Maillefer Micro-machined device for fluids and method of manufacture
FR2757906A1 (fr) * 1996-12-31 1998-07-03 Westonbridge Int Ltd Micropompe avec piece intermediaire integree
US5780748A (en) * 1997-01-29 1998-07-14 Hewlett-Packard Company Flow device having parallel flow surfaces which move toward and away from one another to adjust the flow channel in proportion to applied force
AU9739898A (en) * 1997-08-20 1999-03-08 Westonbridge International Limited Micro pump comprising an inlet control member for its self-priming
IL123227A0 (en) * 1998-02-08 1998-09-24 3By Ltd Check valve
US5984258A (en) * 1998-09-28 1999-11-16 General Motors Corporation Method and apparatus for control of a shape memory alloy actuator for a fuel injector
JP3620316B2 (ja) * 1998-11-16 2005-02-16 株式会社日立製作所 マイクロポンプとその製造方法
US6412751B1 (en) * 2000-04-20 2002-07-02 Agilent Technologies, Inc. Extended range diaphragm valve and method for making same
US6644944B2 (en) * 2000-11-06 2003-11-11 Nanostream, Inc. Uni-directional flow microfluidic components

Also Published As

Publication number Publication date
DE60209449D1 (de) 2006-04-27
EP1296067A3 (en) 2004-02-11
GB0123054D0 (en) 2001-11-14
DE60209449T2 (de) 2006-10-12
EP1296067B1 (en) 2006-03-01
EP1296067A2 (en) 2003-03-26
JP2003227572A (ja) 2003-08-15
US20030071235A1 (en) 2003-04-17

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Legal Events

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