JP2003156406A - 固体撮像素子照明光学系及び固体撮像素子照明装置 - Google Patents

固体撮像素子照明光学系及び固体撮像素子照明装置

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Publication number
JP2003156406A
JP2003156406A JP2001355669A JP2001355669A JP2003156406A JP 2003156406 A JP2003156406 A JP 2003156406A JP 2001355669 A JP2001355669 A JP 2001355669A JP 2001355669 A JP2001355669 A JP 2001355669A JP 2003156406 A JP2003156406 A JP 2003156406A
Authority
JP
Japan
Prior art keywords
solid
optical system
illumination
state imaging
illumination optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001355669A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003156406A5 (https=
Inventor
Hiroshi Nishimura
宏 西村
Akio Suzuki
章夫 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2001355669A priority Critical patent/JP2003156406A/ja
Publication of JP2003156406A publication Critical patent/JP2003156406A/ja
Publication of JP2003156406A5 publication Critical patent/JP2003156406A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Microscoopes, Condenser (AREA)
  • Solid State Image Pick-Up Elements (AREA)
JP2001355669A 2001-11-21 2001-11-21 固体撮像素子照明光学系及び固体撮像素子照明装置 Pending JP2003156406A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001355669A JP2003156406A (ja) 2001-11-21 2001-11-21 固体撮像素子照明光学系及び固体撮像素子照明装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001355669A JP2003156406A (ja) 2001-11-21 2001-11-21 固体撮像素子照明光学系及び固体撮像素子照明装置

Publications (2)

Publication Number Publication Date
JP2003156406A true JP2003156406A (ja) 2003-05-30
JP2003156406A5 JP2003156406A5 (https=) 2005-06-23

Family

ID=19167339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001355669A Pending JP2003156406A (ja) 2001-11-21 2001-11-21 固体撮像素子照明光学系及び固体撮像素子照明装置

Country Status (1)

Country Link
JP (1) JP2003156406A (https=)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005250030A (ja) * 2004-03-03 2005-09-15 Nikon Corp 撮像素子検査用照明装置、撮像素子検査装置、撮像素子の検査方法、及び撮像素子の製造方法
JP2005331371A (ja) * 2004-05-20 2005-12-02 Nikon Corp 照明補助装置及びこの照明補助装置を用いた検査装置
JP2006138644A (ja) * 2004-11-10 2006-06-01 Nikon Corp 投影ユニット及びそれを備える撮像素子検査用照明装置
JP2009019882A (ja) * 2007-07-10 2009-01-29 Nikon Corp 照明用アダプタ、照明装置、及び撮像素子検査用照明装置
JP2009198484A (ja) * 2008-01-23 2009-09-03 Nikon Corp 撮像素子検査用照明光学系
WO2009110528A1 (ja) * 2008-03-06 2009-09-11 シャープ株式会社 固体撮像装置用テストチャート及びその使用方法、チャート盤、テスト装置
KR101732940B1 (ko) 2016-08-12 2017-05-10 (주) 엔이에스 하나 이상의 카메라 모듈 성능 검사를 위한 릴레이 렌즈 조립체

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005250030A (ja) * 2004-03-03 2005-09-15 Nikon Corp 撮像素子検査用照明装置、撮像素子検査装置、撮像素子の検査方法、及び撮像素子の製造方法
JP2005331371A (ja) * 2004-05-20 2005-12-02 Nikon Corp 照明補助装置及びこの照明補助装置を用いた検査装置
JP2006138644A (ja) * 2004-11-10 2006-06-01 Nikon Corp 投影ユニット及びそれを備える撮像素子検査用照明装置
JP2009019882A (ja) * 2007-07-10 2009-01-29 Nikon Corp 照明用アダプタ、照明装置、及び撮像素子検査用照明装置
JP2009198484A (ja) * 2008-01-23 2009-09-03 Nikon Corp 撮像素子検査用照明光学系
WO2009110528A1 (ja) * 2008-03-06 2009-09-11 シャープ株式会社 固体撮像装置用テストチャート及びその使用方法、チャート盤、テスト装置
KR101732940B1 (ko) 2016-08-12 2017-05-10 (주) 엔이에스 하나 이상의 카메라 모듈 성능 검사를 위한 릴레이 렌즈 조립체

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