JP2003156406A5 - - Google Patents

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Publication number
JP2003156406A5
JP2003156406A5 JP2001355669A JP2001355669A JP2003156406A5 JP 2003156406 A5 JP2003156406 A5 JP 2003156406A5 JP 2001355669 A JP2001355669 A JP 2001355669A JP 2001355669 A JP2001355669 A JP 2001355669A JP 2003156406 A5 JP2003156406 A5 JP 2003156406A5
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JP
Japan
Prior art keywords
optical system
solid
illumination optical
illumination
image sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001355669A
Other languages
English (en)
Japanese (ja)
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JP2003156406A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001355669A priority Critical patent/JP2003156406A/ja
Priority claimed from JP2001355669A external-priority patent/JP2003156406A/ja
Publication of JP2003156406A publication Critical patent/JP2003156406A/ja
Publication of JP2003156406A5 publication Critical patent/JP2003156406A5/ja
Pending legal-status Critical Current

Links

JP2001355669A 2001-11-21 2001-11-21 固体撮像素子照明光学系及び固体撮像素子照明装置 Pending JP2003156406A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001355669A JP2003156406A (ja) 2001-11-21 2001-11-21 固体撮像素子照明光学系及び固体撮像素子照明装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001355669A JP2003156406A (ja) 2001-11-21 2001-11-21 固体撮像素子照明光学系及び固体撮像素子照明装置

Publications (2)

Publication Number Publication Date
JP2003156406A JP2003156406A (ja) 2003-05-30
JP2003156406A5 true JP2003156406A5 (https=) 2005-06-23

Family

ID=19167339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001355669A Pending JP2003156406A (ja) 2001-11-21 2001-11-21 固体撮像素子照明光学系及び固体撮像素子照明装置

Country Status (1)

Country Link
JP (1) JP2003156406A (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4591658B2 (ja) * 2004-03-03 2010-12-01 株式会社ニコン 撮像素子検査用照明装置、撮像素子検査装置、撮像素子の検査方法、及び撮像素子の製造方法
JP4521660B2 (ja) * 2004-05-20 2010-08-11 株式会社ニコン 照明補助装置及びこの照明補助装置を用いた検査装置
JP2006138644A (ja) * 2004-11-10 2006-06-01 Nikon Corp 投影ユニット及びそれを備える撮像素子検査用照明装置
JP4958663B2 (ja) * 2007-07-10 2012-06-20 株式会社ニコン 照明用アダプタ、照明装置、及び撮像素子検査用照明装置
JP5261095B2 (ja) * 2008-01-23 2013-08-14 株式会社ニコン 撮像素子検査用照明光学系
JP4981714B2 (ja) * 2008-03-06 2012-07-25 シャープ株式会社 テスト装置
KR101732940B1 (ko) 2016-08-12 2017-05-10 (주) 엔이에스 하나 이상의 카메라 모듈 성능 검사를 위한 릴레이 렌즈 조립체

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