JP2003151892A5 - - Google Patents

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Publication number
JP2003151892A5
JP2003151892A5 JP2001352565A JP2001352565A JP2003151892A5 JP 2003151892 A5 JP2003151892 A5 JP 2003151892A5 JP 2001352565 A JP2001352565 A JP 2001352565A JP 2001352565 A JP2001352565 A JP 2001352565A JP 2003151892 A5 JP2003151892 A5 JP 2003151892A5
Authority
JP
Japan
Prior art keywords
booth
air
positive pressure
outside
strictly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001352565A
Other languages
English (en)
Japanese (ja)
Other versions
JP3595791B2 (ja
JP2003151892A (ja
Filing date
Publication date
Priority claimed from JP2001352565A external-priority patent/JP3595791B2/ja
Priority to JP2001352565A priority Critical patent/JP3595791B2/ja
Application filed filed Critical
Priority to EP02257942A priority patent/EP1312985B1/en
Priority to US10/298,549 priority patent/US6924877B2/en
Publication of JP2003151892A publication Critical patent/JP2003151892A/ja
Publication of JP2003151892A5 publication Critical patent/JP2003151892A5/ja
Publication of JP3595791B2 publication Critical patent/JP3595791B2/ja
Application granted granted Critical
Priority to US11/186,953 priority patent/US7186285B2/en
Priority to US11/668,666 priority patent/US20070119131A1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2001352565A 2001-11-19 2001-11-19 半導体製造装置 Expired - Fee Related JP3595791B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2001352565A JP3595791B2 (ja) 2001-11-19 2001-11-19 半導体製造装置
EP02257942A EP1312985B1 (en) 2001-11-19 2002-11-18 Semiconductor manufacturing apparatus
US10/298,549 US6924877B2 (en) 2001-11-19 2002-11-19 Chemical filter arrangement for a semiconductor manufacturing apparatus
US11/186,953 US7186285B2 (en) 2001-11-19 2005-07-22 Chemical filter arrangement for a semiconductor manufacturing apparatus
US11/668,666 US20070119131A1 (en) 2001-11-19 2007-01-30 Chemical filter arrangement for asemiconductor manufacturing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001352565A JP3595791B2 (ja) 2001-11-19 2001-11-19 半導体製造装置

Publications (3)

Publication Number Publication Date
JP2003151892A JP2003151892A (ja) 2003-05-23
JP2003151892A5 true JP2003151892A5 (enExample) 2004-07-15
JP3595791B2 JP3595791B2 (ja) 2004-12-02

Family

ID=19164721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001352565A Expired - Fee Related JP3595791B2 (ja) 2001-11-19 2001-11-19 半導体製造装置

Country Status (3)

Country Link
US (3) US6924877B2 (enExample)
EP (1) EP1312985B1 (enExample)
JP (1) JP3595791B2 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3595791B2 (ja) * 2001-11-19 2004-12-02 キヤノン株式会社 半導体製造装置
WO2004108252A1 (ja) * 2003-06-03 2004-12-16 Nikon Corporation フィルタ装置及び露光装置並びにデバイスの製造方法
IL156836A (en) * 2003-07-09 2008-08-07 Beth El Zikhron Ya Aqov Ind Lt System and method for protection/isolation against infections
JP4759272B2 (ja) * 2005-01-13 2011-08-31 ルネサスエレクトロニクス株式会社 露光装置
US7833305B1 (en) * 2005-04-19 2010-11-16 Studer Ronald M Filter device
JP4781049B2 (ja) * 2005-08-30 2011-09-28 キヤノン株式会社 露光装置およびデバイス製造方法
JP5305568B2 (ja) * 2006-05-22 2013-10-02 株式会社東芝 露光装置及びケミカルフィルタ寿命検知方法
US10842535B2 (en) 2007-02-14 2020-11-24 William R. Krause Flexible spine components having multiple slots
WO2008100590A1 (en) * 2007-02-14 2008-08-21 Flex Technology Inc Flexible spine components
JP5145541B2 (ja) * 2007-03-30 2013-02-20 ニチアス株式会社 保管装置
JP2009206239A (ja) * 2008-02-27 2009-09-10 Orion Mach Co Ltd 恒温空気供給装置
WO2010146462A2 (en) * 2009-06-19 2010-12-23 Entegris, Inc. Filter pleat structure
CN103180887B (zh) * 2010-07-22 2016-11-09 克拉克空气过滤产品有限公司 结合有防水过滤器的自助式服务终端机
US8603217B2 (en) * 2011-02-01 2013-12-10 Universal Laser Systems, Inc. Recirculating filtration systems for material processing systems and associated methods of use and manufacture
CN102841508B (zh) * 2011-06-23 2014-09-17 上海微电子装备有限公司 分流式气浴风道
CN102889249B (zh) * 2012-10-30 2015-07-15 深圳市华星光电技术有限公司 一种风机滤器单元和无尘室空气净化系统
US9155988B2 (en) 2013-03-14 2015-10-13 Universal Laser Systems, Inc. Multi-stage air filtration systems and associated apparatuses and methods
CN104117256A (zh) * 2013-04-28 2014-10-29 陈卫星 化工气体有毒烟尘水解中和法
US12357136B2 (en) 2020-11-19 2025-07-15 Milwaukee Electric Tool Corporation Portable dust extractor

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US3364838A (en) * 1966-02-01 1968-01-23 Gen Electric Cabinet for mounting, enclosing and cooling electrical apparatus
US4609459A (en) * 1983-04-01 1986-09-02 Hendrix Steel & Fabricating Co. Inc. Fitted filter member
US4737173A (en) * 1986-07-03 1988-04-12 Amway Corporation Room air treatment system
US5626820A (en) * 1988-12-12 1997-05-06 Kinkead; Devon A. Clean room air filtering
US4963170A (en) * 1989-12-04 1990-10-16 Global Consumer Services, Inc. Inflow and outflow HEPA vent filter for asbestos work areas
JP3094055B2 (ja) 1993-05-18 2000-10-03 東京エレクトロン株式会社 フィルタ装置及びレジスト処理システム
KR100242530B1 (ko) 1993-05-18 2000-02-01 히가시 데쓰로 필터장치
US5685895A (en) * 1994-08-10 1997-11-11 Nikon Corporation Air cleaning apparatus used for an exposure apparatus
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JP3426077B2 (ja) 1996-02-13 2003-07-14 株式会社荏原製作所 空気浄化装置
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JPH10106939A (ja) * 1996-10-01 1998-04-24 Canon Inc 露光システムおよび基板搬送方法
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JP3711376B2 (ja) 1997-04-07 2005-11-02 野村マイクロ・サイエンス株式会社 気体清浄化方法および気体清浄化装置
JPH11111593A (ja) 1997-10-01 1999-04-23 Canon Inc 環境制御装置
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JP2000068193A (ja) * 1998-08-18 2000-03-03 Canon Inc 露光方法およびデバイス製造方法
JP2002158170A (ja) * 2000-09-08 2002-05-31 Nikon Corp 露光装置及びデバイス製造方法
US6432177B1 (en) * 2000-09-12 2002-08-13 Donaldson Company, Inc. Air filter assembly for low temperature catalytic processes
JP2002093688A (ja) * 2000-09-19 2002-03-29 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2002147811A (ja) * 2000-11-08 2002-05-22 Sharp Corp クリーンルーム
US6602307B2 (en) * 2001-05-29 2003-08-05 Kanalflakt Inc. Bypass air filer
JP3595791B2 (ja) * 2001-11-19 2004-12-02 キヤノン株式会社 半導体製造装置
US6849107B1 (en) * 2002-12-16 2005-02-01 Fred Huffman Air filtration system
HK1063576A2 (en) * 2004-06-23 2004-11-26 John Manufacturing Ltd Multi-function optoelectronic air purifier
US20060130662A1 (en) * 2004-12-17 2006-06-22 Mario Digrato Air filter and method of filtering air in central heating and air conditioning system

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