JP5145541B2 - 保管装置 - Google Patents
保管装置 Download PDFInfo
- Publication number
- JP5145541B2 JP5145541B2 JP2007092685A JP2007092685A JP5145541B2 JP 5145541 B2 JP5145541 B2 JP 5145541B2 JP 2007092685 A JP2007092685 A JP 2007092685A JP 2007092685 A JP2007092685 A JP 2007092685A JP 5145541 B2 JP5145541 B2 JP 5145541B2
- Authority
- JP
- Japan
- Prior art keywords
- storage
- storage chamber
- storage device
- filter
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Description
次に、保管装置1内で浄化気体を循環させた場合における、入口フィルタ40及び内部フィルタ50の浄化性能及び使用寿命を評価した具体例について説明する。
Claims (5)
- 物品を収納する収納室、前記収納室の上流側に設けられたケミカルフィルタ、及び前記ケミカルフィルタによって浄化された気体を前記収納室に送風する送風機を有する収納部と、
前記収納部の外側を覆う筺体部と、
前記収納室に送風された浄化気体を循環させるために前記収納部と前記筺体部との間に前記収納室の側壁に沿って設けられた循環流路と、
を備え、
前記収納室の下流側において、前記収納室に収納された前記物品の出し入れを行うための扉を、前記筺体部の下流端を塞ぐように開閉可能に設け、
前記ケミカルフィルタと、前記送風機と、前記収納室と、前記扉と、は直列的に配置し、前記送風機を、前記収納室から前記扉に向けて送風するよう配置した
ことを特徴とする保管装置。 - 前記循環流路は、前記ケミカルフィルタより下流側に設けられ、
前記収納室に送風された浄化気体の少なくとも一部は、前記ケミカルフィルタより下流側で循環される
ことを特徴とする請求項1に記載の保管装置。 - 前記循環流路は、前記側壁の一部に沿って前記収納室の下流側から上流側まで延びる副流路と、前記側壁の他の一部に沿って前記収納室の下流側から上流側まで延びて前記副流路に比して浄化気体の通風抵抗が小さくなるよう形成されている主流路と、を有する
ことを特徴とする請求項1又は2に記載の保管装置。 - 前記収納部の内側壁の一部に開閉可能に設けられ前記収納部から前記循環流路への浄化気体の流出量を調節する収納部ダンパ及び/又は前記筺体部の外側壁の一部に開閉可能に設けられ前記保管装置の内部から外部への浄化気体の流出量を調節する筺体部ダンパをさらに備える
ことを特徴とする請求項1乃至3のいずれかに記載の保管装置。 - 保管装置であって、
物品を収納する収納室、前記収納室の上流側に設けられたケミカルフィルタ、及び前記ケミカルフィルタによって浄化された気体を前記収納室に送風する送風機を有する収納部と、
前記収納部の外側を覆う筺体部と、
前記収納室に送風された浄化気体を循環させるために前記収納部と前記筺体部との間に前記収納室の側壁に沿って設けられた循環流路と、
前記収納部の内側壁の一部に開閉可能に設けられ前記収納部から前記循環流路への浄化気体の流出量を調節する収納部ダンパ及び/又は前記筺体部の外側壁の一部に開閉可能に設けられ前記保管装置の内部から外部への浄化気体の流出量を調節する筺体部ダンパと、
を備える
ことを特徴とする保管装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007092685A JP5145541B2 (ja) | 2007-03-30 | 2007-03-30 | 保管装置 |
TW097110682A TW200848334A (en) | 2007-03-30 | 2008-03-26 | Preservation apparatus |
KR1020080028533A KR20080089225A (ko) | 2007-03-30 | 2008-03-27 | 보관 장치 |
CN2008100902024A CN101274701B (zh) | 2007-03-30 | 2008-03-28 | 保管装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007092685A JP5145541B2 (ja) | 2007-03-30 | 2007-03-30 | 保管装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008251926A JP2008251926A (ja) | 2008-10-16 |
JP5145541B2 true JP5145541B2 (ja) | 2013-02-20 |
Family
ID=39976505
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007092685A Expired - Fee Related JP5145541B2 (ja) | 2007-03-30 | 2007-03-30 | 保管装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5145541B2 (ja) |
KR (1) | KR20080089225A (ja) |
CN (1) | CN101274701B (ja) |
TW (1) | TW200848334A (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103768905A (zh) * | 2012-10-19 | 2014-05-07 | 和舰科技(苏州)有限公司 | 一种移动式空气化学过滤装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6332950A (ja) * | 1986-07-25 | 1988-02-12 | Hitachi Electronics Eng Co Ltd | ウエハカセツト収納ボツクス |
US5607647A (en) * | 1993-12-02 | 1997-03-04 | Extraction Systems, Inc. | Air filtering within clean environments |
WO1999028968A1 (fr) * | 1997-12-02 | 1999-06-10 | Kabushiki Kaisha Toshiba | Preservation de la proprete des substrats et boite de rangement de substrats |
US6929672B1 (en) * | 1998-12-22 | 2005-08-16 | Taisei Corporation | Filter medium for air filter and process for producing the same |
JP3595791B2 (ja) * | 2001-11-19 | 2004-12-02 | キヤノン株式会社 | 半導体製造装置 |
JP2006156712A (ja) * | 2004-11-30 | 2006-06-15 | Sony Corp | 基板収納搬送容器 |
-
2007
- 2007-03-30 JP JP2007092685A patent/JP5145541B2/ja not_active Expired - Fee Related
-
2008
- 2008-03-26 TW TW097110682A patent/TW200848334A/zh unknown
- 2008-03-27 KR KR1020080028533A patent/KR20080089225A/ko not_active Application Discontinuation
- 2008-03-28 CN CN2008100902024A patent/CN101274701B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2008251926A (ja) | 2008-10-16 |
CN101274701B (zh) | 2013-01-16 |
TW200848334A (en) | 2008-12-16 |
KR20080089225A (ko) | 2008-10-06 |
CN101274701A (zh) | 2008-10-01 |
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