KR20080089225A - 보관 장치 - Google Patents

보관 장치 Download PDF

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Publication number
KR20080089225A
KR20080089225A KR1020080028533A KR20080028533A KR20080089225A KR 20080089225 A KR20080089225 A KR 20080089225A KR 1020080028533 A KR1020080028533 A KR 1020080028533A KR 20080028533 A KR20080028533 A KR 20080028533A KR 20080089225 A KR20080089225 A KR 20080089225A
Authority
KR
South Korea
Prior art keywords
storage chamber
storage
filter
gas
flow path
Prior art date
Application number
KR1020080028533A
Other languages
English (en)
Korean (ko)
Inventor
아키라 죠이치
타카시 타나하시
츠토무 이시이
Original Assignee
니찌아스 카부시키카이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 니찌아스 카부시키카이샤 filed Critical 니찌아스 카부시키카이샤
Publication of KR20080089225A publication Critical patent/KR20080089225A/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
KR1020080028533A 2007-03-30 2008-03-27 보관 장치 KR20080089225A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007092685A JP5145541B2 (ja) 2007-03-30 2007-03-30 保管装置
JPJP-P-2007-00092685 2007-03-30

Publications (1)

Publication Number Publication Date
KR20080089225A true KR20080089225A (ko) 2008-10-06

Family

ID=39976505

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080028533A KR20080089225A (ko) 2007-03-30 2008-03-27 보관 장치

Country Status (4)

Country Link
JP (1) JP5145541B2 (ja)
KR (1) KR20080089225A (ja)
CN (1) CN101274701B (ja)
TW (1) TW200848334A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103768905A (zh) * 2012-10-19 2014-05-07 和舰科技(苏州)有限公司 一种移动式空气化学过滤装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6332950A (ja) * 1986-07-25 1988-02-12 Hitachi Electronics Eng Co Ltd ウエハカセツト収納ボツクス
US5607647A (en) * 1993-12-02 1997-03-04 Extraction Systems, Inc. Air filtering within clean environments
US6284020B1 (en) * 1997-12-02 2001-09-04 Kabushiki Kaisha Toshiba Method of maintaining cleanliness of substrates and box for accommodating substrates
WO2000037160A1 (fr) * 1998-12-22 2000-06-29 Taisei Corporation Milieu filtrant pour filtre a air et procede de fabrication correspondant
JP3595791B2 (ja) * 2001-11-19 2004-12-02 キヤノン株式会社 半導体製造装置
JP2006156712A (ja) * 2004-11-30 2006-06-15 Sony Corp 基板収納搬送容器

Also Published As

Publication number Publication date
CN101274701A (zh) 2008-10-01
CN101274701B (zh) 2013-01-16
JP5145541B2 (ja) 2013-02-20
JP2008251926A (ja) 2008-10-16
TW200848334A (en) 2008-12-16

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Legal Events

Date Code Title Description
A201 Request for examination
E601 Decision to refuse application