JP2003129991A5 - - Google Patents

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Publication number
JP2003129991A5
JP2003129991A5 JP2001325933A JP2001325933A JP2003129991A5 JP 2003129991 A5 JP2003129991 A5 JP 2003129991A5 JP 2001325933 A JP2001325933 A JP 2001325933A JP 2001325933 A JP2001325933 A JP 2001325933A JP 2003129991 A5 JP2003129991 A5 JP 2003129991A5
Authority
JP
Japan
Prior art keywords
stator
rotor
gap
molecular pump
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001325933A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003129991A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001325933A priority Critical patent/JP2003129991A/ja
Priority claimed from JP2001325933A external-priority patent/JP2003129991A/ja
Priority to EP02257154A priority patent/EP1306556A3/en
Priority to US10/278,188 priority patent/US6832888B2/en
Priority to TW91124784A priority patent/TW574476B/zh
Priority to KR1020020065232A priority patent/KR20030034023A/ko
Publication of JP2003129991A publication Critical patent/JP2003129991A/ja
Publication of JP2003129991A5 publication Critical patent/JP2003129991A5/ja
Pending legal-status Critical Current

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JP2001325933A 2001-10-24 2001-10-24 分子ポンプ Pending JP2003129991A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2001325933A JP2003129991A (ja) 2001-10-24 2001-10-24 分子ポンプ
EP02257154A EP1306556A3 (en) 2001-10-24 2002-10-15 Molecular pump
US10/278,188 US6832888B2 (en) 2001-10-24 2002-10-22 Molecular pump for forming a vacuum
TW91124784A TW574476B (en) 2001-10-24 2002-10-24 Molecular pump for forming a vacuum
KR1020020065232A KR20030034023A (ko) 2001-10-24 2002-10-24 진공을 형성하는 분자 펌프

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001325933A JP2003129991A (ja) 2001-10-24 2001-10-24 分子ポンプ

Publications (2)

Publication Number Publication Date
JP2003129991A JP2003129991A (ja) 2003-05-08
JP2003129991A5 true JP2003129991A5 (https=) 2005-06-30

Family

ID=19142399

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001325933A Pending JP2003129991A (ja) 2001-10-24 2001-10-24 分子ポンプ

Country Status (5)

Country Link
US (1) US6832888B2 (https=)
EP (1) EP1306556A3 (https=)
JP (1) JP2003129991A (https=)
KR (1) KR20030034023A (https=)
TW (1) TW574476B (https=)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10345043A1 (de) * 2003-09-27 2005-04-21 Rhein Chemie Rheinau Gmbh Mikrogel-enthaltende Zusammensetzung
GB0329034D0 (en) * 2003-12-15 2004-01-14 Boc Group Plc Vacuum pumping arrangement
EP1619395B1 (en) * 2004-07-20 2010-03-10 VARIAN S.p.A. Rotary vacuum pump, structure and method for the balancing thereof
KR100610012B1 (ko) * 2004-08-16 2006-08-09 삼성전자주식회사 터보 펌프
US7226277B2 (en) * 2004-12-22 2007-06-05 Pratt & Whitney Canada Corp. Pump and method
JP4821308B2 (ja) * 2005-12-21 2011-11-24 株式会社島津製作所 真空ポンプ
AU2007290372B2 (en) * 2006-08-31 2014-02-27 Smartin Technologies, Llc Implantable fluid pump
US7854596B2 (en) * 2007-01-24 2010-12-21 Johnson Controls Technology Company System and method of operation of multiple screw compressors with continuously variable speed to provide noise cancellation
JP4935509B2 (ja) * 2007-06-05 2012-05-23 株式会社島津製作所 ターボ分子ポンプ
JP5764283B2 (ja) * 2007-12-27 2015-08-19 エドワーズ株式会社 真空ポンプ
DE102008004297A1 (de) * 2008-01-15 2009-07-16 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
JP5115627B2 (ja) * 2008-06-19 2013-01-09 株式会社島津製作所 ターボ分子ポンプ
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
US20130129482A1 (en) * 2010-08-06 2013-05-23 Shimadzu Corporation Vacuum pump
CN102536902A (zh) * 2010-12-13 2012-07-04 致扬科技股份有限公司 涡轮分子泵的叶片结构改良
US9879684B2 (en) 2012-09-13 2018-01-30 Kla-Tencor Corporation Apparatus and method for shielding a controlled pressure environment
DE102014224757A1 (de) * 2014-12-03 2016-06-09 Robert Bosch Gmbh Verdichter mit einem Dichtkanal
DE202018003585U1 (de) * 2018-08-01 2019-11-06 Leybold Gmbh Vakuumpumpe
JP7140594B2 (ja) * 2018-08-10 2022-09-21 日本電産サンキョー株式会社 ステータユニットおよび真空ポンプ
JP7281388B2 (ja) * 2018-12-28 2023-05-25 株式会社荏原製作所 軸受装置および真空ポンプ装置
JP7689823B2 (ja) * 2020-12-11 2025-06-09 エドワーズ株式会社 真空ポンプ
CN112664562B (zh) * 2020-12-17 2022-04-19 庆安集团有限公司 一种适用压气机的自平衡磁轴承

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB242084A (en) * 1924-11-13 1925-11-05 Radions Ltd Improvements in vacuum pumps
CH234534A (de) * 1942-11-24 1944-09-30 Bbc Brown Boveri & Cie Molekularpumpe.
US3066849A (en) * 1960-08-18 1962-12-04 Exemplar Inc High vacuum pump systems
DE3204750C2 (de) * 1982-02-11 1984-04-26 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetisch gelagerte Turbomolekularpumpe
FR2641582B1 (fr) * 1989-01-09 1991-03-22 Cit Alcatel Pompe a vide du type a canal de gaede
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
DE4227663A1 (de) * 1992-08-21 1994-02-24 Leybold Ag Verfahren zur Überprüfung der Betriebsposition des rotierenden Systems einer Vakuumpumpe, vorzugsweise Turbomolekularpumpe
LU88194A1 (de) * 1992-12-03 1994-09-09 Euratom Verfahren und Vorrichtung zur Verringerung des Spalts zwichen einem statischen Teil uns einem beweglichel Teil
JP3486000B2 (ja) * 1995-03-31 2004-01-13 日本原子力研究所 ねじ溝真空ポンプ
JP3550465B2 (ja) * 1996-08-30 2004-08-04 株式会社日立製作所 ターボ真空ポンプ及びその運転方法
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
JP3735749B2 (ja) * 1997-07-22 2006-01-18 光洋精工株式会社 ターボ分子ポンプ

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