JP2003050311A - 紫外線用の減衰フィルタ - Google Patents
紫外線用の減衰フィルタInfo
- Publication number
- JP2003050311A JP2003050311A JP2002143012A JP2002143012A JP2003050311A JP 2003050311 A JP2003050311 A JP 2003050311A JP 2002143012 A JP2002143012 A JP 2002143012A JP 2002143012 A JP2002143012 A JP 2002143012A JP 2003050311 A JP2003050311 A JP 2003050311A
- Authority
- JP
- Japan
- Prior art keywords
- coating
- filter
- dielectric material
- attenuating
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000576 coating method Methods 0.000 claims abstract description 139
- 239000011248 coating agent Substances 0.000 claims abstract description 128
- 239000003989 dielectric material Substances 0.000 claims abstract description 27
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims abstract description 26
- 238000002834 transmittance Methods 0.000 claims abstract description 22
- 238000009826 distribution Methods 0.000 claims abstract description 16
- 230000003595 spectral effect Effects 0.000 claims abstract description 11
- 239000006117 anti-reflective coating Substances 0.000 claims description 22
- 230000008033 biological extinction Effects 0.000 claims description 9
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 7
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 6
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims 1
- 239000000395 magnesium oxide Substances 0.000 claims 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims 1
- 239000012780 transparent material Substances 0.000 claims 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 abstract description 19
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 abstract description 5
- 229910001634 calcium fluoride Inorganic materials 0.000 abstract description 5
- 239000000758 substrate Substances 0.000 abstract description 5
- 239000010410 layer Substances 0.000 description 50
- 230000005540 biological transmission Effects 0.000 description 33
- 229910000449 hafnium oxide Inorganic materials 0.000 description 15
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 15
- 238000005286 illumination Methods 0.000 description 14
- 239000000463 material Substances 0.000 description 10
- 238000010521 absorption reaction Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 5
- 230000007774 longterm Effects 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 230000005855 radiation Effects 0.000 description 5
- 239000002356 single layer Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 4
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000003667 anti-reflective effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000005577 local transmission Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000001393 microlithography Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000011253 protective coating Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 102100033041 Carbonic anhydrase 13 Human genes 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 101000867860 Homo sapiens Carbonic anhydrase 13 Proteins 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 description 1
- 229910001632 barium fluoride Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005389 semiconductor device fabrication Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Optical Elements Other Than Lenses (AREA)
- Surface Treatment Of Glass (AREA)
- Optical Filters (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10127225.1 | 2001-05-22 | ||
| DE10127225A DE10127225A1 (de) | 2001-05-22 | 2001-05-22 | Ultraviolettlicht-Abschwächungsfilter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003050311A true JP2003050311A (ja) | 2003-02-21 |
| JP2003050311A5 JP2003050311A5 (https=) | 2005-09-15 |
Family
ID=7687229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002143012A Pending JP2003050311A (ja) | 2001-05-22 | 2002-05-17 | 紫外線用の減衰フィルタ |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US20020191310A1 (https=) |
| EP (1) | EP1260835B1 (https=) |
| JP (1) | JP2003050311A (https=) |
| KR (1) | KR20020089201A (https=) |
| DE (2) | DE10127225A1 (https=) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004233474A (ja) * | 2003-01-29 | 2004-08-19 | Mitsubishi Heavy Ind Ltd | 光学系及び該光学系を用いた光学装置の使用方法 |
| JP2009124143A (ja) * | 2007-11-13 | 2009-06-04 | Asml Holding Nv | 薄いフィルム状の連続的に空間的に調整された灰色減衰器及び灰色フィルタ |
| JP2010198000A (ja) * | 2009-02-02 | 2010-09-09 | Ricoh Co Ltd | 光走査装置、画像形成装置および光通信システム |
| JP2014505996A (ja) * | 2010-11-30 | 2014-03-06 | アプライド マテリアルズ インコーポレイテッド | Ｕｖチャンバ内におけるウエハ処理プロファイルを調節する方法および装置 |
| KR20180132764A (ko) * | 2016-04-05 | 2018-12-12 | 칼 짜이스 에스엠티 게엠베하 | 투영 렌즈를 위한 감쇠 필터, 투영 노광 장치를 위한 감쇠 필터를 갖는 투영 렌즈 및 투영 렌즈를 갖는 투영 노광 장치 |
| CN111257986A (zh) * | 2015-07-07 | 2020-06-09 | 丰田自动车工程及制造北美公司 | 具有半导体吸收体层和介电吸收体层的组合的全向高色度红色结构色料 |
| US11726239B2 (en) | 2014-04-01 | 2023-08-15 | Toyota Motor Engineering & Manufacturing North America, Inc. | Non-color shifting multilayer structures |
| US11796724B2 (en) | 2007-08-12 | 2023-10-24 | Toyota Motor Corporation | Omnidirectional structural color made from metal and dielectric layers |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW557368B (en) | 2001-06-29 | 2003-10-11 | Jsr Corp | Anti-reflection film laminated body and method of manufacturing the laminated body |
| US8241905B2 (en) | 2004-02-24 | 2012-08-14 | The Curators Of The University Of Missouri | Self-assembling cell aggregates and methods of making engineered tissue using the same |
| DE102004011733A1 (de) | 2004-03-04 | 2005-09-22 | Carl Zeiss Smt Ag | Transmissionsfiltervorrichtung |
| US7621646B2 (en) * | 2006-07-05 | 2009-11-24 | Hewlett-Packard Development Company | Curved band-pass filter |
| NL2002968A1 (nl) * | 2008-06-30 | 2009-12-31 | Asml Netherlands Bv | Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby. |
| US8421995B2 (en) * | 2008-10-24 | 2013-04-16 | Asml Holding N.V. | Anti-reflective coating for optical elements |
| AU2011318437B2 (en) | 2010-10-21 | 2015-02-26 | Organovo, Inc. | Devices, systems, and methods for the fabrication of tissue |
| JP5870540B2 (ja) * | 2011-08-15 | 2016-03-01 | セイコーエプソン株式会社 | 画像記録装置、及び、照射器 |
| HK1200483A1 (en) | 2011-09-12 | 2015-08-07 | 奥加诺沃公司 | Engineered tissues for in vitro research uses, arrays thereof, and methods of making the same |
| DE102011054837A1 (de) | 2011-10-26 | 2013-05-02 | Carl Zeiss Laser Optics Gmbh | Optisches Element |
| KR101704591B1 (ko) * | 2012-02-21 | 2017-02-08 | 에이에스엠엘 네델란즈 비.브이. | 검사 장치 및 방법 |
| US9499779B2 (en) * | 2012-04-20 | 2016-11-22 | Organovo, Inc. | Devices, systems, and methods for the fabrication of tissue utilizing UV cross-linking |
| US9442105B2 (en) | 2013-03-15 | 2016-09-13 | Organovo, Inc. | Engineered liver tissues, arrays thereof, and methods of making the same |
| SG11201600770RA (en) | 2013-07-31 | 2016-02-26 | Organovo Inc | Automated devices, systems, and methods for the fabrication of tissue |
| DE102013021513B4 (de) * | 2013-12-18 | 2017-07-13 | Jenoptik Optical Systems Gmbh | Optisches Modul zur Optimierung einer Intensitätsverteilung von Strahlung einer ersten Wellenlänge und zum Transmittieren von Strahlung einer zweiten Wellenlänge |
| EP3808838B1 (en) | 2014-04-04 | 2024-04-10 | Organovo, Inc. | Engineered three-dimensional breast tissue, adipose tissue, and tumor disease model |
| KR20170064547A (ko) | 2014-10-06 | 2017-06-09 | 오가노보, 인크. | 조작된 신장 조직, 이의 어레이, 및 이를 제조하는 방법 |
| US11529436B2 (en) | 2014-11-05 | 2022-12-20 | Organovo, Inc. | Engineered three-dimensional skin tissues, arrays thereof, and methods of making the same |
| WO2016192917A1 (en) * | 2015-06-02 | 2016-12-08 | Asml Netherlands B.V. | Filter, method of formation thereof, and image sensor |
| WO2017083402A1 (en) | 2015-11-09 | 2017-05-18 | Organovo, Inc. | Improved methods for tissue fabrication |
| DE102017214249A1 (de) | 2017-08-16 | 2019-02-21 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Laserbearbeitungskopf mit einem optischen Element zum Herausfiltern von UV-Prozessstrahlung und zugehöriges Laserbearbeitungsverfahren |
| JP2019049633A (ja) * | 2017-09-08 | 2019-03-28 | 東芝メモリ株式会社 | マスク製造方法及びマスクセット |
| CN112666102B (zh) * | 2019-10-15 | 2024-10-22 | 中国科学院大连化学物理研究所 | 一种基于气体吸收的真空紫外光衰减装置及其衰减方法 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2675740A (en) * | 1954-04-20 | Glare preventing device and method | ||
| DE975553C (de) * | 1948-10-02 | 1962-01-11 | Heraeus Gmbh W C | Optisches Filter |
| DE1157002B (de) * | 1957-08-08 | 1963-11-07 | Balzers Vakuum Ges Mit Beschra | Im sichtbaren Spektralgebiet farbstichfreies UV-Absorptionsfilter |
| LU50238A1 (https=) * | 1966-01-11 | 1967-07-11 | ||
| DE3009533C2 (de) | 1980-03-12 | 1986-11-06 | D. Swarovski & Co., Wattens, Tirol | Belag mit mittlerem Brechwert, Verfahren zu dessen Herstellung und Verwendung des Belages |
| FR2566542B1 (fr) * | 1984-06-22 | 1988-01-15 | Videocolor | Procede de fabrication de filtre a coefficient de transmission de la lumiere variable sur sa surface |
| JPS63243726A (ja) | 1987-03-30 | 1988-10-11 | Shimadzu Corp | フオトダイオ−ドアレイ検出器 |
| US5201926A (en) | 1987-08-08 | 1993-04-13 | Leybold Aktiengesellschaft | Method for the production of coated glass with a high transmissivity in the visible spectral range and with a high reflectivity for thermal radiation |
| US4975328A (en) | 1987-09-22 | 1990-12-04 | Hoya Corporation | Process for producing polyurethane lens |
| US5181141A (en) | 1989-03-31 | 1993-01-19 | Hoya Corporation | Anti-reflection optical element |
| US5144498A (en) * | 1990-02-14 | 1992-09-01 | Hewlett-Packard Company | Variable wavelength light filter and sensor system |
| JP3446835B2 (ja) | 1991-03-27 | 2003-09-16 | Ｈｏｙａ株式会社 | ガラス光学素子用プレス成形型 |
| DE69208712T2 (de) | 1991-04-19 | 1996-10-17 | Fuji Photo Film Co Ltd | Vorläufer für eine Flachdruckplatte des Direktbildtyps |
| CH695281A5 (de) * | 1993-04-02 | 2006-02-28 | Balzers Hochvakuum | Verfahren zur Herstellung eines Filters, danach hergestellte optische Schicht, optisches Bauelement mit einer derartigen Schicht und Braeunungsanlage mit einem solchen Element. |
| JPH0720312A (ja) | 1993-06-30 | 1995-01-24 | Ushio Inc | 光学フィルター |
| DE4407502A1 (de) * | 1994-03-07 | 1995-09-14 | Leybold Ag | Mehrlagige Beschichtung |
| US5694240A (en) * | 1994-06-24 | 1997-12-02 | Bausch & Lomb Incorporated | Multilayer anti-reflective and ultraviolet blocking coating for sunglasses |
| US6342312B2 (en) * | 1996-03-22 | 2002-01-29 | Canon Kabushiki Kaisha | Calcium fluoride crystal, optical article and exposure apparatus for photo-lithography using the same |
| JPH10186102A (ja) * | 1996-12-26 | 1998-07-14 | Yazaki Corp | 反射防止膜 |
| FR2759360B1 (fr) * | 1997-02-10 | 1999-03-05 | Commissariat Energie Atomique | Materiau polymerique inorganique a base d'oxyde de tantale notamment a indice de refraction eleve, mecaniquement resistant a l'abrasion, son procede de fabrication et materiau optique comprenant ce materiau |
| JP3399883B2 (ja) * | 1999-08-30 | 2003-04-21 | 株式会社オハラ | 光フィルター用ガラス及び光フィルター |
| JP3509804B2 (ja) * | 1999-09-30 | 2004-03-22 | 株式会社ニコン | 多層薄膜付き光学素子及びそれを備える露光装置 |
| KR100379246B1 (ko) * | 2000-07-12 | 2003-04-08 | 한국과학기술연구원 | 두께에 따라 빔의 세기 분포 조절이 용이한 연속 중성밀도필터 |
| US6587288B2 (en) * | 2001-03-12 | 2003-07-01 | Optical Coating Laboratory, Inc. | Optical attenuation filter |
| DE10116339B4 (de) * | 2001-04-02 | 2005-05-12 | Danfoss Drives A/S | Verfahren zum Betreiben einer Zentrifugalpumpe |
-
2001
- 2001-05-22 DE DE10127225A patent/DE10127225A1/de not_active Withdrawn
-
2002
- 2002-05-17 EP EP02011010A patent/EP1260835B1/de not_active Expired - Lifetime
- 2002-05-17 JP JP2002143012A patent/JP2003050311A/ja active Pending
- 2002-05-17 DE DE50207537T patent/DE50207537D1/de not_active Expired - Fee Related
- 2002-05-22 US US10/151,892 patent/US20020191310A1/en not_active Abandoned
- 2002-05-22 KR KR1020020028424A patent/KR20020089201A/ko not_active Ceased
-
2004
- 2004-11-29 US US10/998,050 patent/US7196842B2/en not_active Expired - Fee Related
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004233474A (ja) * | 2003-01-29 | 2004-08-19 | Mitsubishi Heavy Ind Ltd | 光学系及び該光学系を用いた光学装置の使用方法 |
| US11796724B2 (en) | 2007-08-12 | 2023-10-24 | Toyota Motor Corporation | Omnidirectional structural color made from metal and dielectric layers |
| JP2009124143A (ja) * | 2007-11-13 | 2009-06-04 | Asml Holding Nv | 薄いフィルム状の連続的に空間的に調整された灰色減衰器及び灰色フィルタ |
| US8558988B2 (en) | 2007-11-13 | 2013-10-15 | Asml Holding N.V. | Thin film continuous spatially modulated grey attenuators and filters |
| JP2010198000A (ja) * | 2009-02-02 | 2010-09-09 | Ricoh Co Ltd | 光走査装置、画像形成装置および光通信システム |
| JP2014505996A (ja) * | 2010-11-30 | 2014-03-06 | アプライド マテリアルズ インコーポレイテッド | Ｕｖチャンバ内におけるウエハ処理プロファイルを調節する方法および装置 |
| US12210174B2 (en) | 2014-04-01 | 2025-01-28 | Toyota Motor Engineering & Manufacturing North America, Inc. | Non-color shifting multilayer structures |
| US11726239B2 (en) | 2014-04-01 | 2023-08-15 | Toyota Motor Engineering & Manufacturing North America, Inc. | Non-color shifting multilayer structures |
| CN111257986B (zh) * | 2015-07-07 | 2022-05-31 | 丰田自动车工程及制造北美公司 | 具有半导体吸收体层和介电吸收体层的组合的全向高色度红色结构色料 |
| CN111257986A (zh) * | 2015-07-07 | 2020-06-09 | 丰田自动车工程及制造北美公司 | 具有半导体吸收体层和介电吸收体层的组合的全向高色度红色结构色料 |
| JP2019514058A (ja) * | 2016-04-05 | 2019-05-30 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 投影レンズのための減衰フィルタ、投影露光装置のための減衰フィルタを有する投影レンズ、及び投影レンズを有する投影露光装置 |
| KR102393668B1 (ko) * | 2016-04-05 | 2022-05-03 | 칼 짜이스 에스엠티 게엠베하 | 투영 렌즈를 위한 감쇠 필터, 투영 노광 장치를 위한 감쇠 필터를 갖는 투영 렌즈 및 투영 렌즈를 갖는 투영 노광 장치 |
| JP7003055B2 (ja) | 2016-04-05 | 2022-01-20 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 投影レンズのための減衰フィルタ、投影露光装置のための減衰フィルタを有する投影レンズ、及び投影レンズを有する投影露光装置 |
| KR20180132764A (ko) * | 2016-04-05 | 2018-12-12 | 칼 짜이스 에스엠티 게엠베하 | 투영 렌즈를 위한 감쇠 필터, 투영 노광 장치를 위한 감쇠 필터를 갖는 투영 렌즈 및 투영 렌즈를 갖는 투영 노광 장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE10127225A1 (de) | 2002-11-28 |
| US20050179996A1 (en) | 2005-08-18 |
| DE50207537D1 (de) | 2006-08-31 |
| US7196842B2 (en) | 2007-03-27 |
| EP1260835A2 (de) | 2002-11-27 |
| US20020191310A1 (en) | 2002-12-19 |
| KR20020089201A (ko) | 2002-11-29 |
| EP1260835A3 (de) | 2003-11-19 |
| EP1260835B1 (de) | 2006-07-19 |
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