JP2002539003A5 - - Google Patents

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Publication number
JP2002539003A5
JP2002539003A5 JP2000605231A JP2000605231A JP2002539003A5 JP 2002539003 A5 JP2002539003 A5 JP 2002539003A5 JP 2000605231 A JP2000605231 A JP 2000605231A JP 2000605231 A JP2000605231 A JP 2000605231A JP 2002539003 A5 JP2002539003 A5 JP 2002539003A5
Authority
JP
Japan
Prior art keywords
zinc oxide
doped zinc
oxide layer
target
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000605231A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002539003A (ja
JP4571315B2 (ja
Filing date
Publication date
Priority claimed from US09/271,656 external-priority patent/US6517687B1/en
Application filed filed Critical
Publication of JP2002539003A publication Critical patent/JP2002539003A/ja
Publication of JP2002539003A5 publication Critical patent/JP2002539003A5/ja
Application granted granted Critical
Publication of JP4571315B2 publication Critical patent/JP4571315B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000605231A 1999-03-17 2000-02-07 耐候性の向上した紫外フィルター及びその製造方法 Expired - Fee Related JP4571315B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/271,656 1999-03-17
US09/271,656 US6517687B1 (en) 1999-03-17 1999-03-17 Ultraviolet filters with enhanced weatherability and method of making
PCT/US2000/003076 WO2000055654A1 (en) 1999-03-17 2000-02-07 Ultraviolet filters with enhanced weatherability and method of making

Publications (3)

Publication Number Publication Date
JP2002539003A JP2002539003A (ja) 2002-11-19
JP2002539003A5 true JP2002539003A5 (enExample) 2007-03-29
JP4571315B2 JP4571315B2 (ja) 2010-10-27

Family

ID=23036500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000605231A Expired - Fee Related JP4571315B2 (ja) 1999-03-17 2000-02-07 耐候性の向上した紫外フィルター及びその製造方法

Country Status (6)

Country Link
US (1) US6517687B1 (enExample)
EP (1) EP1163544B1 (enExample)
JP (1) JP4571315B2 (enExample)
AT (1) ATE493681T1 (enExample)
DE (1) DE60045443D1 (enExample)
WO (1) WO2000055654A1 (enExample)

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JP2016087841A (ja) * 2014-10-31 2016-05-23 正尚 曹 複合混合物の製造方法
TWI634221B (zh) * 2017-09-01 2018-09-01 行政院原子能委員會核能硏究所 電化學元件之製造方法
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