JP2002538624A5 - - Google Patents
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- Publication number
- JP2002538624A5 JP2002538624A5 JP2000603088A JP2000603088A JP2002538624A5 JP 2002538624 A5 JP2002538624 A5 JP 2002538624A5 JP 2000603088 A JP2000603088 A JP 2000603088A JP 2000603088 A JP2000603088 A JP 2000603088A JP 2002538624 A5 JP2002538624 A5 JP 2002538624A5
- Authority
- JP
- Japan
- Prior art keywords
- underfill material
- integrated circuit
- substrate
- underfill
- processing station
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 description 26
- 239000000758 substrate Substances 0.000 description 11
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/262,132 | 1999-03-03 | ||
| US09/262,132 US6528345B1 (en) | 1999-03-03 | 1999-03-03 | Process line for underfilling a controlled collapse |
| PCT/US2000/003243 WO2000052751A1 (en) | 1999-03-03 | 2000-02-08 | A process line for underfilling a controlled collapse chip connection (c4) integrated circuit package |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002538624A JP2002538624A (ja) | 2002-11-12 |
| JP2002538624A5 true JP2002538624A5 (enExample) | 2007-03-15 |
Family
ID=22996282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000603088A Pending JP2002538624A (ja) | 1999-03-03 | 2000-02-08 | 制御崩壊チップ接続(c4)集積回路パッケージをアンダーフィルするプロセス・ライン |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6528345B1 (enExample) |
| JP (1) | JP2002538624A (enExample) |
| KR (1) | KR100438991B1 (enExample) |
| CN (1) | CN1171296C (enExample) |
| AU (1) | AU2986100A (enExample) |
| MX (1) | MXPA01008581A (enExample) |
| WO (1) | WO2000052751A1 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6833629B2 (en) | 2001-12-14 | 2004-12-21 | National Starch And Chemical Investment Holding Corporation | Dual cure B-stageable underfill for wafer level |
| US7238550B2 (en) * | 2002-02-26 | 2007-07-03 | Tandon Group Ltd. | Methods and apparatus for fabricating Chip-on-Board modules |
| US6798806B1 (en) * | 2002-09-03 | 2004-09-28 | Finisar Corporation | Hybrid mirror VCSELs |
| US7242097B2 (en) | 2003-06-30 | 2007-07-10 | Intel Corporation | Electromigration barrier layers for solder joints |
| US7026376B2 (en) * | 2003-06-30 | 2006-04-11 | Intel Corporation | Fluxing agent for underfill materials |
| US20050121310A1 (en) * | 2003-12-03 | 2005-06-09 | Intel Corporation | Method and substrate to control flow of underfill |
| JP5262045B2 (ja) * | 2007-09-27 | 2013-08-14 | 富士通セミコンダクター株式会社 | 電極の形成方法及び半導体装置の製造方法 |
| US7915732B2 (en) * | 2008-06-30 | 2011-03-29 | International Business Mahines Corporation | Production of integrated circuit chip packages prohibiting formation of micro solder balls |
Family Cites Families (43)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4322737A (en) | 1979-11-20 | 1982-03-30 | Intel Corporation | Integrated circuit micropackaging |
| JPS63239827A (ja) | 1987-03-27 | 1988-10-05 | Hitachi Ltd | 半導体装置 |
| EP0340492A3 (en) * | 1988-05-02 | 1990-07-04 | International Business Machines Corporation | Conformal sealing and interplanar encapsulation of electronic device structures |
| JPH0256941A (ja) | 1988-08-20 | 1990-02-26 | Matsushita Electric Works Ltd | 半導体素子の封止方法 |
| JPH0340458A (ja) | 1989-07-07 | 1991-02-21 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
| JPH0639563B2 (ja) | 1989-12-15 | 1994-05-25 | 株式会社日立製作所 | 半導体装置の製法 |
| US5371325A (en) | 1992-10-30 | 1994-12-06 | At&T Corp. | Insulation system for magnetic devices |
| US5321583A (en) | 1992-12-02 | 1994-06-14 | Intel Corporation | Electrically conductive interposer and array package concept for interconnecting to a circuit board |
| US5371328A (en) | 1993-08-20 | 1994-12-06 | International Business Machines Corporation | Component rework |
| JP2774436B2 (ja) | 1993-09-07 | 1998-07-09 | リンナイ株式会社 | 多孔質体 |
| US5539153A (en) | 1994-08-08 | 1996-07-23 | Hewlett-Packard Company | Method of bumping substrates by contained paste deposition |
| JP3233535B2 (ja) | 1994-08-15 | 2001-11-26 | 株式会社東芝 | 半導体装置及びその製造方法 |
| JPH08153830A (ja) | 1994-11-29 | 1996-06-11 | Toshiba Corp | 半導体装置およびその製造方法 |
| US5864178A (en) | 1995-01-12 | 1999-01-26 | Kabushiki Kaisha Toshiba | Semiconductor device with improved encapsulating resin |
| US5811317A (en) | 1995-08-25 | 1998-09-22 | Texas Instruments Incorporated | Process for reflow bonding a semiconductor die to a substrate and the product produced by the product |
| EP0778616A3 (en) | 1995-12-05 | 1999-03-31 | Lucent Technologies Inc. | Method of packaging devices with a gel medium confined by a rim member |
| US5766982A (en) | 1996-03-07 | 1998-06-16 | Micron Technology, Inc. | Method and apparatus for underfill of bumped or raised die |
| US5751556A (en) | 1996-03-29 | 1998-05-12 | Intel Corporation | Method and apparatus for reducing warpage of an assembly substrate |
| JP3235454B2 (ja) | 1996-03-29 | 2001-12-04 | 松下電器産業株式会社 | 電子部品の接合方法 |
| US5821456A (en) | 1996-05-01 | 1998-10-13 | Motorola, Inc. | Microelectronic assembly including a decomposable encapsulant, and method for forming and reworking same |
| JP2891184B2 (ja) * | 1996-06-13 | 1999-05-17 | 日本電気株式会社 | 半導体装置及びその製造方法 |
| JPH1055832A (ja) | 1996-08-08 | 1998-02-24 | Yazaki Corp | 圧接端子 |
| US5804771A (en) | 1996-09-26 | 1998-09-08 | Intel Corporation | Organic substrate (PCB) slip plane "stress deflector" for flip chip deivces |
| JP2848357B2 (ja) | 1996-10-02 | 1999-01-20 | 日本電気株式会社 | 半導体装置の実装方法およびその実装構造 |
| US5942805A (en) | 1996-12-20 | 1999-08-24 | Intel Corporation | Fiducial for aligning an integrated circuit die |
| US5891753A (en) | 1997-01-24 | 1999-04-06 | Micron Technology, Inc. | Method and apparatus for packaging flip chip bare die on printed circuit boards |
| US5990552A (en) | 1997-02-07 | 1999-11-23 | Intel Corporation | Apparatus for attaching a heat sink to the back side of a flip chip package |
| US5815372A (en) | 1997-03-25 | 1998-09-29 | Intel Corporation | Packaging multiple dies on a ball grid array substrate |
| US6104093A (en) | 1997-04-24 | 2000-08-15 | International Business Machines Corporation | Thermally enhanced and mechanically balanced flip chip package and method of forming |
| JPH1154884A (ja) | 1997-08-06 | 1999-02-26 | Nec Corp | 半導体装置の実装構造 |
| US5919329A (en) | 1997-10-14 | 1999-07-06 | Gore Enterprise Holdings, Inc. | Method for assembling an integrated circuit chip package having at least one semiconductor device |
| US6049122A (en) | 1997-10-16 | 2000-04-11 | Fujitsu Limited | Flip chip mounting substrate with resin filled between substrate and semiconductor chip |
| US5998242A (en) | 1997-10-27 | 1999-12-07 | Lsi Logic Corporation | Vacuum assisted underfill process and apparatus for semiconductor package fabrication |
| US5917702A (en) | 1997-11-26 | 1999-06-29 | Intel Corporation | Corner heat sink which encloses an integrated circuit of a ball grid array integrated circuit package |
| US6049124A (en) | 1997-12-10 | 2000-04-11 | Intel Corporation | Semiconductor package |
| US5936304A (en) | 1997-12-10 | 1999-08-10 | Intel Corporation | C4 package die backside coating |
| US5965937A (en) | 1997-12-15 | 1999-10-12 | Intel Corporation | Thermal interface attach mechanism for electrical packages |
| US5991161A (en) | 1997-12-19 | 1999-11-23 | Intel Corporation | Multi-chip land grid array carrier |
| US5920120A (en) | 1997-12-19 | 1999-07-06 | Intel Corporation | Assembly for dissipatating heat from a semiconductor chip wherein a stress on the semiconductor chip due to a thermally conductive member is partially relieved |
| US6201301B1 (en) | 1998-01-21 | 2001-03-13 | Lsi Logic Corporation | Low cost thermally enhanced flip chip BGA |
| US5953814A (en) * | 1998-02-27 | 1999-09-21 | Delco Electronics Corp. | Process for producing flip chip circuit board assembly exhibiting enhanced reliability |
| US6057381A (en) * | 1998-07-02 | 2000-05-02 | National Starch And Chemical Investment Holding Corporation | Method of making an electronic component using reworkable underfill encapsulants |
| US6238948B1 (en) | 1999-03-03 | 2001-05-29 | Intel Corporation | Controlled collapse chip connection (C4) integrated circuit package that has a fillet which seals an underfill material |
-
1999
- 1999-03-03 US US09/262,132 patent/US6528345B1/en not_active Expired - Fee Related
-
2000
- 2000-02-08 JP JP2000603088A patent/JP2002538624A/ja active Pending
- 2000-02-08 WO PCT/US2000/003243 patent/WO2000052751A1/en not_active Ceased
- 2000-02-08 CN CNB008045658A patent/CN1171296C/zh not_active Expired - Fee Related
- 2000-02-08 MX MXPA01008581A patent/MXPA01008581A/es not_active IP Right Cessation
- 2000-02-08 AU AU29861/00A patent/AU2986100A/en not_active Abandoned
- 2000-02-08 KR KR10-2001-7011229A patent/KR100438991B1/ko not_active Expired - Fee Related
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