JP2002535701A5 - - Google Patents

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Publication number
JP2002535701A5
JP2002535701A5 JP2000593988A JP2000593988A JP2002535701A5 JP 2002535701 A5 JP2002535701 A5 JP 2002535701A5 JP 2000593988 A JP2000593988 A JP 2000593988A JP 2000593988 A JP2000593988 A JP 2000593988A JP 2002535701 A5 JP2002535701 A5 JP 2002535701A5
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JP
Japan
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JP2000593988A
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Japanese (ja)
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JP2002535701A (ja
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Priority claimed from US09/231,428 external-priority patent/US6203952B1/en
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Publication of JP2002535701A publication Critical patent/JP2002535701A/ja
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JP2000593988A 1999-01-14 1999-12-13 薄膜にパターンを形成する方法 Pending JP2002535701A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/231,428 US6203952B1 (en) 1999-01-14 1999-01-14 Imaged article on polymeric substrate
US09/231,428 1999-01-14
PCT/US1999/029447 WO2000042472A1 (en) 1999-01-14 1999-12-13 Method for patterning thin films

Publications (2)

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JP2002535701A JP2002535701A (ja) 2002-10-22
JP2002535701A5 true JP2002535701A5 (https=) 2007-01-11

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JP2000593988A Pending JP2002535701A (ja) 1999-01-14 1999-12-13 薄膜にパターンを形成する方法

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US (2) US6203952B1 (https=)
EP (1) EP1141776B1 (https=)
JP (1) JP2002535701A (https=)
KR (1) KR20010112240A (https=)
CN (1) CN1348553A (https=)
DE (1) DE69940959D1 (https=)
WO (1) WO2000042472A1 (https=)

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