JP2002365182A5 - - Google Patents

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Publication number
JP2002365182A5
JP2002365182A5 JP2001176475A JP2001176475A JP2002365182A5 JP 2002365182 A5 JP2002365182 A5 JP 2002365182A5 JP 2001176475 A JP2001176475 A JP 2001176475A JP 2001176475 A JP2001176475 A JP 2001176475A JP 2002365182 A5 JP2002365182 A5 JP 2002365182A5
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JP
Japan
Prior art keywords
sample
charged particle
particle beam
sample preparation
ion beam
Prior art date
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Application number
JP2001176475A
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English (en)
Japanese (ja)
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JP3778008B2 (ja
JP2002365182A (ja
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Priority to JP2001176475A priority Critical patent/JP3778008B2/ja
Priority claimed from JP2001176475A external-priority patent/JP3778008B2/ja
Publication of JP2002365182A publication Critical patent/JP2002365182A/ja
Publication of JP2002365182A5 publication Critical patent/JP2002365182A5/ja
Application granted granted Critical
Publication of JP3778008B2 publication Critical patent/JP3778008B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2001176475A 2001-06-12 2001-06-12 試料作製装置 Expired - Lifetime JP3778008B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001176475A JP3778008B2 (ja) 2001-06-12 2001-06-12 試料作製装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001176475A JP3778008B2 (ja) 2001-06-12 2001-06-12 試料作製装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005362596A Division JP4135013B2 (ja) 2005-12-16 2005-12-16 試料作製装置

Publications (3)

Publication Number Publication Date
JP2002365182A JP2002365182A (ja) 2002-12-18
JP2002365182A5 true JP2002365182A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2005-11-04
JP3778008B2 JP3778008B2 (ja) 2006-05-24

Family

ID=19017454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001176475A Expired - Lifetime JP3778008B2 (ja) 2001-06-12 2001-06-12 試料作製装置

Country Status (1)

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JP (1) JP3778008B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4942180B2 (ja) 2006-02-28 2012-05-30 エスアイアイ・ナノテクノロジー株式会社 試料作製装置
CN106783494B (zh) * 2016-12-06 2018-07-06 北京工业大学 一种透射电镜样品杆真空存储与测试装置
JP7217298B2 (ja) 2021-01-08 2023-02-02 日本電子株式会社 試料ホルダーおよび荷電粒子線装置
JP7267316B2 (ja) * 2021-01-08 2023-05-01 日本電子株式会社 試料ホルダーおよび荷電粒子線装置
JP7267317B2 (ja) 2021-01-08 2023-05-01 日本電子株式会社 搬送装置および荷電粒子線装置
JP7267318B2 (ja) 2021-01-08 2023-05-01 日本電子株式会社 荷電粒子線装置
CN113325022B (zh) * 2021-07-08 2022-11-04 上海科技大学 一种准原位光电子能谱测试装置及其测试方法

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