JP2002365182A5

JP2002365182A5 -

Info

Publication number: JP2002365182A5
Application number: JP2001176475A
Authority: JP
Filing date: 2001-06-12
Publication date: 2005-11-04
Anticipated expiration: 2021-06-12

Claims

A first stage installed in a housing and for placing a sample;
A first irradiation optical system for irradiating the sample with an ion beam;
A second stage including a sample holder for fixing a sample piece extracted from the sample, and a mounting portion for mounting the sample holder;
Transfer means for placing the sample piece on the second stage;
A second irradiation optical system for irradiating the sample or sample piece with a charged particle beam;
In a sample preparation apparatus having at least secondary particle detection means for detecting secondary particles generated by irradiation with the charged particle beam or ion beam,
Means for transporting the sample into and out of the housing;
A sample preparation apparatus comprising an outlet for taking out the second stage from a path different from a path for transporting the sample to the housing.

A sample stage installed in a housing and for placing a sample;
An irradiation optical system for irradiating the sample with a charged particle beam;
Secondary particle detection means for detecting secondary particles generated by irradiation of the charged particle beam;
Means for extracting and moving a sample piece separated by irradiating the charged particle beam to the sample;
A cartridge for mounting the extracted sample piece;
Means for transporting the sample into and out of the housing;
A sample preparation device comprising an outlet for taking out the cartridge from the housing.

A first stage for placing a sample in a housing; an irradiation optical system for irradiating the sample with a charged particle beam; and a secondary particle detecting means for detecting secondary particles generated by the irradiation of the charged particle beam; In the ion beam apparatus having at least means for extracting and moving the sample piece separated by irradiating the ion beam to the sample
Transport means for carrying the sample into or out of the housing;
A second stage on which the sample piece is transferred,
A sample preparation apparatus, wherein the second stage is taken out from a path different from a path for transporting the sample to the housing.

In the sample preparation device according to claim 1 or 3,
The sample preparation apparatus, wherein the second stage is a cartridge.

In the sample preparation device according to claim 1,
The sample holder is a TEM holder for a transmission electron microscope or a scanning transmission electron microscope.

In the sample preparation device according to claim 2 or 4,
The cartridge is a focused charged particle beam device, a projected charged particle beam device, a transmission electron microscope, a scanning electron microscope, a scanning probe microscope, an Auger electron spectroscopy analyzer, an electron probe X-ray microanalyzer, an electron energy defect analyzer, two A sample preparation device characterized in that it can be loaded into at least one of a secondary ion mass spectrometer, a neutral particle ionization mass spectrometer, an X-ray photoelectron spectrometer, or an electrical measuring device using a probe.

In the sample preparation device according to claim 1,
The sample preparation apparatus, wherein the charged particle beam is an electron beam.

In the sample preparation device according to any one of claims 2, 4, and 6,
A sample preparation apparatus comprising a cartridge station capable of storing at least one of the cartridges.

In the sample preparation device according to claim 2 or 3,
The sample preparation apparatus characterized in that the charged particle beam can be irradiated also to the sample piece.

In the sample preparation device according to any one of claims 2, 3, and 9,
The sample preparation apparatus, wherein the charged particle beam is an ion beam.

In the sample preparation device according to any one of claims 1 to 3,
The sample preparation apparatus, wherein the sample is a wafer.

In a method of using an ion beam device to extract a sample piece from a sample,
Transport the sample into the case of the ion beam device;
Extracting a sample piece from the sample using the ion beam device for the sample,
The method, wherein the sample piece is taken out of the casing from a path different from a path for transporting the sample to the casing.

The method of claim 12, wherein
The ion beam apparatus includes means for extracting and moving a sample piece separated by irradiating the sample with the ion beam.

The method according to claim 12 or 13, wherein:
The ion beam apparatus includes a cartridge capable of fixing the extracted sample piece.

15. The method of claim 14, wherein
The ion beam apparatus includes a window for taking out the cartridge from the housing.

The method according to claim 14 or 15, wherein
The cartridge is divertable to a transmission electron microscope or a scanning transmission electron microscope.

The method of claim 12, wherein
The method wherein the sample is a wafer.

A sample stage installed in the sample chamber and on which the sample is placed;
An irradiation optical system for irradiating the sample with a charged particle beam;
Secondary particle detection means for detecting secondary particles generated by irradiation of the charged particle beam;
Means for extracting and moving a sample piece separated by irradiating the charged particle beam to the sample;
A cartridge for mounting the extracted sample piece;
Means for transporting the sample into and out of the sample chamber;
A valve that can be hermetically shielded in the transport path of the sample;
A sample preparation device comprising: a valve that is hermetically shielded in a transport path of the cartridge.

The sample preparation device according to claim 18,
The sample preparation apparatus, wherein the charged particle beam is an ion beam.