JPS592521Y2 - Continuous sample introduction device in mass spectrometer - Google Patents

Continuous sample introduction device in mass spectrometer

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Publication number
JPS592521Y2
JPS592521Y2 JP8726478U JP8726478U JPS592521Y2 JP S592521 Y2 JPS592521 Y2 JP S592521Y2 JP 8726478 U JP8726478 U JP 8726478U JP 8726478 U JP8726478 U JP 8726478U JP S592521 Y2 JPS592521 Y2 JP S592521Y2
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JP
Japan
Prior art keywords
sample
sample container
vacuum chamber
holder
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8726478U
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Japanese (ja)
Other versions
JPS553788U (en
Inventor
澄男 柴田
茂雄 馬場
Original Assignee
株式会社島津製作所
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Priority to JP8726478U priority Critical patent/JPS592521Y2/en
Publication of JPS553788U publication Critical patent/JPS553788U/ja
Application granted granted Critical
Publication of JPS592521Y2 publication Critical patent/JPS592521Y2/en
Expired legal-status Critical Current

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Description

【考案の詳細な説明】 この考案は試料の分析などを行なうために10−4〜1
0 ’Torr程度の真空室内に試料を容器に入れて大
気圧下の室外から持込み、分析測定などを行なった後で
室外に持出すのに用いられる質量分析計における試料導
入装置の改良に関するものである。
[Detailed explanation of the device] This device uses 10-4 to 1 in order to perform sample analysis, etc.
This relates to improvements to the sample introduction device in mass spectrometers, which are used to bring a sample into a vacuum chamber at about 0' Torr from outside at atmospheric pressure, perform analysis, and then take it outside the room. be.

質量分析計において使用されている従来の試料導入装置
の一つである直接試料導入装置を模式的に示すと第1図
のとおりであり、この装置による試料の分析計内への導
入ならびに測定はつぎのようにして行なわれる。
Figure 1 schematically shows a direct sample introduction device, which is one of the conventional sample introduction devices used in mass spectrometers.The introduction and measurement of a sample into the analyzer using this device is as follows. It is done as follows.

すなわち、試料をいれた試料容器1を試料導入プローブ
2の先端の試料容器収容部にその内部に取付けられてい
るコイルばねを介してセットし、ついでこのプローブ2
を分析計の予備室3内に挿入し、別に設けた回転ポンプ
と油拡散ポンプなどからなる排気装置に接続する管路の
バルブ4を開いて予備室3を排気し、その圧力が10−
2〜1O−5Torr程度まで排気がなされた時点にお
いて試料のイオン化室5を備えている試料導入部6と予
備室3との間に設けたバルブ(サークルバルブ)7を開
いて気密に隔離された左右の室内を連通ずるとともに、
開かれたバルブ7の貫通孔を介して前記プローブ2を導
入部6に押し込み、試料容器1の端面が試料容器収容部
のコイルばねの弾発力によってイオン化室5の側面に圧
接されるようにセットする。
That is, the sample container 1 containing the sample is set in the sample container accommodating portion at the tip of the sample introduction probe 2 via the coil spring installed inside the sample container 1, and then the probe 2 is
is inserted into the preparatory chamber 3 of the analyzer, and the preparatory chamber 3 is evacuated by opening the valve 4 of the conduit connected to an exhaust system consisting of a rotary pump and an oil diffusion pump separately provided, and the pressure reaches 10-
At the point when the exhaust air is evacuated to about 2 to 1 O-5 Torr, a valve (circle valve) 7 provided between the sample introduction section 6 containing the sample ionization chamber 5 and the preliminary chamber 3 is opened to airtightly isolate the chamber. In addition to connecting the left and right rooms,
The probe 2 is pushed into the introduction section 6 through the through hole of the opened valve 7, so that the end surface of the sample container 1 is pressed against the side surface of the ionization chamber 5 by the elastic force of the coil spring of the sample container accommodating section. set.

プローブ2を前記のようにセットし終ると、コイル状の
ヒータ8によって試料容器1を加熱し、試料容器にいれ
た試料を気化させ試料ガスとし、イオン化室5の内部に
導入する。
When the probe 2 is set as described above, the sample container 1 is heated by the coiled heater 8, and the sample contained in the sample container is vaporized to form a sample gas, which is introduced into the ionization chamber 5.

導入された試料ガスは図には示されていないが、赤熱さ
れたフィラメントから放出され、窓9をとおしてターゲ
ットにむけて射出される電子によってイオン化される。
The introduced sample gas, not shown in the figure, is ionized by electrons emitted from the red-hot filament and emitted through window 9 toward the target.

そして、イオン化室5に加えられる数千ボルトの電圧で
加速された帯状のイオン流は下方のレンズ電極10の作
用でイオン源スリット11上に収束される。
The band-shaped ion flow accelerated by a voltage of several thousand volts applied to the ionization chamber 5 is focused onto the ion source slit 11 by the action of the lower lens electrode 10.

このスリット11を通過したイオンビームは図示されて
いないが、主マグネットで質量分離され、コレクタスリ
ットをへてイオン検出器によって試料ガスの質量分析が
なされるのである。
Although the ion beam passing through this slit 11 is not shown, it is mass-separated by a main magnet, passes through a collector slit, and the sample gas is subjected to mass analysis by an ion detector.

つぎにこの装置による試料容器の室外への持出しについ
てのべると、試料の分析測定が終了した試料容器1を、
プローブ2を右方向へ引出して予備室3に持出し、つい
でバルブ7を閉じて、試料導入部6と予備室3とを遮断
する。
Next, we will talk about how to take the sample container outside the room using this device.
The probe 2 is pulled out to the right and taken out into the preliminary chamber 3, and then the valve 7 is closed to shut off the sample introduction section 6 and the preliminary chamber 3.

この場合プローブ2に対するバルブ貫通孔は同時に閉塞
されることはいうまでもない。
In this case, it goes without saying that the valve through-hole for the probe 2 is closed at the same time.

バルブ4を閉じて予備室3と排気系との接続をたち、予
備室3内へ大気を導入して大気圧状態にしてあら、プロ
ーブ2を室外に完全に引出し、試料容器1を外部に取出
し回収する。
Close the valve 4 to disconnect the preliminary chamber 3 from the exhaust system, introduce the atmosphere into the preliminary chamber 3 to bring it to atmospheric pressure, then completely pull out the probe 2 outside the room and take out the sample container 1 outside. to recover.

そして代りにプローブ2につぎの試料をいれた試料容器
1を装填し、前記した試料導入操作を繰返えし、再び試
料の分析測定を行なっている。
Then, instead, the sample container 1 containing the next sample is loaded into the probe 2, the above-described sample introduction operation is repeated, and the sample is analyzed and measured again.

以上のべたように質量分析計における従来の試料導入装
置においては、試料の分析計への導入毎に真空排気操作
が必要であるから、多数の試料をつぎつぎに分析測定す
る場合には分析測定に要する延時間の中で前記準備工程
の占める割合が30〜50%と大きく、能率の高い分析
測定を行なうことができず、また真空エアロツク装置に
よって行なう準備工程を試料の測定ごとに繰返さねばな
らない繁雑さをさけることができない。
As mentioned above, with conventional sample introduction devices for mass spectrometers, a vacuum evacuation operation is required each time a sample is introduced into the analyzer. The preparation process accounts for a large proportion of 30 to 50% of the total time required, making it impossible to carry out highly efficient analysis and measurement, and the preparation process, which is performed using a vacuum aerodynamic device, must be repeated every time a sample is measured. I can't avoid it.

一方、真空エアロツク装置を頻度高く作動させることは
、真空ポンプからの微量油分や大気の微重成分をイオン
化室5に持込み、それをイオンにして10 ’Torr
程度のより一層高真空に保持される分析管に持込み、そ
の測定のバックグラウンドを乱す機会を与えることにも
なる。
On the other hand, operating the vacuum aerodynamic device frequently means that trace amounts of oil from the vacuum pump and fine components of the atmosphere are brought into the ionization chamber 5 and ionized at 10' Torr.
It also provides an opportunity to carry the sample into the analysis tube, which is held at a much higher vacuum, and disturb the background of the measurement.

この考案は前記した現状に鑑み、従来の試料導入装置に
おける前記した不都合を解消する目的をもってなされた
ものであって、試料をいれた試料容器の複数個を装填し
た試料容器を真空エアロツク装置を介して10−4〜1
O−7Torrに維持される試料導入部に導入し待機さ
せ、その試料容器保持器から試料容器を1個づつ連続し
て内部の真空度をそのまま維持しながら外部から操作す
ることによって試料導入部内の所定位置に導入して、試
料の測定を実施しうるようにするとともに、測定を終え
た試料容器はその都度外部からの操作によって真空状態
に保持した回収容器に回収できるようにした操作が簡便
であり、かつその操作を能率高く行なうことが可能な質
量分析計における連続試料導入装置を提供しようとする
ものである。
In view of the current situation described above, this invention was made with the purpose of solving the above-mentioned disadvantages of conventional sample introduction devices, and it is possible to transfer sample containers loaded with a plurality of sample containers through a vacuum air system. Te10-4~1
The inside of the sample introduction section is introduced into the sample introduction section maintained at O-7 Torr and left on standby, and the sample containers are successively inserted one by one from the sample container holder and operated from the outside while maintaining the internal vacuum level. In addition to being able to carry out sample measurements by introducing it into a predetermined position, the sample container can be easily collected after each measurement into a collection container maintained in a vacuum state by an external operation. It is an object of the present invention to provide a continuous sample introduction device for a mass spectrometer that can be operated efficiently.

以下、この考案にかかる一実施例装置について図面を参
照しながら詳細に説明する。
Hereinafter, one embodiment of the device according to the invention will be described in detail with reference to the drawings.

第2図は一般的な熱電子衝撃形イオン源を用いた磁界形
単収束質量分析計に組みこまれたこの装置の模式説明図
である。
FIG. 2 is a schematic explanatory diagram of this apparatus incorporated into a magnetic field type single focus mass spectrometer using a general thermionic impact type ion source.

3は予備室で、回転ポンプおよび油拡散ポンプなどから
なる排気系につながる管路と図示されていないが、バル
ブを介して接続されている。
Reference numeral 3 denotes a preparatory chamber, which is connected via a valve (not shown) to a pipe line connected to an exhaust system consisting of a rotary pump, an oil diffusion pump, etc.

6は試料導入部で10−4〜1O−7Torrの真空度
につねに維持されている真空チャンバー、7,7′はバ
ルブ(サークルバルブ)で、把手7″を操作することに
よって、バルブに設けられた貫通孔の開閉がなされ、そ
の上下に接続する各室の連通および遮断が行なわれる。
Reference numeral 6 is a vacuum chamber that is always maintained at a vacuum level of 10-4 to 1O-7 Torr at the sample introduction part, and 7 and 7' are valves (circle valves) that can be attached to the valves by operating the handle 7''. The through-holes are opened and closed, and the chambers connected above and below are communicated with and shut off.

イオン化室5、コイル状ヒータ8、窓9、レンズ電極1
0およびイオン源スリット11については第1図に示し
たものと同一であるので説明は省略する。
Ionization chamber 5, coiled heater 8, window 9, lens electrode 1
0 and the ion source slit 11 are the same as those shown in FIG. 1, so their explanation will be omitted.

12は試料容器保持器、13は試料容器装填操作ロッド
、14は試料導入プローブ、15は試料容器収容部(ボ
ート)である。
12 is a sample container holder, 13 is a sample container loading operation rod, 14 is a sample introduction probe, and 15 is a sample container accommodating section (boat).

これらについては第3図の斜視図にもとすいて説明する
These will be explained based on the perspective view of FIG.

なお説明の便宜上第2図においては、試料容器保持器1
2とその操作ロッド13は位置を90°まわして示しで
ある。
For convenience of explanation, sample container holder 1 is shown in FIG.
2 and its operating rod 13 are shown rotated by 90 degrees.

21は支持腕で、それに細長い箱枠22が取付けられて
おり、箱枠22の右側正面には、箱の底の用をなすL字
形の板ばね23がその上端部にて固定されている。
Reference numeral 21 denotes a support arm, to which is attached an elongated box frame 22, and on the right front side of the box frame 22, an L-shaped leaf spring 23, which serves as the bottom of the box, is fixed at its upper end.

すなわち箱枠22と板ばね23とで装填用箱が形成され
、それに試料容器1′が積み重ねて(図では7個)収容
される。
That is, a loading box is formed by the box frame 22 and the leaf spring 23, and the sample containers 1' are stacked (seven in the figure) in the loading box.

支持腕21の箱枠22を取付けた面の反対面には、逆子
字形の板ばねの下端部をそれぞれ側面に90°折曲げ成
形した押し板ばね24がその上端部で片持式に固定され
ている。
On the opposite side of the support arm 21 to the side to which the box frame 22 is attached, a pushing plate spring 24 is fixed in a cantilever manner with its upper end, which is formed by bending the lower end of an inverted letter-shaped leaf spring 90 degrees to the side surface. ing.

押し板ばね24と、箱枠22の押し板ばね24の対向面
のそれぞれ下端部には同一位置に貫通スリット25が設
けられている。
A through slit 25 is provided at the same position at the lower end of the pushing leaf spring 24 and the opposing surface of the pushing leaf spring 24 of the box frame 22, respectively.

26はL字形小板ばねでその上端部において押し板ばね
24に固定され、その下方の折曲げられた下端部は前記
スリット25に挿入されており、その先端が箱枠22内
に収容されている試料容器1′の一番下のものと、下か
ら二番目のものとの接線を指向するようにされている。
Reference numeral 26 denotes an L-shaped small leaf spring whose upper end is fixed to the pusher leaf spring 24, whose bent lower end is inserted into the slit 25, and whose tip is accommodated in the box frame 22. The tangent line between the bottom sample container 1' and the second sample container 1' from the bottom is oriented.

15′はボート15の先端部にあけられた小孔で、試料
ガスの導入孔をなす。
Reference numeral 15' denotes a small hole drilled at the tip of the boat 15, which serves as a sample gas introduction hole.

27は試料ガス導入筒で、コイル状ヒータ8の内部に設
けられており、その内径はボート15の外径よりやや大
きくしである。
Reference numeral 27 denotes a sample gas introduction cylinder, which is provided inside the coiled heater 8, and its inner diameter is slightly larger than the outer diameter of the boat 15.

28.28’は操作ロッド13、試料導入プローブ14
それぞれに対するシール部、29はバルブ7′に取付け
られた上端に開口部を有する試料容器1′の回収びんで
ある。
28. 28' is the operating rod 13 and the sample introduction probe 14
The seal 29 for each is a collection bottle for the sample container 1' having an opening at the upper end attached to the valve 7'.

つぎにこの装置における動作について説明する。Next, the operation of this device will be explained.

試料をいれた試料容器1′の複数個を装填した試料容器
保持器12をバルブ7を閉じて、10−’〜1O−7T
orrの真空度に保持されている導入部6と遮断し、大
気圧状態とした予備室3に挿入する。
With the valve 7 closed, the sample container holder 12 loaded with a plurality of sample containers 1' containing samples is placed at 10-' to 1O-7T.
It is cut off from the introduction section 6, which is maintained at a vacuum level of orr, and inserted into the preliminary chamber 3, which is brought into an atmospheric pressure state.

ついで前記したように図には示していないが、排気管路
と接続するバルブを開けて、予備室3の排気を行ない、
その圧力が10−2〜1O−5Torrに達した時点で
、把手7″を操作してバルブ7を開け、その貫通孔を介
して図示の位置まで試料容器保持器12を押込みその位
置に保持する。
Next, as mentioned above, although not shown in the figure, the valve connected to the exhaust pipe is opened to exhaust the preliminary chamber 3.
When the pressure reaches 10-2 to 1 O-5 Torr, open the valve 7 by operating the handle 7'', push the sample container holder 12 through the through hole to the position shown, and hold it at that position. .

つぎに試料容器装填操作ロッド13をコイルばねの弾発
力に抗してその先端のノブにて矢印方向に押すと、第4
図に示すとおり押し板ばね24がその下部の左右の折曲
げ部の先端で板ばね23を押し出し、箱枠22の底をな
していた部分がはずされることから一番下の試料容器1
′が落され、その下方位置で待機している試料導入プロ
ーブ14のボート15にうけとめられ、その中に収容さ
れる。
Next, when the sample container loading operation rod 13 is pushed in the direction of the arrow with the knob at its tip against the elastic force of the coil spring, the fourth
As shown in the figure, the pushing leaf spring 24 pushes out the leaf spring 23 at the tips of the left and right bent parts at the bottom, and the bottom part of the box frame 22 is removed, so that the lowermost sample container 1
' is dropped, is received by the boat 15 of the sample introduction probe 14 waiting at a position below it, and is housed therein.

一方保持器12の残りの試料容器1′は、下から二番目
のものが押し板ばね24とともに押しこまれる小板ばね
26の折曲げ部によって支えられるので、試料容器保持
器12に保持され、操作ロッド13がコイルばねによっ
てもどされると、押し板ばね24、小板ばね26および
板ばね23はいずれもそれぞれその有する弾発力によっ
て復元し、第3図に示す最初の状態にもどる。
On the other hand, the remaining sample containers 1' in the holder 12 are held by the sample container holder 12 because the second one from the bottom is supported by the bent portion of the small leaf spring 26 that is pushed together with the push leaf spring 24. When the operating rod 13 is returned by the coil spring, the pushing leaf spring 24, the small leaf spring 26, and the leaf spring 23 are all restored by their respective elastic forces, returning to the initial state shown in FIG.

ついで試料容器1′を収容した試料導入プローブ14を
左方に押込み、試料ガス導入筒27の中へ挿入し、ボー
ト15の先端部をイオン化室5の側壁に押付けてその位
置に保持する。
Next, the sample introduction probe 14 containing the sample container 1' is pushed to the left and inserted into the sample gas introduction cylinder 27, and the tip of the boat 15 is pressed against the side wall of the ionization chamber 5 and held in that position.

そして試料容器1′をコイル状ヒータ8によって加熱し
、その中の試料を気化し試料ガスとする。
Then, the sample container 1' is heated by the coiled heater 8, and the sample therein is vaporized to form a sample gas.

この試料ガスは試料ガス導入筒27によって上方への拡
散が防止され、導入孔15′を介してイオン化室5の側
壁の穴がら内部へ導入される。
This sample gas is prevented from diffusing upward by the sample gas introduction cylinder 27, and is introduced into the hole in the side wall of the ionization chamber 5 through the introduction hole 15'.

以上によって試料の導入が完了するが、つづく試料ガス
のイオン化、そのイオンについての分析測定については
すでにのべたとおりであるので省略する。
The introduction of the sample is thus completed, but the subsequent ionization of the sample gas and analysis and measurement of the ions have already been described and will therefore be omitted.

試料の分析測定を終えると、試料導入プローブ14をも
との待機位置まで引きもどし、バルブ7′を把手7″を
操作して開き、試料導入部6と、さきに試料導入部6と
同程度の真空度にされている試料回収びん29とを連通
させ、バルブ7′の貫通穴を開いておく。
When the analysis and measurement of the sample is completed, the sample introduction probe 14 is returned to the original standby position, the valve 7' is opened by operating the handle 7'', and the sample introduction section 6 is opened to the same extent as the sample introduction section 6. A through hole in the valve 7' is opened to communicate with the sample recovery bottle 29 which is kept at a vacuum level of .

そして試料導入プローブ14を待機位置で180°回動
させると、ボート15の中の試料容器1′はバルブ7′
の貫通穴を介して回収びん29の中に落しこまれ、回収
される。
Then, when the sample introduction probe 14 is rotated 180 degrees from the standby position, the sample container 1' in the boat 15 is transferred to the valve 7'.
It is dropped into the collection bottle 29 through the through hole and collected.

2番目以降の試料容器1′の導入ならびに回収について
は前記したとおりの動作を反復して行えばよく、このよ
うにして試料低密保持器12に装填した複数個の試料容
器1′全部のそれぞれ試料について分析測定を終えたな
らば、試料容器保持器12を予備室3に引上げ、バルブ
7を閉じて、導入部6と予備室3との連通を遮断すると
ともに、排気管路への接続バルブも閉じて、予備室3に
外気を導入し、大気圧状態にしてから試料容器保持器1
2を取出し、試料をいれた試料容器1′を複数個それに
装填し、前記同様にして試料導入部6の所定位置にその
試料容器保持器12を再度定置する。
For the introduction and recovery of the second and subsequent sample containers 1', the above-mentioned operations can be repeated, and in this way, each of the plurality of sample containers 1' loaded in the sample low-density holder 12 is removed. After analysis and measurement of the sample is completed, the sample container holder 12 is pulled up to the preliminary chamber 3, the valve 7 is closed to cut off communication between the introduction section 6 and the preliminary chamber 3, and the connection valve to the exhaust pipe line is closed. Close the sample container holder 1, introduce outside air into the preliminary chamber 3, bring it to atmospheric pressure, and then close the sample container holder 1.
2, a plurality of sample containers 1' containing samples are loaded therein, and the sample container holder 12 is again placed at a predetermined position in the sample introduction section 6 in the same manner as described above.

そして前記した試料容器1′の導入、回収動作を繰返す
わけである。
Then, the operations of introducing and collecting the sample container 1' described above are repeated.

また、回収び゛ん29にこのようにしてためられた試料
容器1′は適当な時期にバルブ7′を閉じて回収びん2
9と導入部6との連通を断ち、図には示してないが、バ
ルブによって外気を回収びん29内に導入し、びん内の
気圧を大気圧状態にしてから回収びん29をバルブ7′
から取りはずして、その中の試料容器1′を外に取出せ
ばよい。
In addition, the sample container 1' stored in this manner in the collection bottle 29 is transferred to the collection bottle 2 by closing the valve 7' at an appropriate time.
9 and the introduction part 6, and outside air is introduced into the recovery bottle 29 through a valve (not shown) to bring the pressure inside the bottle to atmospheric pressure.
All you have to do is remove it from the container and take out the sample container 1' inside.

この考案の本旨ではないが、揮発性の高い試料の分析測
定に備えボート15の待機位置において、ボート15の
左方向への移動および試料容器1′の落下を妨げぬ範囲
に水冷却管を配設して、ボート15をつねに冷却するよ
うにして、その中に収容される試料容器1′内の試料の
気化を防止する手段を施してもよい。
Although this is not the main idea of this invention, in preparation for analysis and measurement of highly volatile samples, a water cooling pipe is installed in the standby position of the boat 15 in a range that does not impede leftward movement of the boat 15 and fall of the sample container 1'. The boat 15 may be provided with means to constantly cool the boat 15 and prevent the sample contained in the sample container 1' contained therein from vaporizing.

以上のでたようにたとえば7個の試料容器1′をつぎつ
ぎにイオン化室5に導入する場合、従来の装置において
は試料容器1′を1個づつ導入する毎に面倒な準備工程
である真空エアロツク操作を行ない、その操作を全部で
14回も行なわねばならないのに比べて、この考案の装
置においては試料容器保持器12の所定位置への挿入と
、それからの外部への取出しに対して各1回の真空エア
ロツク操作を行なうのみでよく、また回収びん29の取
りはずしも適宜前記の真空エアロツク操作のいずれかと
併行して行なうことができるから、12回分の真空エア
ロツク操作が省略できることから、分析測定の所要延時
間数をその中の準備工程に要する時間が大幅に節約され
るため少くとも50%以下に短縮することができる。
As mentioned above, when introducing, for example, seven sample containers 1' into the ionization chamber 5 one after another, in the conventional apparatus, the vacuum aerodynamic operation, which is a troublesome preparation process, is performed each time the sample containers 1' are introduced one by one. In contrast, in the device of this invention, the operation is performed once each for inserting the sample container holder 12 into a predetermined position and removing it from the outside. It is only necessary to carry out the vacuum airlock operation described above, and the removal of the collection bottle 29 can also be carried out in parallel with any of the vacuum airlock operations described above, so 12 vacuum airlock operations can be omitted. The total number of hours can be reduced by at least 50% because the time required for the preparation process is significantly saved.

この考案にかI・る装置が熱電子衝撃形イオン源を用い
た磁界形単収束質量分析計に組みこまれた実施例につい
て、以上説明したがその他の質量分析計に使用できるこ
とはいうまでもなく、また複数個の試料容器を装填した
試料容器保持器から、試料容器を1個づつ加熱気化部へ
導入する方法は前記の実施例に限定されるものではなく
種々の方法が可能である。
Although the embodiment described above is an example in which the device according to this invention is incorporated into a magnetic field type single focus mass spectrometer using a thermionic bombardment type ion source, it goes without saying that it can be used in other mass spectrometers. Moreover, the method of introducing sample containers one by one from a sample container holder loaded with a plurality of sample containers into the heating vaporization section is not limited to the above embodiment, and various methods are possible.

以上の説明によって明らかなように、この考案にかかる
質量分析計におる連続試料導入装置によれば従来の装置
による場合と比較すると、多数の試料の分析測定におい
ては、面倒な準備工程である所定真空チャンバー内への
試料容器の導入ならびにそれからの取出しに際して必要
な真空エアロツク操作を試料の測定毎に繰返して行なう
必がなく、複数個の試料容器の同時導入時と同時取出し
時に各1回宛行なうのみでよく、分析測定の所要延時間
に占める面倒な準備工程に要する時間を大幅に節約でき
ることから、全体の試料の分析測定に要する時間を少く
とも50%以下に短縮し、多数個の試料の分析測定をき
わめて能率高く行なうことができる。
As is clear from the above explanation, the continuous sample introduction device in the mass spectrometer according to this invention is more effective than the conventional device, which requires a tedious preparation process for analysis and measurement of a large number of samples. There is no need to repeat the vacuum air operation required for introducing and removing sample containers into the vacuum chamber for each sample measurement, and it is performed once each when introducing and removing multiple sample containers at the same time. This reduces the time required for the tedious preparation process, which accounts for the total time required for analytical measurements, and reduces the time required for analytical measurements of the entire sample to at least 50% or less. Analytical measurements can be performed extremely efficiently.

また多数の試料の分析測定において、真空エアロツク操
作の繰返し回数を大幅に減少できることから、真空ポン
プからの微量油分や大気の微量成分を真空チャンバー内
に持込み、測定のバックグランドを乱すなどの障害を大
幅に減少させることができる。
In addition, when analyzing and measuring a large number of samples, it is possible to significantly reduce the number of repetitions of vacuum air operation, thereby preventing problems such as trace amounts of oil from the vacuum pump and trace components from the atmosphere being brought into the vacuum chamber and disturbing the measurement background. can be significantly reduced.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は質量分析計における従来の試料導入装置の模式
説明図、第2図は質量分析計に組みこまれたこの考案に
かかる連続試料導入装置の模式説明図、第3図は試料容
器保持器ならびに誘料導入プローブの試料容器収容部(
ボート)の主要部を示す斜視図、第4図は試料容器保持
器の主要部の作動状態を示す説明図である。 1.1・・・・・・試料容器、3・・・・・・予備室、
5・・・・・・イオン化室(イオン源)、6・・・・・
・試料導入部、7,7′・・・・・・バルブ(サークル
バルブ)、7″・・・・・・把手、8・・・・・・コイ
ル状ヒータ、12・・・・・・試料容器保持器、13・
・・・・・試料容器装填操作ロッド、14・・・・・・
試料導入プローブ、15・・・・・・試料容器収容部(
ボート)、21・・・・・・支持腕、22・・・・・・
箱枠、23・・・・・・板ばね(底板)、24・・・・
・・押し板ばね、25・・・・・・スリット、26・・
・・・・小板ばね(支持板)、27・・・・・・試料ガ
ス導入筒(加熱気化部)、28,28′・・・・・・シ
ール、29・・・・・・試料容器回収びん。
Figure 1 is a schematic illustration of a conventional sample introduction device in a mass spectrometer, Figure 2 is a schematic illustration of a continuous sample introduction device according to this invention incorporated into a mass spectrometer, and Figure 3 is a sample container holder. sample container storage part of the sample container and the diluent introduction probe (
FIG. 4 is an explanatory view showing the operating state of the main part of the sample container holder. 1.1...Sample container, 3...Preliminary room,
5...Ionization chamber (ion source), 6...
・Sample introduction part, 7, 7'... Valve (circle valve), 7''... Handle, 8... Coiled heater, 12... Sample Container holder, 13.
...Sample container loading operation rod, 14...
Sample introduction probe, 15...Sample container housing part (
boat), 21... support arm, 22...
Box frame, 23... Leaf spring (bottom plate), 24...
・・Push plate spring, 25・・・・Slit, 26・・
...Small leaf spring (support plate), 27...Sample gas introduction cylinder (heating vaporization section), 28, 28'...Seal, 29...Sample container Collection bottle.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 1.真空になしうる予備室と、この予備室に対し開閉自
在のバルブにて気密に隔離された真空チャンバーと、前
記バルブを介して前記予備室から前記真空チャンバーの
所定位置に挿入され、かつ試料を入れた複数個の試料容
器を着脱自在に保持する試料保持器と、真空外からの操
作によって前記試料保持器から試料容器を1個づつ試料
をガス化してイオン源に導入する加熱気化部へ移送する
機構と、この加熱気化部に移送した試料容器を前記とは
別の開閉自在のバルブを介して真空チャンバーに装着さ
れている試料回収びんに導入させる機構とを備えてなる
質量分析計における連続試料導入装置。 2、試料保持器から試料を1個づつ加熱気化部へ移送す
る機構が、試料保持器の着脱自在なるようにされた底板
と、この底板の取り外し動作と連動し、前記試料保持器
に積み重ね装填された試料容器の下から二番目以上に対
してそれらを支持するように動作する前記試料保持器に
取付けた支持板と、前記底板の着脱動作および前記支持
板の脱出・支持動作をそれぞれ互に連動して行なわせる
ようにした真空チャンバー壁面に気密を保ち摺動自在に
係合した試料容器装填操作ロッドと、前記底板の取外し
動作ごとに前記試料容器保持器の下端より1個づつ落と
される試料容器の収容部を有し、それに収容した前記試
料容器を真空チャンバー内の気化部へ導入するようにし
た真空チャンバー壁面に気密を保ち摺動自在に係合した
試料導入プローブとからなるものである実用新案登録請
求の範囲第1項記載の質量分析計における連続試料導入
装置。 3、加熱気化部に移送した試料容器を試料回収びんに導
入させる機構が、試料容器収容部を有し、それに収容さ
れた試料容器を真空チャンバー内の加熱気化部から前記
真空チャンバーに装着した試料回収びんの直上へ引出し
、その位置において180°回動させ試料容器を前記試
料回収びんに落下させうけとらせるようにした真空チャ
ンバー壁面に気密を保ち摺動ならびに回動自在に係合し
た試料導入プローブからなるものである実用新案登録請
求の範囲第1項記載の質量分析計における連続試料導入
装置。
1. A preliminary chamber that can be evacuated, a vacuum chamber that is airtightly isolated from the preliminary chamber by a valve that can be opened and closed; A sample holder that removably holds multiple sample containers, and a heating vaporization unit that gasifies the sample and introduces it into the ion source from the sample holder one by one by operation from outside the vacuum. and a mechanism for introducing the sample container transferred to the heating vaporization section into the sample collection bottle attached to the vacuum chamber via a separate valve that can be opened and closed. Sample introduction device. 2. The mechanism for transferring samples one by one from the sample holder to the heating vaporization section works in conjunction with the removable bottom plate of the sample holder and the removal operation of this bottom plate, and stacks and loads the samples in the sample holder. A support plate attached to the sample holder that operates to support the second or higher sample container from the bottom, and a support plate attached to the sample holder that operates to support the second or more sample containers from the bottom, and mutually perform the attachment/detachment operation of the bottom plate and the escape/support operation of the support plate. A sample container loading operation rod is slidably engaged with the wall surface of the vacuum chamber in an airtight manner, and a sample is dropped one by one from the lower end of the sample container holder each time the bottom plate is removed. The sample introduction probe has a container accommodating section and is slidably engaged with the wall surface of the vacuum chamber to introduce the sample container accommodated therein into the vaporizing section in the vacuum chamber. A continuous sample introduction device for a mass spectrometer according to claim 1 of the utility model registration claim. 3. The mechanism for introducing the sample container transferred to the heating vaporization section into the sample collection bottle has a sample container accommodating section, and the sample container accommodated therein is transferred from the heating vaporization section in the vacuum chamber to the sample attached to the vacuum chamber. A sample introduction member that is slidably and rotatably engaged with the wall surface of the vacuum chamber in an airtight manner so that the sample container is pulled out directly above the collection bottle and rotated 180 degrees at that position to allow the sample container to fall into and be received by the sample collection bottle. A continuous sample introduction device for a mass spectrometer according to claim 1, which comprises a probe.
JP8726478U 1978-06-22 1978-06-22 Continuous sample introduction device in mass spectrometer Expired JPS592521Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8726478U JPS592521Y2 (en) 1978-06-22 1978-06-22 Continuous sample introduction device in mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8726478U JPS592521Y2 (en) 1978-06-22 1978-06-22 Continuous sample introduction device in mass spectrometer

Publications (2)

Publication Number Publication Date
JPS553788U JPS553788U (en) 1980-01-11
JPS592521Y2 true JPS592521Y2 (en) 1984-01-24

Family

ID=29012629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8726478U Expired JPS592521Y2 (en) 1978-06-22 1978-06-22 Continuous sample introduction device in mass spectrometer

Country Status (1)

Country Link
JP (1) JPS592521Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021122842A1 (en) * 2019-12-18 2021-06-24 Leybold Gmbh Holding device for at least one filament and mass spectrometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021122842A1 (en) * 2019-12-18 2021-06-24 Leybold Gmbh Holding device for at least one filament and mass spectrometer

Also Published As

Publication number Publication date
JPS553788U (en) 1980-01-11

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