JP2002346451A5 - - Google Patents

Download PDF

Info

Publication number
JP2002346451A5
JP2002346451A5 JP2001155230A JP2001155230A JP2002346451A5 JP 2002346451 A5 JP2002346451 A5 JP 2002346451A5 JP 2001155230 A JP2001155230 A JP 2001155230A JP 2001155230 A JP2001155230 A JP 2001155230A JP 2002346451 A5 JP2002346451 A5 JP 2002346451A5
Authority
JP
Japan
Prior art keywords
substrate
coating
discharge port
ring
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001155230A
Other languages
English (en)
Japanese (ja)
Other versions
JP3818633B2 (ja
JP2002346451A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001155230A priority Critical patent/JP3818633B2/ja
Priority claimed from JP2001155230A external-priority patent/JP3818633B2/ja
Publication of JP2002346451A publication Critical patent/JP2002346451A/ja
Publication of JP2002346451A5 publication Critical patent/JP2002346451A5/ja
Application granted granted Critical
Publication of JP3818633B2 publication Critical patent/JP3818633B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2001155230A 2001-05-24 2001-05-24 塗布膜形成装置及びその方法 Expired - Fee Related JP3818633B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001155230A JP3818633B2 (ja) 2001-05-24 2001-05-24 塗布膜形成装置及びその方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001155230A JP3818633B2 (ja) 2001-05-24 2001-05-24 塗布膜形成装置及びその方法

Publications (3)

Publication Number Publication Date
JP2002346451A JP2002346451A (ja) 2002-12-03
JP2002346451A5 true JP2002346451A5 (https=) 2004-09-30
JP3818633B2 JP3818633B2 (ja) 2006-09-06

Family

ID=18999462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001155230A Expired - Fee Related JP3818633B2 (ja) 2001-05-24 2001-05-24 塗布膜形成装置及びその方法

Country Status (1)

Country Link
JP (1) JP3818633B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004330136A (ja) * 2003-05-09 2004-11-25 Seiko Epson Corp 液状膜の乾燥方法、有機ｅｌパネルの製造方法、電気光学パネルの製造方法及び電子機器の製造方法、並びに液状膜の乾燥装置、電気光学パネル、電気光学装置及び電子機器
JP5537581B2 (ja) * 2012-03-08 2014-07-02 株式会社東芝 塗布装置及び塗布体の製造方法
CN114210501A (zh) * 2021-12-22 2022-03-22 东莞市嘉田电子科技有限公司 一种电脑机箱表面快速喷涂换色自动化生产线及换色方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1133471A (ja) * 1997-07-23 1999-02-09 Tokyo Electron Ltd 塗布装置
JP3527426B2 (ja) * 1998-01-09 2004-05-17 東京エレクトロン株式会社 現像処理方法および現像処理装置

Similar Documents

Publication Publication Date Title
US6814310B2 (en) Metered liquid dispensing system
JP6151829B2 (ja) 基板処理装置
CN106282969B (zh) 化学气相沉积装置及其沉积方法
JP3702068B2 (ja) 被処理基板の処理装置
EP1752553A3 (en) Method for microstructure control of ceramic thermal spray coating
WO2008121275A3 (en) Method and apparatus for membrane deposition
CN102414863A (zh) 用于有机蒸汽印刷的方法和设备
CA2689919A1 (en) Liquid fertilizer distribution system and method
JP2003309075A (ja) 半導体製造装置および半導体装置の製造方法
JP2002346451A5 (https=)
WO2020085909A3 (en) Slot-die coating apparatus
EP2283931A3 (en) Liquid dispenser having individualized process air control
JP7170546B2 (ja) 試料保持具
JPH01249148A (ja) 回転霧化式静電塗装機の塗布パターン制御方法
US7469639B2 (en) Printing device and method of coating a printing roll and fabricating a LCD device using the printing device
JP2005086208A (ja) プラズマエッチング装置
JP2018093148A (ja) 給排気構造
JP2001196318A (ja) 半導体処理方法および装置
JPH104065A (ja) 枚葉式減圧ｃｖｄ装置
CN104460125A (zh) 液晶涂布喷嘴及液晶涂布装置
KR100246313B1 (ko) 진공증착 장비의 웨이퍼 가열장치
JP2003243380A5 (https=)
JP2007042671A5 (https=)
JP2008159727A (ja) レジスト塗布装置
JP2017188502A (ja) 塗工装置および塗工方法