JP2002317262A5 - - Google Patents
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- Publication number
- JP2002317262A5 JP2002317262A5 JP2002023528A JP2002023528A JP2002317262A5 JP 2002317262 A5 JP2002317262 A5 JP 2002317262A5 JP 2002023528 A JP2002023528 A JP 2002023528A JP 2002023528 A JP2002023528 A JP 2002023528A JP 2002317262 A5 JP2002317262 A5 JP 2002317262A5
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- film
- organic compound
- vapor deposition
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000002894 organic compounds Chemical class 0.000 claims 50
- 230000008020 evaporation Effects 0.000 claims 38
- 238000001704 evaporation Methods 0.000 claims 38
- 238000007740 vapor deposition Methods 0.000 claims 25
- 230000015572 biosynthetic process Effects 0.000 claims 21
- 238000000151 deposition Methods 0.000 claims 14
- 230000008021 deposition Effects 0.000 claims 13
- 238000000034 method Methods 0.000 claims 8
- 150000004696 coordination complex Chemical class 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 3
- 230000000903 blocking effect Effects 0.000 claims 2
- 125000002943 quinolinyl group Chemical group N1=C(C=CC2=CC=CC=C12)* 0.000 claims 2
- 230000003746 surface roughness Effects 0.000 claims 2
- 125000000355 1,3-benzoxazolyl group Chemical group O1C(=NC2=C1C=CC=C2)* 0.000 claims 1
- NSMJMUQZRGZMQC-UHFFFAOYSA-N 2-naphthalen-1-yl-1H-imidazo[4,5-f][1,10]phenanthroline Chemical compound C12=CC=CN=C2C2=NC=CC=C2C2=C1NC(C=1C3=CC=CC=C3C=CC=1)=N2 NSMJMUQZRGZMQC-UHFFFAOYSA-N 0.000 claims 1
- -1 aromatic diamine compound Chemical class 0.000 claims 1
- WZJYKHNJTSNBHV-UHFFFAOYSA-N benzo[h]quinoline Chemical group C1=CN=C2C3=CC=CC=C3C=CC2=C1 WZJYKHNJTSNBHV-UHFFFAOYSA-N 0.000 claims 1
- IOJUPLGTWVMSFF-UHFFFAOYSA-N benzothiazole Chemical group C1=CC=C2SC=NC2=C1 IOJUPLGTWVMSFF-UHFFFAOYSA-N 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 150000004866 oxadiazoles Chemical class 0.000 claims 1
- 150000003852 triazoles Chemical class 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002023528A JP4343480B2 (ja) | 2001-02-08 | 2002-01-31 | 成膜装置及び発光装置の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001-32997 | 2001-02-08 | ||
| JP2001032997 | 2001-02-08 | ||
| JP2002023528A JP4343480B2 (ja) | 2001-02-08 | 2002-01-31 | 成膜装置及び発光装置の作製方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008178855A Division JP5147575B2 (ja) | 2001-02-08 | 2008-07-09 | 成膜装置及び発光装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002317262A JP2002317262A (ja) | 2002-10-31 |
| JP2002317262A5 true JP2002317262A5 (https=) | 2005-08-11 |
| JP4343480B2 JP4343480B2 (ja) | 2009-10-14 |
Family
ID=26609164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002023528A Expired - Fee Related JP4343480B2 (ja) | 2001-02-08 | 2002-01-31 | 成膜装置及び発光装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4343480B2 (https=) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100525819B1 (ko) * | 2003-05-06 | 2005-11-03 | 엘지전자 주식회사 | 유기 이엘 디스플레이 패널 제조용 새도우 마스크 |
| WO2005009088A1 (ja) * | 2003-07-23 | 2005-01-27 | Konica Minolta Holdings, Inc. | 有機エレクトロルミネッセンス素子、照明装置及び表示装置 |
| JP2005285576A (ja) * | 2004-03-30 | 2005-10-13 | Mitsubishi-Hitachi Metals Machinery Inc | インライン式有機エレクトロルミネセンス製造装置 |
| JP4934619B2 (ja) * | 2008-03-17 | 2012-05-16 | 株式会社アルバック | 有機ｅｌ製造装置及び有機ｅｌ製造方法 |
| JP5674434B2 (ja) * | 2010-11-19 | 2015-02-25 | 株式会社アルバック | 蒸着装置及び蒸着方法 |
| JP5902515B2 (ja) | 2011-03-14 | 2016-04-13 | 株式会社半導体エネルギー研究所 | 連続成膜装置及び連続成膜方法 |
| US9273079B2 (en) | 2011-06-29 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Organometallic complex, light-emitting element, light-emitting device, electronic device, and lighting device |
| JP6013077B2 (ja) * | 2012-08-13 | 2016-10-25 | 株式会社カネカ | 真空蒸着装置及び有機ｅｌ装置の製造方法 |
| JP6363836B2 (ja) | 2012-12-20 | 2018-07-25 | 株式会社半導体エネルギー研究所 | 発光素子 |
| KR101943268B1 (ko) * | 2018-04-26 | 2019-01-28 | 캐논 톡키 가부시키가이샤 | 진공 시스템, 기판 반송 시스템, 전자 디바이스의 제조 장치 및 전자 디바이스의 제조 방법 |
-
2002
- 2002-01-31 JP JP2002023528A patent/JP4343480B2/ja not_active Expired - Fee Related
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