JP2002302757A5 - - Google Patents
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- Publication number
- JP2002302757A5 JP2002302757A5 JP2002022741A JP2002022741A JP2002302757A5 JP 2002302757 A5 JP2002302757 A5 JP 2002302757A5 JP 2002022741 A JP2002022741 A JP 2002022741A JP 2002022741 A JP2002022741 A JP 2002022741A JP 2002302757 A5 JP2002302757 A5 JP 2002302757A5
- Authority
- JP
- Japan
- Prior art keywords
- organic compound
- film
- chamber
- forming
- evaporation source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000002894 organic compounds Chemical class 0.000 claims 71
- 230000008020 evaporation Effects 0.000 claims 53
- 238000001704 evaporation Methods 0.000 claims 53
- 230000015572 biosynthetic process Effects 0.000 claims 20
- 238000007740 vapor deposition Methods 0.000 claims 18
- 230000008021 deposition Effects 0.000 claims 12
- 238000000034 method Methods 0.000 claims 7
- 150000004696 coordination complex Chemical class 0.000 claims 5
- 239000002184 metal Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 150000001875 compounds Chemical class 0.000 claims 3
- 238000002347 injection Methods 0.000 claims 3
- 239000007924 injection Substances 0.000 claims 3
- 230000000903 blocking effect Effects 0.000 claims 2
- 125000002943 quinolinyl group Chemical group N1=C(C=CC2=CC=CC=C12)* 0.000 claims 2
- 125000000355 1,3-benzoxazolyl group Chemical group O1C(=NC2=C1C=CC=C2)* 0.000 claims 1
- NSMJMUQZRGZMQC-UHFFFAOYSA-N 2-naphthalen-1-yl-1H-imidazo[4,5-f][1,10]phenanthroline Chemical compound C12=CC=CN=C2C2=NC=CC=C2C2=C1NC(C=1C3=CC=CC=C3C=CC=1)=N2 NSMJMUQZRGZMQC-UHFFFAOYSA-N 0.000 claims 1
- 229940126062 Compound A Drugs 0.000 claims 1
- NLDMNSXOCDLTTB-UHFFFAOYSA-N Heterophylliin A Natural products O1C2COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC2C(OC(=O)C=2C=C(O)C(O)=C(O)C=2)C(O)C1OC(=O)C1=CC(O)=C(O)C(O)=C1 NLDMNSXOCDLTTB-UHFFFAOYSA-N 0.000 claims 1
- -1 aromatic diamine compound Chemical class 0.000 claims 1
- WZJYKHNJTSNBHV-UHFFFAOYSA-N benzo[h]quinoline Chemical group C1=CN=C2C3=CC=CC=C3C=CC2=C1 WZJYKHNJTSNBHV-UHFFFAOYSA-N 0.000 claims 1
- IOJUPLGTWVMSFF-UHFFFAOYSA-N benzothiazole Chemical group C1=CC=C2SC=NC2=C1 IOJUPLGTWVMSFF-UHFFFAOYSA-N 0.000 claims 1
- 239000003086 colorant Substances 0.000 claims 1
- 230000005525 hole transport Effects 0.000 claims 1
- 150000004866 oxadiazoles Chemical class 0.000 claims 1
- 150000003852 triazoles Chemical class 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002022741A JP4101522B2 (ja) | 2001-02-01 | 2002-01-31 | 成膜装置及び成膜方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001026184 | 2001-02-01 | ||
| JP2001-26184 | 2001-02-01 | ||
| JP2002022741A JP4101522B2 (ja) | 2001-02-01 | 2002-01-31 | 成膜装置及び成膜方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002302757A JP2002302757A (ja) | 2002-10-18 |
| JP2002302757A5 true JP2002302757A5 (https=) | 2005-08-11 |
| JP4101522B2 JP4101522B2 (ja) | 2008-06-18 |
Family
ID=26608814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002022741A Expired - Fee Related JP4101522B2 (ja) | 2001-02-01 | 2002-01-31 | 成膜装置及び成膜方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4101522B2 (https=) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6737177B2 (en) * | 2001-11-08 | 2004-05-18 | Xerox Corporation | Red organic light emitting devices |
| US8808457B2 (en) * | 2002-04-15 | 2014-08-19 | Samsung Display Co., Ltd. | Apparatus for depositing a multilayer coating on discrete sheets |
| CN1723741B (zh) | 2002-12-12 | 2012-09-05 | 株式会社半导体能源研究所 | 发光装置、制造装置、成膜方法及清洁方法 |
| US7510913B2 (en) | 2003-04-11 | 2009-03-31 | Vitex Systems, Inc. | Method of making an encapsulated plasma sensitive device |
| JP4549697B2 (ja) * | 2004-03-04 | 2010-09-22 | 株式会社アルバック | 成膜装置及び成膜方法 |
| US7948171B2 (en) * | 2005-02-18 | 2011-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device |
| TWI316977B (en) * | 2005-08-04 | 2009-11-11 | Dms Co Ltd | Catalytic metal doping apparatus for low temperature poly-silicon crystallization and catalytic metal doping method using the same |
| CN100381604C (zh) * | 2006-01-25 | 2008-04-16 | 中国科学院力学研究所 | 多源蒸发物理气相沉积系统 |
| JP2007258237A (ja) * | 2006-03-20 | 2007-10-04 | Univ Nagoya | 有機積層構造材料の構造安定化方法とその利用 |
| US9028975B2 (en) | 2006-05-04 | 2015-05-12 | Lg Chem, Ltd. | Organic light-emitting device having light-emitting pattern, method and apparatus for preparing the same |
| KR101083443B1 (ko) * | 2007-03-01 | 2011-11-14 | 가부시키가이샤 알박 | 박막 형성 방법 및 박막 형성 장치 |
| US8384283B2 (en) | 2007-09-20 | 2013-02-26 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting element, light-emitting device, and electronic device |
| EP2230703A3 (en) * | 2009-03-18 | 2012-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing apparatus and manufacturing method of lighting device |
| US8815352B2 (en) | 2010-03-18 | 2014-08-26 | Semiconductor Energy Laboratory Co., Ltd. | Film forming method and method for manufacturing film-formation substrate |
| US8951816B2 (en) | 2010-03-18 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Film forming method |
| JP5747022B2 (ja) * | 2010-03-18 | 2015-07-08 | 株式会社半導体エネルギー研究所 | 成膜方法及び成膜用基板の作製方法 |
| US9273079B2 (en) | 2011-06-29 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Organometallic complex, light-emitting element, light-emitting device, electronic device, and lighting device |
| JP6363836B2 (ja) | 2012-12-20 | 2018-07-25 | 株式会社半導体エネルギー研究所 | 発光素子 |
| CN116964740A (zh) * | 2021-02-22 | 2023-10-27 | 应用材料公司 | 用于固化印刷在基板上的油墨的设备、系统和方法 |
-
2002
- 2002-01-31 JP JP2002022741A patent/JP4101522B2/ja not_active Expired - Fee Related
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